IP Library Granted Patent US 10,622,223
Granted Patent B2
US 10,622,223 · App. 16/009,119 · Granted Apr 14, 2020

Semiconductor device with a multi-layered encapsulant and associated systems, devices, and methods

Inventors: Shijian Luo (Boise, ID); Jonathan S. Hacker (Meridian, ID)
Assignee: Micron Technology, Inc.
H01L21/563H01L23/3157H01L24/16H01L24/29H01L24/73H01L24/81H01L24/91H01L24/83H01L2224/131H01L2224/13082H01L2224/16227H01L2224/26145H01L2224/29023H01L2224/73104H01L2224/73204H01L2224/81191H01L2224/81815H01L2224/83007H01L2224/83191H01L2224/83193H01L2224/9211H01L2224/94
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Quick Facts
Patent No.
US 10,622,223
App. No.
16/009,119
Filed
Jun 14, 2018
Granted
Apr 14, 2020
Kind
B2
Art Unit
2898
USPC
257/737
Abstract

A semiconductor device includes a substrate including traces, wherein the traces protrude above a top surface of the substrate; a prefill material over the substrate and between the traces, wherein the prefill material directly contacts peripheral surfaces of the traces; a die attached over the substrate; and a wafer-level underfill between the prefill material and the die.

Claims (36)

1. A semiconductor device, comprising:

a substrate including traces, wherein the traces protrude above a top surface of the substrate;

a prefill material over the substrate and between the traces, wherein the prefill material directly contacts peripheral surfaces of the traces and the top surface of the substrate;

a die attached over the substrate, wherein the die includes a bottom surface and pillars protruding from the die, wherein the pillars are electrically coupled to the traces via solder; and

a wafer-level underfill between the prefill material and the die, wherein:

the wafer-level underfill includes material that, at least under an initial state, reflows with the solder;

at least one of the wafer-level underfill and the prefill material is cured with the wafer-level underfill and the prefill material persisting as separate layers after curing, and

the wafer-level underfill directly contacts the bottom surface of the die and the pillars.

2. The semiconductor device of claim 1 wherein the prefill material corresponds to a first viscosity level for a manufacturing condition, wherein the first viscosity level is lower than a second viscosity level of the wafer-level underfill for the manufacturing condition that corresponds to a temperature, a lighting condition, and/or an ambient gas composition.

3. The semiconductor device of claim 2 wherein the prefill material includes a nonconductive paste (NCP).

4. The semiconductor device of claim 3 wherein the NCP includes a fluxing function or trait.

5. The semiconductor device of claim 3 wherein the NCP has a top surface that is coplanar with or above one or more top surfaces of the traces.

6. The semiconductor device of claim 2 further comprising a solder mask with a top surface that is coplanar with or below one or more top surfaces of the traces, wherein the solder mask is laterally adjacent to the prefill material.

7. The semiconductor device of claim 1 wherein the prefill material directly contacts the wafer-level underfill.

8. A method of manufacturing a semiconductor device, comprising:

providing a substrate including traces, wherein the traces protrude above a top surface of the substrate;

forming a prefill material over the substrate and between the traces based on applying a nonconductive paste (NCP) between the traces, wherein the prefill material directly contacts peripheral surfaces of the traces; and

attaching an interim structure to the substrate over the prefill material, wherein:

the interim structure includes:

a die having a bottom surface,

pillars protruding from the bottom surface of the die,

solder on distal ends of the pillars opposite the bottom surface, and

a wafer-level underfill between the die and the prefill material; and

attaching the interim structure includes reflowing the solder and the wafer-level underfill.

9. The method of claim 8 wherein applying the NCP includes applying the NCP including a fluxing function or trait.

10. The method of claim 8 wherein applying the NCP includes applying the NCP with a top surface of the NCP coplanar with or above top surfaces of the traces.

11. The method of claim 8 wherein:

applying the NCP includes applying the NCP directly contacting at least a portion of one or more top surfaces of the traces;

attaching the interim structure includes removing the NCP from at least a portion of one or more top surfaces of the traces based on a fluxing function associated with the NCP.

12. The method of claim 8 wherein attaching the interim structure includes attaching the interim structure without curing the NCP.

13. The method of claim 8 further comprising at least partially curing the NCP before attaching the interim structure.

14. The method of claim 8 further comprising assembling the interim structure including:

providing the die including the pillars extending from the bottom surface of the die;

forming solder bumps on the pillars opposite the die; and

laminating the wafer-level underfill directly contacting the bottom surface and pillars.

15. The method of claim 14 wherein reflowing the solder bumps and the wafer-level underfill includes reflowing the solder bumps to directly contact the traces and the pillars and reflowing the wafer-level underfill to directly contact the prefill material.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 11, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050713/0001 →
SUPPLEMENT NO. 9 TO PATENT SECURITY AGREEMENT Recorded Aug 9, 2018
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 047282/0463 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 14, 2018
From: LUO, SHIJIAN; HACKER, JONATHAN S.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046095/0088 →