Printed chemical mechanical polishing pad having particles therein
A method of fabricating a polishing layer of a polishing pad includes determining a desired distribution of particles to be embedded within a polymer matrix of the polishing layer. A plurality of layers of the polymer matrix is successively deposited with a 3D printer, each layer of the plurality of layers of polymer matrix being deposited by ejecting a polymer matrix precursor from a nozzle. A plurality of layers of the particles is successively deposited according to the desired distribution with the 3D printer. The polymer matrix precursor is solidified into a polymer matrix having the particles embedded in the desired distribution.
1. A polishing pad, comprising:
a polishing layer having a planar polishing surface, the polishing layer comprising
a polymer matrix; and
a distribution of particles embedded within the polymer matrix with first locations of the polishing layer corresponding to cured droplets of pure polymer precursor and second, different locations of the polishing layer corresponding to cured droplets of polymer precursor mixed with the particles such that the distribution of particles comprises different distribution densities of the particles laterally across the polishing layer parallel to the planar polishing surface, and
wherein the first locations of the polishing layer and the second, different locations of the polishing layer form a pattern across the polishing layer.
2. The polishing pad of claim 1 , wherein the particles have sizes of up to 1 millimeter.
3. The polishing pad of claim 1 , wherein the polymer matrix comprises polyurethane, acrylate, epoxy, acrylonitrile butadiene styrene (ABS), polyetherimide, or polyamides.
4. The polishing pad of claim 1 , wherein the particles are abrasive particles.
5. The polishing pad of claim 4 , wherein the particles are made of a material selected from the group consisting of silica, ceramic, metal, and metal oxide.
6. The polishing pad of claim 1 , wherein the particles include reactive particles that undergo chemical reactions when the polishing layer is used for polishing.
7. The polishing pad of claim 1 , wherein the particles have a hollow core, such that the polishing layer comprises pores formed by the hollow core of particles.
8. The polishing pad of claim 7 , wherein the particles are made of polymer.
9. The polishing pad of claim 8 , wherein the particles have sizes of up to 1 millimeter.
10. The polishing pad of claim 1 , comprising surface features on a surface of the polishing pad.
11. The polishing pad of claim 10 , wherein the surface features comprise elongated grooves.