Passivation against vapor deposition
Passivation layers to inhibit vapor deposition can be used on reactor surfaces to minimize deposits while depositing on a substrate housed therein, or on particular substrate surfaces, such as metallic surfaces on semiconductor substrates to facilitate selective deposition on adjacent dielectric surfaces. Passivation agents that are smaller than typical self-assembled monolayer precursors can have hydrophobic or non-reactive ends and facilitate more dense passivation layers more quickly than self-assembled monolayers, particularly over complex three-dimensional structures.
1. A method for vapor-phase coating, the method comprising:
passivating a conductive surface against vapor-phase deposition, wherein passivating comprises exposing the conductive surface to a vapor-phase passivating agent to form a passivated conductive surface, wherein the passivating agent comprises a haloalkane of the formulae C n H 2n+1 X, C n H 2n X 2 , or R 1 R 2 CX, where:
R 1 and R 2 are each individually hydrogen or an alkyl group;
X is a halogen; and
n is less than 5; and
selectively depositing a layer on a dielectric surface relative to the passivated conductive surface by exposing both the passivated conductive surface and the dielectric surface to vapor-phase deposition reactants.
2. The method of claim 1 , wherein the passivating agent comprises at least one of dichloromethane and chloromethane.
3. The method of claim 1 , wherein the passivated conductive surface comprises hydrophobic terminations or terminations that are inert to the selective deposition of the vapor phase deposition reactants.
4. The method of claim 1 , wherein the passivating agent comprises a compound having a molecular mass of less than or equal to 330 g/mol.
5. The method of claim 1 , wherein the conductive surface comprises one or more of TiN, W, Co, Cu, Ir or TaN.
6. The method of claim 1 , wherein the dielectric surface comprises hafnium oxide, zirconium oxide, titanium oxide, silicon nitride or native oxide.
7. The method of claim 1 , wherein the passivating agent is not heated prior to introduction to exposing the conductive surface.
8. The method of claim 1 , wherein the conductive surface comprises a metallic surface.
9. The method of claim 1 , wherein the dielectric surface comprises an oxide or nitride surface.
10. The method of claim 1 , wherein selectively depositing comprises atomic layer deposition.
11. The method of claim 1 , wherein passivation of the conductive surface selectively forms the passivated conductive surface relative to the dielectric surface.
12. The method of claim 1 , where the passivation forms directly on the conductive surface without blocking passivation on the dielectric surface and without catalytic agents on the conductive surface.
13. The method of claim 1 , wherein passivation of the conductive surface is performed in about 1 day or less.
14. A method for vapor-phase coating, the method comprising:
passivating a conductive surface against vapor-phase deposition, wherein passivating comprises exposing the conductive surface to a vapor-phase passivating agent to form a passivated conductive surface, wherein the passivating agent comprises a halogen containing silane, halogen containing germane or a compound of the formulae SiH 2 X 2 , SiH 3 X, GeH 2 X 2 or GeH 3 X, where X is a halogen; and
selectively depositing a layer on a dielectric surface relative to the passivated conductive surface by exposing both the passivated conductive surface and the dielectric surface to vapor-phase deposition reactants.
15. A vapor-phase deposition process comprising:
passivating a conductive surface against vapor-phase deposition, wherein passivating comprises exposing the conductive surface to a passivating agent comprising a vapor-phase halide to form a passivated conductive surface, wherein the passivating agent comprises a haloalkane of the formulae C n H 2n+1 X, C n H 2n X 2 , or R 1 R 2 CX, where:
R 1 and R 2 are each individually hydrogen or an alkyl group;
X is a halogen; and
n is less than 5; and
selectively depositing a layer on a dielectric surface relative to the passivated conductive surface by exposing both the passivated conductive surface and the dielectric surface to vapor-phase deposition-reactants.
16. The method of claim 15 , wherein the conductive surface comprises oxygen.
17. The method of claim 15 , wherein the passivating agent comprises at least one of dichloromethane and chloromethane.