Integrated semiconductor device having isolation structure for reducing noise
An integrated semiconductor device includes a first transistor and a second transistor formed on a semiconductor substrate, and an isolation structure located adjacent to the transistors, including deep trenches, trapping regions formed between the deep trenches, and trench bottom doping regions formed at the end of each of the deep trenches, wherein each of the trapping regions includes a buried layer, a well region formed on the buried layer, and a highly doped region formed on the well region.
1. An integrated semiconductor device, comprising:
an isolation structure located adjacent to a transistor, the isolation structure comprising:
a substrate,
a first deep trench surrounding the transistor, a second deep trench disposed between the first deep trench and the transistor, and a third deep trench formed adjacent to the first deep trench,
a first bottom doping region formed on an end of the first deep trench,
a second bottom doping region formed on an end of the second deep trench, and
a first buried layer disposed between the first deep trench and the second deep trench,
wherein each of the first and second deep trenches comprises a deep trench portion and a shallow trench portion formed to overlap with the deep trench portion, wherein the deep trench portion of each deep trench directly contacts the shallow trench portion of each deep trench,
wherein a first well region of a first conductivity type is formed directly on the first buried layer, and
a second well region of a second conductivity type opposite to the first conductivity type is formed between the first deep trench and the third deep trench.
2. The integrated semiconductor device of claim 1 , wherein the first bottom doping region contacts the second bottom doping region.
3. The integrated semiconductor device of claim 1 ,
wherein the transistor comprises any one or any combination of two or more of a Radio Frequency (RF) Complementary Metal-Oxide-Semiconductor (CMOS) transistor, a Varactor, a poly resistor and an inductor formed on the substrate.
4. The integrated semiconductor device of claim 3 ,
wherein the Varactor comprises:
a second buried layer of the first conductivity type formed on the substrate;
a deep well region of the first conductivity type formed on the second buried layer;
a source region and a drain region formed in the deep well region, wherein the source region and the drain region have the same conductivity type as the deep well region; and
a gate electrode disposed between the source region and the drain region.
5. The integrated semiconductor device of claim 3 ,
wherein the poly resistor comprises:
a second buried layer of the first conductivity type formed on the substrate;
a deep well region of the first conductivity type formed on the second buried layer;
an insulating film formed on the deep well region;
a polysilicon layer formed on the insulating film; and
highly doped regions formed on both ends of the polysilicon layer.
6. The integrated semiconductor device of claim 3 ,
wherein the inductor comprises:
an insulating layer formed on the substrate;
a lower metal layer formed on the insulating layer;
upper metal layers formed on the lower metal layer, wherein the upper metal layers are connected together to form a coil shape; and
via plugs connected between the upper metal layers and the lower metal layer.
7. The integrated semiconductor device of claim 1 , wherein the transistor comprises a Laterally Diffused Metal-Oxide Semiconductor (LDMOS) transistor or a non-volatile memory device formed on a substrate.
8. The integrated semiconductor device of claim 7 , wherein the LDMOS transistor comprises:
a drift region of the first conductivity type formed on the substrate;
a body region of the second conductivity type;
a source region formed in the body region; and
a drain region formed in the drift region.
9. The integrated semiconductor device of claim 1 , wherein the first buried layer has the first conductivity type, and the first bottom doping region and second bottom doping region have the second conductivity type opposite to the first conductivity type.
10. The integrated semiconductor device of claim 1 , wherein an entire top surface of the first buried layer is spaced apart from a top surface of the substrate.
11. The integrated semiconductor device of claim 1 , wherein the first deep trench has the same depth as the second deep trench with respect to a top surface of the substrate.
12. The integrated semiconductor device of claim 1 , wherein the isolation structure further comprises a highly doped region of the first conductivity type in the well region of the first conductivity type.
13. An integrated semiconductor device, comprising:
an isolation structure located adjacent to a transistor, the isolation structure comprising
a substrate,
a first deep trench surrounding the transistor and a second deep trench disposed between the first deep trench and the transistor,
a first bottom doping region formed on an end of the first deep trench,
a second bottom doping region formed on an end of the second deep trench, and
a first buried layer disposed between the first deep trench and the second deep trench,
wherein the transistor comprises
a second buried layer formed on the substrate,
a deep well region formed on the second buried layer, and
a first well region of a first conductivity type and a second well region of a second conductivity type opposite to the first conductivity type formed on the deep well region,
wherein the second buried layer has a lateral length longer than a lateral length of the first buried layer,
wherein each of the first and second deep trenches comprises a deep trench portion and a shallow trench portion formed to overlap with the deep trench portion, wherein the deep trench portion of each deep trench directly contacts the shallow trench portion of each deep trench.
14. The integrated semiconductor device of claim 13 , wherein the first buried layer directly contacts the first deep trench and the second deep trench, and the second buried layer directly contacts the second deep trench.
15. The integrated semiconductor device of claim 13 , further comprising a third deep trench surrounding the transistor and a fourth deep trench surrounding the transistor, and a third buried layer disposed between the third deep trench and the fourth deep trench.
16. The integrated semiconductor device of claim 13 , further comprising a first shallow trench isolation region formed between the first well region of the first conductivity type and the second well region of the second conductivity type opposite to the first conductivity type formed on the deep well region, wherein the first buried layer is spaced apart from the second buried layer by the second deep trench.
17. An integrated semiconductor device, comprising:
a substrate; and
a junction guard ring structure surrounding a transistor, the junction ring guard structure comprising
a first guard ring comprising a first buried layer, a first deep well region, and a first highly doped region,
a second guard ring comprising a second buried layer, a second deep well region, and a second highly doped region,
a third guard ring comprising a third buried layer, a third deep well region, and a third highly doped region,
a first shallow trench isolation region formed between the first guard ring and the second guard ring, and
a second shallow trench isolation region formed between the second guard ring and the third guard ring,
wherein the transistor comprises
a fourth buried layer of a first conductivity type formed in the substrate, and
a fourth deep well region of the first conductivity type formed on the fourth buried layer,
wherein the fourth buried layer has a lateral length longer than a lateral length of the first buried layer.
18. The integrated semiconductor device of claim 17 , wherein the first buried layer, the first deep well region, and the first highly doped region, the third buried layer, the third deep well region, and the third highly doped region are each of a second conductivity type, and the second buried layer, the second deep well region, and the second highly doped region are each of the first conductivity type.
19. The integrated semiconductor device of claim 17 , wherein the second buried layer is disposed between the first buried layer and the third buried layer, and the second buried layer contacts the first buried layer and the third buried layer.
20. The integrated semiconductor device of claim 17 , wherein the fourth buried layer is disposed between the third buried layer and a buried layer of another guard ring, and the fourth buried layer contacts the third buried layer and the buried layer of the other guard ring.
21. The integrated semiconductor device of claim 17 , wherein the transistor further comprises:
a first gate electrode and a second gate electrode formed on the fourth deep well region;
a body region of a second conductivity type formed between the first gate electrode and the second gate electrode;
a first drift region and a second drift region formed in the deep well region;
a source region formed in the body region of the second conductivity type; and
a first drain region and a second drain region respectively formed in the first drift region and the second drift region.
22. The integrated semiconductor device of claim 17 , wherein the fourth deep well region of the first conductivity type is in direct contact with the first buried layer.
23. The integrated semiconductor device of claim 17 , wherein the isolation structure further comprises:
a third shallow trench isolation region formed between the first guard ring and the second drift region of the transistor.