IP Library Granted Patent US 10,908,104
Granted Patent B2
US 10,908,104 · App. 16/041,905 · Granted Feb 2, 2021

Radiation analysis apparatus

Inventors: Satoshi Nakayama (Tokyo, JP); Keiichi Tanaka (Tokyo, JP); Atsushi Nagata (Tokyo, JP); Kazuo Chinone (Tokyo, JP)
Assignee: Hitachi High-Tech Science Corporation
G01N23/2252A61B6/4241G01N23/223G01T1/1606G01T1/17G01T7/005H01J37/023H01J37/265G01N2223/076H01J2237/0245
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Quick Facts
Patent No.
US 10,908,104
App. No.
16/041,905
Granted
Feb 2, 2021
Kind
B2
Abstract

A radiation analysis apparatus includes an excitation source unit irradiating an object, for which the radiation analysis apparatus analyzes property or a structure, with a first radiation, a radiation detection unit including three or more radiation detectors that detect a second radiation generated from the object irradiated with the first radiation, a radiation focusing unit disposed between the object and the radiation detection unit, and focusing the second radiation, a position changing unit changing a relative positional relationship between the radiation focusing unit and the radiation detection unit, and a control unit controlling the position changing unit to change the positional relationship, based on first information which is stored in a storage unit and indicates an intensity distribution of the second radiation emitted from the radiation focusing unit and second information indicating a distribution based on a detection count of the second radiation detected by each of the radiation detectors.

Claims (18)

1. A radiation analysis apparatus that analyzes a property or a structure of an object, comprising:

an excitation source configured to irradiate the object with a first radiation;

a radiation detection unit including three or more radiation detectors configured to detect a second radiation generated from the object irradiated with the first radiation;

a radiation focusing unit disposed between the object and the radiation detection unit, and configured to focus the second radiation;

a position changing unit configured to manually or electrically change at least one of a position of the radiation detection unit with respect to the radiation focusing unit and a position of the radiation focusing unit with respect to the radiation detection unit to change a relative positional relationship between the radiation focusing unit and the radiation detection unit; and

a drive control unit configured to drive the position changing unit to change the relative positional relationship, based on first information which is stored in a storage unit and indicates an intensity distribution of the second radiation emitted from the radiation focusing unit and second information which indicates a distribution based on a detection count of the second radiation detected by each of the radiation detectors.

2. The radiation analysis apparatus according to claim 1 ,

wherein the first information is information indicating an intensity distribution of a focus of the radiation focusing unit.

3. The radiation analysis apparatus according to claim 1 ,

wherein the first information is information indicating an intensity distribution corrected by a user of the radiation analysis apparatus, the information indicates an intensity distribution of a focus of the radiation focusing unit.

4. The radiation analysis apparatus according to claim 1 ,

wherein the radiation focusing unit is a capillary.

5. The radiation analysis apparatus according to claim 1 ,

wherein the drive control unit calculates a count rate of the second radiation detected per unit time by each of the radiation detectors, and calculates, as the second information, a distribution of the count rate calculated for each radiation detector.

6. The radiation analysis apparatus according to claim 1 ,

wherein the drive control unit controls the position changing unit to change the relative positional relationship in a direction perpendicular to a surface on which the radiation detectors are arranged, based on a profile of a function representing the intensity distribution indicated by the first information and a profile of a function representing the distribution indicated by the second information.

7. The radiation analysis apparatus according to claim 1 ,

wherein the drive control unit controls the position changing unit to change the relative positional relationship in a direction along a surface on which the radiation detectors are arranged, based on a peak of the intensity distribution indicated by the first information and a peak of the distribution indicated by the second information.

Assignments (3)
CHANGE OF NAME Recorded Sep 17, 2025
From: HITACHI HIGH-TECH SCIENCE CORPORATION
To: HITACHI HIGH-TECH ANALYSIS CORPORATION
Reel/Frame 072905/0225 →
CHNAGE OF ADDRESS Recorded Sep 17, 2025
From: HITACHI HIGH-TECH SCIENCE CORPORATION
To: HITACHI HIGH-TECH SCIENCE CORPORATION
Reel/Frame 072909/0725 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 31, 2018
From: NAKAYAMA, SATOSHI; TANAKA, KEIICHI; NAGATA, ATSUSHI; CHINONE, KAZUO
To: HITACHI HIGH-TECH SCIENCE CORPORATION
Reel/Frame 046670/0103 →
Priority Claims (1)
JP 2017-143653 · Jul 25, 2017 · national
Continuity (1)
Related Publication 20190033237A1 · Jan 31, 2019
Cited By (1)
US 12,358,648