Metal gate structure and methods thereof
Provided is a metal gate structure and related methods that include forming a first fin and a second fin on a substrate. In various embodiments, the first fin has a first gate region and the second fin has a second gate region. By way of example, a metal-gate line is formed over the first and second gate regions. In some embodiments, the metal-gate line extends from the first fin to the second fin, and the metal-gate line includes a sacrificial metal portion. In various examples, a line-cut process is performed to separate the metal-gate line into a first metal gate line and a second gate line. In some embodiments, the sacrificial metal portion prevents lateral etching of a dielectric layer during the line-cut process.
1. A semiconductor device, comprising:
a first fin extending from a substrate, the first fin having a first gate region; and
a first metal layer disposed over the first gate region and along a first sidewall of a first side of a dielectric layer, wherein the first metal layer includes a plurality of work-function metal layers over the first gate region and one of the plurality of work-function metal layers along the first sidewall of the dielectric layer, and wherein the dielectric layer is formed within a line-cut region;
wherein the first metal layer has a first thickness over the first gate region, wherein the first metal layer has a second thickness along the first sidewall of the first side of the dielectric layer, and wherein the first thickness is different than the second thickness.
2. The semiconductor device of claim 1 , wherein the second thickness is less than the first thickness.
3. The semiconductor device of claim 1 , further comprising:
a second fin extending from a substrate, the second fin having a second gate region; and
a second metal layer disposed over the second gate region and along a second sidewall opposite the first sidewall of a second side of the dielectric layer;
wherein the second metal layer has a third thickness over the second gate region, and wherein the second metal layer has a fourth thickness along the second sidewall of the second side of the dielectric layer.
4. The semiconductor device of claim 3 , wherein the fourth thickness is less than the third thickness.
5. The semiconductor device of claim 4 , wherein the first thickness is substantially the same as the third thickness, and wherein the second thickness is substantially the same as the fourth thickness.
6. The semiconductor device of claim 1 , wherein the plurality of work-function metal layers includes both a P-type work-function metal (PWFM) and an N-type work-function metal (NWFM), and wherein the one of the plurality of work-function metal layers includes the N-type work-function metal (NWFM).
7. The semiconductor device of claim 3 , wherein the second metal layer includes both a P-type work-function metal (PWFM) and an N-type work-function metal (NWFM) over the second gate region, and wherein the second metal layer includes the N-type work-function metal (NWFM) deposited at the second sidewall of the dielectric layer.
8. The semiconductor device of claim 3 , wherein the first metal layer is disposed on less than an entire portion of the first sidewall, and wherein the second metal layer is disposed on less than an entire portion of the second sidewall.
9. The semiconductor device of claim 1 , further comprising:
a glue layer formed over the first metal layer; and
another metal layer formed over the glue layer.
10. The semiconductor device of claim 9 , wherein the another metal layer includes a tungsten layer.
11. The semiconductor device of claim 1 , wherein the dielectric layer includes a nitride layer.
12. The semiconductor device of claim 3 , wherein the dielectric layer electrically isolates the first metal layer from the second metal layer.
13. The semiconductor device of claim 3 , wherein first metal layer is continuous from the first gate region to the first sidewall, and wherein the second metal layer is continuous from the second gate region to the second sidewall.
14. A semiconductor device, comprising:
a first fin and a second fin extending from a substrate, the first fin having a first gate region and the second fin having a second gate region;
a first metal layer disposed over the first gate region and along a first sidewall of a first side of a dielectric layer, wherein the first metal layer includes a first plurality of work-function metal layers over the first gate region and one of the first plurality of work-function metal layers along the first sidewall of the dielectric layer, wherein the dielectric layer is formed within a line-cut region, and wherein the first metal layer directly contacts the first side of the dielectric layer; and
a second metal layer disposed over the second gate region and along a second sidewall opposite the first sidewall of a second side of the dielectric layer, wherein the second metal layer includes a second plurality of work-function metal layers over the second gate region and one of the second plurality of work-function metal layers along the second sidewall of the dielectric layer, and wherein the second metal layer directly contacts the second side of the dielectric layer;
wherein the first metal layer has a first thickness over the first gate region, and wherein the first metal layer has a second thickness along the first sidewall of the first side of the dielectric layer.
15. The semiconductor device of claim 14 , wherein the second metal layer has the first thickness over the second gate region, and wherein the second metal layer has the second thickness along the second sidewall of the second side of the dielectric layer.
16. The semiconductor device of claim 15 , wherein the second thickness is less than the first thickness.
17. The semiconductor device of claim 14 , wherein the first plurality of work-function metal layers and the second plurality of work-function metal layers include both a P-type work-function metal (PWFM) and an N-type work-function metal (NWFM), and wherein the one of the first plurality of work-function metal layers and the one of the second plurality of work-function metal layers include the N-type work-function metal (NWFM).
18. A semiconductor device, comprising:
a line-cut region including a dielectric layer; and
a first FinFET structure disposed on a first side of the dielectric layer; and
a first metal layer disposed over the first FinFET structure and along a first sidewall of the first side of a dielectric layer, wherein first metal layer is continuous from the first FinFET structure to the first sidewall, and wherein the first metal layer includes a plurality of work-function metal layers over the first FinFET structure and one of the plurality of work-function metal layers along the first sidewall of the dielectric layer;
wherein the first metal layer has a first thickness over the first FinFET structure, wherein the first metal layer has a second thickness along the first sidewall, and wherein the second thickness is less than the first thickness.
19. The semiconductor device of claim 18 , further comprising:
a second FinFET structure disposed on a second side of the dielectric layer opposite the first side; and
a second metal layer disposed over the second FinFET structure and along a second sidewall of the second side of a dielectric layer, wherein second metal layer is continuous from the second FinFET structure to the second sidewall, and wherein the second metal layer includes the plurality of work-function metal layers over the second FinFET structure and the one of the plurality of work-function metal layers along the second sidewall of the dielectric layer;
wherein the second metal layer has the first thickness over the second FinFET structure, and wherein the second metal layer has the second thickness along the second sidewall.
20. The semiconductor device of claim 19 , wherein the plurality of work-function metal layers includes both a P-type work-function metal (PWFM) and an N-type work-function metal (NWFM), and wherein the one of the plurality of work-function metal layers includes the N-type work-function metal (NWFM).