Semiconductor device, electronic module, electronic apparatus each having stacked embedded active components in multilayer wiring board and method for producing the semiconductor device having the same
To provide a semiconductor device further reduced in size. A semiconductor device including: a multilayer wiring board one surface of which is provided with an external connection terminal; and a plurality of active components that are provided to be stacked inside the multilayer wiring board and are connected to the external connection terminal via a connection via. The plurality of active components include a first active component provided on another surface side that is opposite to the one surface, and a second active component that is provided closer to the one surface than the first active component is and has a smaller planar area than the first active component.
1. A method for producing a semiconductor device, comprising:
a step of forming a multilayer wiring board by stacking a plurality of active components on a support substrate while embedding the plurality of active components in an insulating resin;
a step of forming a connection via to be connected to each of the plurality of active components;
a step of forming an electrode pad to be connected to the connection via on a surface of the multilayer wiring board; and
a step of forming an external connection terminal on the electrode pad,
wherein the plurality of active components include a first active component stacked on the support substrate side, a second active component that is stacked on a surface side where the external connection terminal is formed and has a smaller planar area than the first active component, a third active component positioned horizontally adjacent to the second active component and has a same planar area as the second active component, and wherein a via hole in which the connection via is provided is formed by laser processing or photoetching.
2. The method for producing the semiconductor device according to claim 1 , further comprising a step of peeling off the support substrate from the multilayer wiring board after the formation of the electrode pad.
3. A method for producing a semiconductor device, comprising:
a step of forming a multilayer wiring board by stacking a plurality of active components on a support substrate while embedding the plurality of active components in an insulating resin;
a step of forming a connection via to be connected to each of the plurality of active components;
a step of forming an electrode pad to be connected to the connection via on a surface of the multilayer wiring board;
a step of forming an external connection terminal on the electrode pad; and
a step of peeling off the support substrate from the multilayer wiring board after the formation of the electrode pad,
wherein the plurality of active components include a first active component stacked on the support substrate side, a second active component that is stacked on a surface side where the external connection terminal is formed and has a smaller planar area than the first active component, and a third active component positioned horizontally adjacent to the second active component and has a same planar area as the second active component.
4. The method for producing the semiconductor device according to claim 3 , wherein a via hole in which the connection via is provided is formed by laser processing or photoetching.