IP Library Granted Patent US 10,593,388
Granted Patent B2
US 10,593,388 · App. 16/080,848 · Granted Mar 17, 2020

Spin current magnetization rotational element, magnetoresistance effect element, and magnetic memory

Inventors: Yohei Shiokawa (Tokyo, JP); Tomoyuki Sasaki (Tokyo, JP)
Assignee: TDK CORPORATION
G11C11/161G11C11/165H01L21/8239H01L27/105H01L27/222H01L29/82H01L43/04H01L43/08H01L43/10
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Quick Facts
Patent No.
US 10,593,388
App. No.
16/080,848
Granted
Mar 17, 2020
Kind
B2
Abstract

A spin current magnetization rotational element includes: a first ferromagnetic metal layer for a magnetization direction to be changed; and a spin-orbit torque wiring. The spin-orbit torque wiring has a structure in which a spin conduction layer and an interfacial spin generation layer are alternately laminated in the first direction, the number of a plurality of the interfacial spin generation layers is two or greater, and in the spin-orbit torque wiring, one of the plurality of interfacial spin generation layers is closest to the first ferromagnetic metal layer.

Claims (46)

1. A spin current magnetization rotational element, comprising:

a first ferromagnetic metal layer for a magnetization direction to be changed; and

a spin-orbit torque wiring which extends in a second direction intersecting a first direction that is a plane-orthogonal direction of the first ferromagnetic metal layer, the first ferromagnetic metal layer being located on one surface of the spin-orbit torque wiring

wherein the spin-orbit torque wiring has a structure in which a spin conduction layer and an interfacial spin generation layer are alternately laminated in the first direction,

a number of a plurality of the interfacial spin generation layers is two or greater, and

in the spin-orbit torque wiring, one of the plurality of interfacial spin generation layers is closest to the first ferromagnetic metal layer.

2. The spin current magnetization rotational element according to claim 1 ,

wherein the thickness of each of the plurality of interfacial spin generation layers is two or less times an atomic radius of an atom that constitutes the interfacial spin generation layer.

3. The spin current magnetization rotational element according to claim 1 ,

wherein the spin conduction layer is constituted by a material that includes at least any one kind of element among Al, Si, Cu, Ag, GaAs, and Ge.

4. The spin current magnetization rotational element according to claim 3 ,

wherein the plurality of interfacial spin generation layers are constituted by a material that includes any element among Mo, Ru, Rh, Pd, Ta, W, Ir, Pt, Au, or Bi.

5. The spin current magnetization rotational element according to claim 3 ,

wherein the thickness of the spin conduction layer is equal to or less than a spin diffusion length of the spin conduction layer.

6. The spin current magnetization rotational element according to claim 3 ,

wherein among the plurality of interfacial spin generation layers, the thickness of the interfacial spin generation layer closest to the first ferromagnetic metal layer is smaller than the thickness of the other interfacial spin generation layers.

7. The spin current magnetization rotational element according to claim 3 ,

wherein a plurality of the spin conduction layers are constituted by materials different from each other in a state in which each of the interfacial spin generation layers is interposed between the plurality of spin conduction layers, and

a spin resistivity of a spin conduction layer close to the first ferromagnetic metal layer is smaller than a spin resistivity of a spin conduction layer distant from the first ferromagnetic metal layer.

8. The spin current magnetization rotational element according to claim 3 ,

wherein when viewed from the first direction, a cross-sectional area of the interfacial spin generation layer closest to the first ferromagnetic metal layer is smaller than a cross-sectional area of the other interfacial spin generation layers which are not closest to the first ferromagnetic metal layer.

9. The spin current magnetization rotational element according to claim 1 ,

wherein the plurality of interfacial spin generation layers are constituted by a material that includes any element among Mo, Ru, Rh, Pd, Ta, W, Ir, Pt, Au, or Bi.

10. The spin current magnetization rotational element according to claim 9 ,

wherein among the plurality of interfacial spin generation layers, the thickness of the interfacial spin generation layer closest to the first ferromagnetic metal layer is smaller than the thickness of the other interfacial spin generation layers.

11. The spin current magnetization rotational element according to claim 9 ,

wherein when viewed from the first direction, a cross-sectional area of the interfacial spin generation layer closest to the first ferromagnetic metal layer is smaller than a cross-sectional area of the other interfacial spin generation layers which are not closest to the first ferromagnetic metal layer.

12. The spin current magnetization rotational element according to claim 1 ,

wherein the thickness of the spin conduction layer is equal to or less than a spin diffusion length of the spin conduction layer.

13. The spin current magnetization rotational element according to claim 1 ,

wherein among the plurality of interfacial spin generation layers, the thickness of the interfacial spin generation layer closest to the first ferromagnetic metal layer is smaller than the thickness of the other interfacial spin generation layers.

14. The spin current magnetization rotational element according to claim 13 ,

wherein when viewed from the first direction, a cross-sectional area of the interfacial spin generation layer closest to the first ferromagnetic metal layer is smaller than a cross-sectional area of the other interfacial spin generation layers which are not closest to the first ferromagnetic metal layer.

15. The spin current magnetization rotational element according to claim 1 ,

wherein a plurality of the spin conduction layers are constituted by materials different from each other in a state in which each of the interfacial spin generation layers is interposed between the plurality of spin conduction layers, and

a spin resistivity of a spin conduction layer close to the first ferromagnetic metal layer is smaller than a spin resistivity of a spin conduction layer distant from the first ferromagnetic metal layer.

16. The spin current magnetization rotational element according to claim 1 ,

wherein when viewed from the first direction, a cross-sectional area of the interfacial spin generation layer closest to the first ferromagnetic metal layer is smaller than a cross-sectional area of the other interfacial spin generation layers which are not closest to the first ferromagnetic metal layer.

17. The spin current magnetization rotational element according to claim 1 ,

wherein the thickness of the spin-orbit torque wiring is 20 nm or less.

18. A magnetoresistance effect element, comprising:

the spin current magnetization rotational element according to claim 1 ;

a second ferromagnetic metal layer in which a magnetization direction is fixed; and

a nonmagnetic layer that is interposed between the first ferromagnetic metal layer and the second ferromagnetic metal layer.

19. A magnetic memory, comprising:

a plurality of the magnetoresistance effect elements according to claim 18 .

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 29, 2018
From: SHIOKAWA, YOHEI; SASAKI, TOMOYUKI
To: TDK CORPORATION
Reel/Frame 046741/0276 →
Priority Claims (1)
JP 2017-034758 · Feb 27, 2017 · national
Continuity (1)
Related Publication 20190057732A1 · Feb 21, 2019
Cited By (1)
US 12,290,002