Bonding apparatus including a heater and a cooling flow path used for stacking a plurality of semiconductor chips
The present invention has: a heater; and a bonding tool having a lower surface on which a memory chip is adsorbed; and an upper surface attached to the heater, and is provided with a bonding tool which presses the peripheral edge of the memory chip to a solder ball in a first peripheral area of the lower surface and which presses the center of the memory chip ( 60 ) to a DAF having a heat resistance temperature lower than that of the solder ball in a first center area. The amount of heat transmitted from the first center area to the center of the memory chip is smaller than that transmitted from the first peripheral area (A) to the peripheral edge of the memory chip. Thus, the bonding apparatus in which the center of a bonding member can be heated to a temperature lower than that at the peripheral edge can be provided.
1. A bonding apparatus comprising:
a heater; and
a bonding tool,
wherein the bonding tool includes a first surface that absorbs a bonding member and a second surface that is attached to the heater on the side opposite to the first surface, the first surface includes a first peripheral area and a first central area, a recess is formed in the first central area, the first peripheral area of the first surface presses a peripheral edge of the bonding member to a first member, and the first central area of the first surface presses a center of the bonding member to directly contact and press a second member having a lower heat resistance temperature than the first member,
wherein the bonding tool further includes a vacuum hole that communicates with the recess from the second surface to absorb the bonding member and forms a vacuum heat insulating layer between the recess and the bonding member,
wherein an amount of heat per unit area of the bonding member that is transmitted from the first central area of the bonding tool to the center of the bonding member is smaller than an amount of heat per unit area of the bonding member that is transmitted from the first peripheral area of the bonding tool to the peripheral edge of the bonding member, and
wherein the first central area of the bonding tool has a pressing region configured to contact and press the bonding member, and a cooling flow path through which cooling air flows.
2. The bonding apparatus according to claim 1 ,
wherein the first central area of the bonding tool has a smaller area in contact with the bonding member than the first peripheral area of the bonding tool.
3. The bonding apparatus according to claim 1 ,
wherein the first central area of the bonding tool is made of a material having a lower thermal conductivity than that of the first peripheral area of the bonding tool.
4. The bonding apparatus according to claim 1 , comprising
a stage that absorbs and fixes a substrate,
wherein the second member is placed on an electronic component bonded to the substrate,
wherein the first member is formed on the substrate around the electronic component, and
wherein an amount of heat per unit area of the substrate that is transmitted to a first portion of the stage that faces a first area of the substrate from the first area of the substrate to which the electronic component is bonded is larger than an amount of heat per unit area of the substrate that is transmitted to a second portion of the stage that faces a second area of the substrate from the second area of the substrate in which the first member is disposed.
5. The bonding apparatus according to claim 4 ,
wherein, in the stage, a cooling flow path through which cooling air flows is provided in the first portion.
6. The bonding apparatus according to claim 4 ,
wherein, in the stage, a recess is provided on a surface of the second portion.
7. The bonding apparatus according to claim 1 ,
wherein the second surface of the bonding tool includes a second central area corresponding to the first central area and a second peripheral area outside the periphery of the second central area, and
wherein an amount of heat per unit area of the heater that is transmitted from the center of the heater to the second central area of the bonding tool is smaller than an amount of heat per unit area of the heater that is transmitted from a peripheral edge of the heater to the second peripheral area of the bonding tool.
8. The bonding apparatus according to claim 7 ,
wherein the second central area of the bonding tool includes a cooling flow path through which cooling air flows.
9. The bonding apparatus according to claim 7 ,
wherein the second central area of the bonding tool is made of a material having a lower thermal conductivity than that of the second peripheral area of the bonding tool.
10. The bonding apparatus according to claim 7 ,
wherein the second central area of the bonding tool has a smaller area in contact with the heater than the second peripheral area of the bonding tool.
11. The bonding apparatus according to claim 10 ,
wherein a plurality of recesses are disposed in a lattice form on the second central area of the bonding tool.
12. The bonding apparatus according to claim 10 ,
wherein the second central area of the bonding tool includes a cooling flow path through which cooling air flows.
13. The bonding apparatus according to claim 7 , comprising
a stage that absorbs and fixes a substrate,
wherein the second member is placed on an electronic component bonded to the substrate,
wherein the first member is formed on the substrate around the electronic component, and
wherein an amount of heat per unit area of the substrate that is transmitted to a first portion of the stage that faces a first area of the substrate from the first area of the substrate to which the electronic component is bonded is larger than an amount of heat per unit area of the substrate that is transmitted to a second portion of the stage that faces a second area of the substrate from the second area of the substrate in which the first member is disposed.
14. The bonding apparatus according to claim 13 ,
wherein, in the stage, a cooling flow path through which cooling air flows is provided in the first portion.
15. The bonding apparatus according to claim 13 ,
wherein, in the stage, a recess is provided on a surface of the second portion.