Wafer box conveyor
View Patent ↗A cassette transport device is disclosed which includes a smart cart, a base expansion frame mounted on the smart cart and a cassette-loading frame fixed to the base expansion frame. The cassette-loading frame is partitioned into several segments each accommodating a plurality of cassette trays. Each of the cassette trays defines, on its surface, a first trough and a second trough in the first trough. The first trough is configured to retain a cassette of a first size, and the second trough is configured to retain a cassette of a second size. With the first and second troughs, each of the cassette trays is able to retain a cassette of either the first or second size, making the cassette transport device possible to be used in transportation of the both types of cassettes with a high yield. Moreover, the smart cart is capable of automated transportation without human intervention or track construction while enabling savings in transportation cost, time and labor.
1. A cassette transport device, comprising:
a smart cart;
a base expansion frame mounted on the smart cart; and
a cassette-loading frame fixed to the base expansion frame, the cassette-loading frame being partitioned into several segments each accommodating a plurality of cassette trays,
wherein each of the plurality of cassette trays defines, on a surface thereof, a first trough having a first size and a second trough having a second size different from the first size, the second trough being embodied in the first trough, the first trough being configured to retain a cassette of the first size, the second trough being configured to retain a cassette of the second size,
wherein each of the plurality of cassette trays is provided with three stress sensors on a backside thereof, the three stress sensors are configured for detecting whether the cassette is tilted and are disposed on a backside of the second trough corresponding to three edges of the second trough.
2. The cassette transport device of claim 1 , wherein the second trough is provided with at least two spring-based locking assemblies.
3. The cassette transport device of claim 2 , wherein the second trough is provided with four spring-based locking assemblies disposed at respective four corners of the second trough.
4. The cassette transport device of claim 1 , wherein the first trough is provided with at least three pin-based locking assemblies.
5. The cassette transport device of claim 4 , wherein the first trough is provided with three pin-based locking assemblies disposed to define a triangle.
6. The cassette transport device of claim 1 , wherein each of the plurality of cassette trays is further provided with at least one photoelectric sensor on a backside thereof, the at least one photoelectric sensor is configured for detecting presence of cassettes.
7. The cassette transport device of claim 1 , wherein the cassette-loading frame is provided with RFID sensors for obtaining ID information of cassettes.
8. The cassette transport device of claim 7 , wherein each of the RFID sensors comprises two antennas for obtaining the ID information of the cassettes, one of the two antennas is configured for detecting the cassette of the first size and the other one of the two antennas is configured for detecting the cassette of the second size.
9. The cassette transport device of claim 1 , wherein a plurality of buffers are disposed between the smart cart and the base expansion frame.
10. The cassette transport device of claim 1 , further comprising a plurality of obstacle avoidance sensors.
11. The cassette transport device of claim 10 , the plurality of obstacle avoidance sensors comprises: ultrasonic sensors, horizontal sensors and vertical sensors, the ultrasonic sensors being disposed in symmetry on front and rear sides of the base expansion frame that oppose each other along a direction in which the smart cart travels, the horizontal sensors being disposed in symmetry on left and right sides of the base expansion frame, the vertical sensors being disposed in symmetry on left and right sides of the cassette-loading frame.
12. The cassette transport device of claim 1 , wherein the first size is 12 inch and the second size is 8 inch.