MEMS probe and test device using the same
View Patent ↗A microelectromechanical system (MEMS) probe for electric connection between a tested contact point of an object to be tested and a testing contact point of a test circuit. The MEMS probe includes: a first terminal contact portion; a second terminal contact portion movable close to and away from the first terminal contact portion; and an elastic connecting portion connecting the first terminal contact portion and the second terminal contact portion, elastically deformed by an approach of the second terminal contact portion and comprising a plurality of plating layers stacked in the elastic deformation direction. According to the present disclosure, the MEMS probe includes a plurality of plating layers stacked in the elastic deformation direction, thereby decreasing fatigue failure and improving durability.
1. A test probe for testing electric characteristics of an object, the test probe comprising:
a first terminal contact portion;
a second terminal contact portion disposed at a vertically opposite side from the first terminal contact portion; and
an elastic connecting portion extending between the first terminal contact portion and the second terminal contact portion, the elastic connecting portion having a preset curved or bent shape, the elastic connecting portion formed with a plurality of plating layers stacked in a curved deformation direction of the test probe with each face of the plating layers orienting toward the curved deformation direction, such that the elastic connecting portion is elastically deformed to the curved deformation direction when compression force is applied in a longitudinal direction of the test probe for testing the object,
wherein the plurality of plating layers are directly laminated on one another,
wherein the elastic connecting portion comprises an insulation coating layer at an outmost side of the plurality of plating layers.
2. The test probe according to claim 1 , wherein the elastic connecting portion is formed with a plurality of elastic plating layers, and a plurality of conductive plating layers having a lower elastic coefficient and higher electric conductivity than the elastic plating layer, the elastic plating layers and the conductive plating layers stacked alternately.
3. A method of fabricating a test probe, the method comprising:
stacking and plating a probe main body of a plurality of layers shaped like a flat plate;
subjecting the probe main body of the plurality of layers to primary heat treatment;
press-forming a middle portion of the probe main body subjected to the primary heat treatment to be curved in a stacking direction; and
subjecting the curved probe main body to secondary heat treatment.
4. A test device for testing electric characteristics of an object, the test device comprising:
a first support member having a plurality of guide holes;
a second support member having a plurality of terminal holes and spaced apart in parallel from the first supporting member; and
a plurality of test probes each comprising a first terminal contact portion inserted in the guide hole of the first support member and supported to slide and move in a testing direction, a second terminal contact portion disposed at a vertically opposite side from the first terminal contact portion and supported in the terminal hole of the second support member, and an elastic connecting portion extending between the first terminal contact portion and the second terminal contact portion and comprising a plurality of plating layers stacked in a curved deformation direction of the test probe with each face of the plating layers orienting toward the curved deformation direction, such that the elastic connecting portion is elastically deformed to the curved deformation direction when compression force is applied in a longitudinal direction of the test probe for testing the object,
wherein the plurality of plating layers are directly laminated on one another,
wherein the elastic connecting portion comprises an insulation coating layer at an outmost side of the plurality of plating layers.
5. A test probe for testing electric characteristics of an object, the test probe comprising:
a first terminal contact portion;
a second terminal contact portion disposed at a vertically opposite side from the first terminal contact portion; and
an elastic connecting portion extending between the first terminal contact portion and the second terminal contact portion, the elastic connecting portion having a preset curved or bent shape, the elastic connecting portion formed with a plurality of plating layers stacked in a curved deformation direction of the test probe with each face of the plating layers orienting toward the curved deformation direction, such that the elastic connecting portion is elastically deformed to the curved deformation direction when compression force is applied in a longitudinal direction of the test probe for testing the object,
wherein the plurality of plating layers are directly laminated on one another,
wherein the elastic connecting portion is formed with a plurality of elastic plating layers, and a plurality of conductive plating layers having a lower elastic coefficient and higher electric conductivity than the elastic plating layer, the elastic plating layers and the conductive plating layers stacked alternately.