IP Library Granted Patent US 10,665,701
Granted Patent B2
US 10,665,701 · App. 16/120,434 · Granted May 26, 2020

Form and fabrication of semiconductor-superconductor nanowires and quantum devices based thereon

Inventors: Michael Hartley Freedman (Santa Barbara, CA); Bernard van Heck (Santa Barbara, CA); Georg Wolfgang Winkler (Santa Barbara, CA); Torsten Karzig (Santa Barbara, CA); Roman Lutchyn (Santa Barbara, CA); Peter Krogstrup Jeppesen (Frederiksberg, DK); Chetan Nayak (Santa Barbara, CA); Charles Masamed Marcus (Copenhagen, DK); Saulius Vaitiekėnas (Copenhagen, DK)
Assignee: Microsoft Technology Licensing, LLC
H01L29/66977H01L21/02603H01L29/0676H01L39/125H01L39/2406G06N10/00
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Quick Facts
Patent No.
US 10,665,701
App. No.
16/120,434
Granted
May 26, 2020
Kind
B2
Abstract

The disclosure relates to a quantum device and method of fabricating the same. The device comprises one or more semiconductor-superconductor nanowires, each comprising a length of semiconductor material and a coating of superconductor material coated on the semiconductor material. The nanowires may be formed over a substrate. In a first aspect at least some of the nanowires are full-shell nanowires with superconductor material being coated around a full perimeter of the semiconductor material along some or all of the length of the wire, wherein the device is operable to induce at least one Majorana zero mode, MZM, in one or more active ones of the full-shell nanowires. In a second aspect at least some of the nanowires are arranged vertically relative to the plane of the substrate in the finished device.

Claims (34)

1. A device comprising:

a substrate defining a plane;

one or more layers formed over the substrate; and

one or more semiconductor-superconductor nanowires formed in one or more of the layers;

wherein each of the nanowires comprises a length of semiconductor material and a coating of superconductor material coated on at least part of the semiconductor material; and

wherein each of one, some or all of the nanowires is vertical relative to the plane of the substrate,

wherein the device is operable to induce at least one MZM in one or more active ones of the nanowires by application of a magnetic field component parallel to the active nanowires.

2. The device of claim 1 , wherein each of one, some or all of the nanowires is a full-shell nanowire, the superconductor material being coated around a full perimeter of the semiconductor material along some or all of the length of the semiconductor material.

3. The device of claim 2 , wherein:

the device is operable to induce at least one MZM in one or more active ones of the nanowires by application of a magnetic field component parallel to the active nanowires; and

the active nanowires comprise one or more of the full-shell nanowires.

4. The device of claim 1 , wherein an MZM is formed at each end of each active nanowire.

5. The device of claim 1 , further comprising one or more layers of circuitry formed in one or more of said layers, for connecting the nanowires together into quantum structures, controlling the nanowires or quantum structures, and/or taking measurements from the nanowires or quantum structures.

6. The device of claim 5 , wherein one or more of non-active ones the nanowires are arranged as conductive vias between layers of the circuitry or a layer of the circuitry an exterior of the device.

7. A device comprising:

a substrate defining a plane;

one or more layers formed over the substrate; and

one or more semiconductor-superconductor nanowires formed in one or more of the layers;

wherein each of the nanowires comprises a length of semiconductor material and a coating of superconductor material coated on at least part of the semiconductor material; and

wherein each of one, some or all of the nanowires is vertical relative to the plane of the substrate,

wherein the device comprises one or more qubits, each qubit comprising a plurality of the active nanowires.

8. The device of claim 7 , wherein one, some or all of the plurality of nanowires in each qubit are full-shell nanowires.

9. The device of claim 7 , wherein one, some or all of the qubits are MZM-based qubits.

10. The device of claim 9 , wherein each of one, some or all of the MZM-based qubits is either: a tetron qubit in which said plurality is four, or hexon qubit in which said plurality is six.

11. The device of claim 7 , wherein each qubit comprises a horizontal superconducting island formed in a plane paralleled to the substrate, wherein the superconducting island is divided into arms each joining the lower end of a respective one of the plurality of vertical nanowires in the qubit to a common point of the superconducting island.

12. The device of claim 11 , wherein the arms take the form of concentric spiral arms.

13. The device of claim 7 , wherein one, some or all of the qubits are transmon or gatemon based qubits.

14. A device comprising:

a substrate defining a plane;

one or more layers formed over the substrate; and

one or more semiconductor-superconductor nanowires formed in one or more of the layers;

wherein each of the nanowires comprises a length of semiconductor material and a coating of superconductor material coated on at least part of the semiconductor material; and

wherein each of one, some or all of the nanowires is vertical relative to the plane of the substrate,

wherein the layers of the wafer comprise at least one layer of filler material disposed between the vertical nanowires to mechanically support the vertical nanowires.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 8, 2019
From: FREEDMAN, MICHAEL HARTLEY; VAN HECK, BERNARD; WINKLER, GEORG WOLFGANG; KARZIG, TORSTEN; LUTCHYN, ROMAN; KROGSTRUP JEPPESEN, PETER; NAYAK, CHETAN; MARCUS, CHARLES MASAMED; VAITIEKENAS, SAULIUS
To: MICROSOFT TECHNOLOGY LICENSING, LLC
Reel/Frame 050962/0001 →
Continuity (2)
Provisional Application 62701458 · Jul 20, 2018
Related Publication 20200027971A1 · Jan 23, 2020
Cited By (5)
US 12,223,294 US 12,317,759 US 12,480,046 US 12,718,975 US 12,724,589