Bonding method
It is formed, over a supporting body made of a ceramic, a bonding layer composed of one or more material selected from the group consisting of mullite, alumina, tantalum pentoxide, titanium oxide and niobium pentoxide. Neutralized beam is irradiated onto a surface of the bonding layer to activate the surface of the bonding layer. The surface of the bonding layer and the piezoelectric single crystal substrate are bonded by direct bonding.
1. A method of bonding a supporting body comprising a ceramic and a piezoelectric single crystal substrate, said method comprising the steps of:
forming a bonding layer over said supporting body, said bonding layer comprising one or more materials selected from the group consisting of mullite, alumina, tantalum pentoxide, titanium oxide and niobium pentoxide;
irradiating a first neutralized atomic beam onto a surface of said bonding layer to activate said surface of said bonding layer;
providing an intermediate layer over said piezoelectric single crystal substrate, said intermediate layer comprising one or more material selected from the group consisting of mullite, alumina, tantalum pentoxide, titanium oxide and niobium pentoxide;
irradiating a second neutralized atomic beam onto a surface of said intermediate layer to activate said surface of said intermediate layer; and
bonding said surface of said bonding layer and said surface of said intermediate layer by direct bonding.
2. The method of claim 1 , wherein said surface of said bonding layer is activated after said surface of said bonding layer is flattened.
3. The method of claim 1 , further comprising the step of processing said piezoelectric single crystal substrate to form a roughened surface, wherein said intermediate layer is provided on said roughened surface.
4. The method of claim 1 , wherein said surface of said intermediate layer is activated after said surface of said intermediate layer is flattened.
5. The method of claim 1 , wherein said supporting body comprises a material selected from the group consisting of mullite, cordierite and sialon.
6. The method of claim 1 , wherein said piezoelectric single crystal substrate comprises lithium niobate, lithium tantalate or lithium niobate-lithium tantalate solid solution.