Substrate processing apparatus and furnace opening cover
Provided is a technique capable of suppressing the occurrence of by-products by suppressing adhesion of the by-products. A substrate processing apparatus includes: a reaction tube where a substrate is processed; a furnace opening unit disposed at a lower end of the reaction tube and having an upper surface and an inner circumferential surface, the furnace opening unit including: a concave portion disposed on the upper surface; and a convex portion having at least one notch connecting the concave portion to the inner circumferential surface; a cover covering at least the inner circumferential surface with a predetermined gap therebetween; and a gas supply unit configured to supply a gas to the concave portion.
1. A reaction container comprising:
a furnace opening unit formed at a bottom portion of the reaction container and comprising an upper surface, an inner circumferential surface with inward projections and a lower surface; and
a furnace opening cover comprising a plurality of cover members installed along a circumferential direction of the inner circumferential surface of the furnace opening unit whereon a lower end of the reaction container is connected and wherethrough a substrate retainer is loaded and unloaded, each of the cover members comprising:
a vertical side portion running along a corresponding part of the inner circumferential surfaced,
a horizontal portion extending in a horizontal direction from an upper end of the side portion,
two openings formed on the side portion at a same height and hooked to corresponding two of the projections disposed on the inner circumferential surface, and
a protrusion protruding toward the inner circumferential surface and interposed between the two openings located left and right of the protrusion, respectively, on the side portion so as to contact with the inner circumferential surface without being fixed to the inner circumferential surface,
wherein a gap is formed between the side portion and the inner circumferential surface of the furnace opening unit in a state where the two openings are hooked respectively to the two of the projections disposed on the inner circumferential surface and the protrusion is in contact with the inner circumferential surface.
2. The reaction container of claim 1 , wherein the plurality of cover members have sizes different from each other.
3. The reaction container of claim 2 , wherein the cover members are formed of quartz.
4. The reaction container of claim 1 , wherein the horizontal portion extends in a direction opposite to the protrusion, and each of the cover members makes contact with the furnace opening unit only at the two openings and the protrusion.
5. The reaction container of claim 4 , wherein the protrusion is located at a height lower than heights of the two openings.
6. The reaction container of claim 1 , wherein the horizontal portion protrudes outward about 1-2 mm.
7. The reaction container of claim 1 , wherein the side portion has a height greater than a height of the upper surface of the furnace opening unit in a state where the cover members are installed.