Substrate treating apparatus
View Patent ↗A substrate treating apparatus includes a treating section for treating substrates, and an interface section disposed adjacent the treating section and adjacent an exposing machine provided separately from the apparatus. The interface section has a first treating-section-side transport mechanism, a second treating-section-side transport mechanism, and an exposing-machine-side transport mechanism. Each of the first and second treating-section-side transport mechanisms is arranged to receive the substrates from the treating section, pass the substrates to the exposing-machine-side transport mechanism, receive the substrates from the exposing-machine-side transport mechanism and pass the substrates to the treating section. The exposing-machine-side transport mechanism is arranged to receive the substrates from the first and second treating-section-side transport mechanisms, transport the substrates to the exposing machine, receive the substrates after exposing treatment from the exposing machine, and pass the substrates to the first and second treating-section-side transport mechanisms.
1. A substrate treating apparatus comprising:
a treating section for treating substrates; and
an interface section disposed adjacent the treating section and adjacent an exposing machine provided separately from the apparatus;
the interface section including:
a first treating-section-side transport mechanism;
a second treating-section-side transport mechanism;
an exposing-machine-side transport mechanism;
intermediate receivers; and
post-exposure baking units for heating the substrates after exposing treatment;
wherein the first treating-section-side transport mechanism is arranged to receive the substrates from the treating section, pass the substrates to the intermediate receivers, receive the substrates from the intermediate receivers, pass the substrates to the post-exposure baking units, receive the substrates from the post-exposure baking units, and pass the substrates to the treating section, without passing through the second treating-section-side transport mechanism;
the second treating-section-side transport mechanism is arranged to receive the substrates from the treating section, pass the substrates to the intermediate receivers, receive the substrates from the intermediate receivers, pass the substrates to the post-exposure baking units, receive the substrates from the post-exposure baking units, and pass the substrates to the treating section, without passing through the first treating-section-side transport mechanism;
the exposing-machine-side transport mechanism is arranged to receive the substrates from the intermediate receivers, transport the substrates to the exposing machine, receive the substrates after the exposing treatment from the exposing machine, and pass the substrates to the intermediate receivers,
the post-exposure baking units include:
first post-exposure baking units to and from which the substrates are transported solely by the first treating-section-side transport mechanism; and
second post-exposure baking units to and from which the substrates are transported solely by the second treating-section-side transport mechanism;
the first post-exposure baking units adjoin the first treating-section-side transport mechanism;
the second post-exposure baking units adjoin the second treating-section-side transport mechanism;
the first and second treating-section-side transport mechanisms are arranged side by side in a horizontal direction;
the first treating-section-side transport mechanism is located in substantially the same height position as the second treating-section-side transport mechanism; and
the first post-exposure baking units are located in substantially the same height position as the second post-exposure baking units.
2. The substrate treating apparatus according to claim 1 wherein
the interface section is shaped rectangular in plan view;
the interface section is disposed rearward of the treating section;
the first and second treating-section-side transport mechanisms are juxtaposed along a front face of the interface section adjacent the treating section; and
the post-exposure baking units are arranged in the interface section.
3. The substrate treating apparatus according to claim 1 wherein:
the intermediate receivers are arranged rearward of the first and second treating-section-side transport mechanisms;
the exposing-machine-side transport mechanism and the post-exposure baking units are arranged rearward of the intermediate receivers;
the intermediate receivers are arranged in positions substantially equidistant from the first and second treating-section-side transport mechanisms;
the exposing-machine-side transport mechanism is located in substantially the same height position as the intermediate receivers;
the post-exposure baking units are arranged above or below the exposing-machine-side transport mechanism; and
the post-exposure baking units and the exposing-machine-side transport mechanism are arranged vertically in side view.
4. The substrate treating apparatus according to claim 1 wherein
the interface section includes post-exposure cleaning units for cleaning the substrates after the exposing treatment;
the first treating-section-side transport mechanism is arranged to pass the substrates to the post-exposure cleaning units, and receive the substrates from the post-exposure cleaning units, without passing through the second treating-section-side transport mechanism;
the second treating-section-side transport mechanism is arranged to pass the substrates to the post-exposure cleaning units, and receive the substrates from the post-exposure cleaning units, without passing through the first treating-section-side transport mechanism; and
the post-exposure cleaning units are arranged in substantially the same height position as the post-exposure baking units.
5. The substrate treating apparatus according to claim 1 wherein
the first post-exposure baking units and the intermediate receivers are arranged around the first treating-section-side transport mechanism, so that the first treating-section-side transport mechanism, by rotating, can face the first post-exposure baking units and the intermediate receivers; and
the second post-exposure baking units and the intermediate receivers are arranged around the second treating-section-side transport mechanism, so that the second treating-section-side transport mechanism, by rotating, can face the second post-exposure baking units and the intermediate receivers.
6. The substrate treating apparatus according to claim 1 wherein
the first post-exposure baking units are arranged rearward of the first treating-section-side transport mechanism; and
the second post-exposure baking units are arranged rearward of the second treating-section-side transport mechanism;
the intermediate receivers are arranged rearward of the first and second treating-section-side transport mechanisms;
both the first treating-section-side transport mechanism and the first post-exposure baking units are arranged on one side of a perpendicular bisector of a horizontal line segment extending between the first treating-section-side transport mechanism and the second treating-section-side transport mechanism in plan view;
both the second treating-section-side transport mechanism and the second post-exposure baking units are arranged on the other side of the perpendicular bisector in plan view; and
the intermediate receivers are arranged on the perpendicular bisector in plan view.
7. The substrate treating apparatus according to claim 1 wherein
the interface section includes:
a first cleaning portion to and from which the substrates are transported solely by the first treating-section-side transport mechanism; and
a second cleaning portion to and from which the substrates are transported solely by the second treating-section-side transport mechanism; and
wherein the first post-exposure baking units, the intermediate receivers and the first cleaning portion are arranged around the first treating-section-side transport mechanism, so that the first treating-section-side transport mechanism, by rotating, can face the first post-exposure baking units, the intermediate receivers and the first cleaning portion; and
the second post-exposure baking units, the intermediate receivers and the second cleaning portion are arranged around the second treating-section-side transport mechanism, so that the second treating-section-side transport mechanism, by rotating, can face the second post-exposure baking units, the intermediate receivers and the second cleaning portion.
8. The substrate treating apparatus according to claim 7 wherein
the first post-exposure baking units are arranged rearward of the first treating-section-side transport mechanism; and
the second post-exposure baking units are arranged rearward of the second treating-section-side transport mechanism;
the intermediate receivers are arranged rearward of the first and second treating-section-side transport mechanisms;
the first cleaning portion is disposed laterally of the first treating-section-side transport mechanism;
the second cleaning portion is disposed laterally of the second treating-section-side transport mechanism;
the first treating-section-side transport mechanism, the first post-exposure baking units and the first cleaning portion are arranged on one side of a perpendicular bisector of a horizontal line segment extending between the first treating-section-side transport mechanism and the second treating-section-side transport mechanism in plan view;
the second treating-section-side transport mechanism, the second post-exposure baking units and the second cleaning portion are arranged on the other side of the perpendicular bisector in plan view; and
the intermediate receivers are arranged on the perpendicular bisector in plan view.
9. The substrate treating apparatus according to claim 7 wherein
the first cleaning portion includes first post-exposure cleaning units for cleaning the substrates after the exposing treatment;
the second cleaning portion includes second post-exposure cleaning units for cleaning the substrates after the exposing treatment;
the first post-exposure cleaning units are arranged in substantially the same height position as the first post-exposure baking units;
the first post-exposure baking units and the first post-exposure cleaning units are arranged adjacent each other circumferentially about the first treating-section-side transport mechanism;
the second post-exposure cleaning units are arranged in substantially the same height position as the second post-exposure baking units; and
the second post-exposure baking units and the second post-exposure cleaning units are arranged adjacent each other circumferentially about the second treating-section-side transport mechanism.
10. A substrate treating apparatus comprising:
a treating section for treating substrates; and
an interface section disposed adjacent the treating section and adjacent an exposing machine provided separately from the apparatus;
the interface section including:
a first treating-section-side transport mechanism;
a second treating-section-side transport mechanism;
an exposing-machine-side transport mechanism;
intermediate receivers; and
a cleaning portion for cleaning the substrates;
wherein the first treating-section-side transport mechanism is arranged to receive the substrates from the treating section, pass the substrates to the intermediate receivers, receive the substrates from the intermediate receivers, pass the substrates to the cleaning portion, receive the substrates from the cleaning portion, and pass the substrates to the treating section, without passing through the second treating-section-side transport mechanism;
the second treating-section-side transport mechanism is arranged to receive the substrates from the treating section, pass the substrates to the intermediate receivers, receive the substrates from the intermediate receivers, pass the substrates to the cleaning portion, receive the substrates from the cleaning portion, and pass the substrates to the treating section, without passing through the first treating-section-side transport mechanism;
the exposing-machine-side transport mechanism is arranged to receive the substrates from the intermediate receivers, transport the substrates to the exposing machine, receive the substrates after exposing treatment from the exposing machine, and pass the substrates to the intermediate receivers;
the interface section is disposed rearward of the treating section; and
the cleaning portion is disposed rearward of a front face of the interface section adjacent the treating section, and
the cleaning portion includes:
a first cleaning portion to and from which the substrates are transported solely by the first treating-section-side transport mechanism; and
a second cleaning portion to and from which the substrates are transported solely by the second treating-section-side transport mechanism;
wherein the first cleaning portion, the first and second treating-section-side transport mechanisms and the second cleaning portion are juxtaposed in the stated order along the front face of the interface section.
11. The substrate treating apparatus according to claim 10 wherein the cleaning portion includes post-exposure cleaning units for cleaning the substrates after the exposing treatment.
12. The substrate treating apparatus according to claim 11 wherein
the cleaning portion includes pre-exposure cleaning units for cleaning the substrates before the exposing treatment; and
wherein the pre-exposure cleaning units and the post-exposure cleaning units are arranged vertically.
13. The substrate treating apparatus according to claim 10 wherein
the first cleaning portion and the intermediate receivers are arranged around the first treating-section-side transport mechanism, so that the first treating-section-side transport mechanism, by rotating, can face the first cleaning portion and the intermediate receivers; and
the second cleaning portion and the intermediate receivers are arranged around the second treating-section-side transport mechanism, so that the second treating-section-side transport mechanism, by rotating, can face the second cleaning portion and the intermediate receivers.
14. The substrate treating apparatus according to claim 10 wherein:
the first cleaning portion is disposed laterally of the first treating-section-side transport mechanism; and
the second cleaning portion is disposed laterally of the second treating-section-side transport mechanism;
the intermediate receivers are arranged rearward of the first and second treating-section-side transport mechanisms;
both the first treating-section-side transport mechanism and the first cleaning portion are arranged on one side of a perpendicular bisector of a horizontal line segment extending between the first treating-section-side transport mechanism and the second treating-section-side transport mechanism in plan view;
both the second treating-section-side transport mechanism and the second cleaning portion are arranged on the other side of the perpendicular bisector in plan view; and
the intermediate receivers are arranged on the perpendicular bisector in plan view.
15. The substrate treating apparatus according to claim 10 wherein
the cleaning portion, the first treating-section-side transport mechanism and the second treating-section-side transport mechanism are juxtaposed along the front face of the interface section.
16. A substrate treating apparatus comprising:
a treating section for treating substrates; and
an interface section disposed adjacent the treating section and adjacent an exposing machine provided separately from the apparatus;
the interface section including:
a first treating-section-side transport mechanism;
a second treating-section-side transport mechanism;
an exposing-machine-side transport mechanism; and
intermediate receivers;
wherein the first treating-section-side transport mechanism is arranged to receive the substrates from the treating section, pass the substrates to the intermediate receivers, receive the substrates from the intermediate receivers, and pass the substrates to the treating section, without passing through the second treating-section-side transport mechanism;
the second treating-section-side transport mechanism is arranged to receive the substrates from the treating section, pass the substrates to the intermediate receivers, receive the substrates from the intermediate receivers, and pass the substrates to the treating section, without passing through the first treating-section-side transport mechanism;
the exposing-machine-side transport mechanism is arranged to receive the substrates from the intermediate receivers, transport the substrates to the exposing machine, receive the substrates after the exposing treatment from the exposing machine, and pass the substrates to the intermediate receivers; and
the intermediate receivers are arranged on a perpendicular bisector of a horizontal line segment extending between the first treating-section-side transport mechanism and the second treating-section-side transport mechanism in plan view.