IP Library Granted Patent US 10,699,970
Granted Patent B2
US 10,699,970 · App. 16/140,381 · Granted Jun 30, 2020

Electrically testable integrated circuit packaging

Inventors: Mark Moffat (Mortimer, GB); Andrew Christie (Reading, GB); Duncan Pilgrim (Encinitas, CA); Ronald Eugene Reedy (San Diego, CA)
Assignee: pSemi Corporation
H01L22/14H01L23/055H01L22/32H01L23/15H01L23/3121H01L23/49827H01L23/49838H01L23/66H01L24/13H01L24/16H01L24/32H01L24/48H01L24/97H01L25/0655H01L25/18H01L2223/6627H01L2223/6677H01L2223/6683H01L2224/11H01L2224/131H01L2224/13147H01L2224/16227H01L2224/16235H01L2224/32225H01L2224/45099H01L2224/48227H01L2224/73265H01L2224/81H01L2224/83851H01L2224/85H01L2224/94H01L2224/97H01L2924/00014H01L2924/014H01L2924/10253H01L2924/14H01L2924/1421H01L2924/15159H01L2924/15162H01L2924/15192H01L2924/15313H01L2924/15787H01L2924/16251H01L2924/19041H01L2924/19042H01L2924/19043H01L2924/19105H01L2924/3011
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Quick Facts
Patent No.
US 10,699,970
App. No.
16/140,381
Granted
Jun 30, 2020
Kind
B2
Abstract

An extension of conventional IC fabrication processes to include some of the concepts of flip-chip assemblies while producing a final “non-flip chip” circuit structure suitable for conventional packaging or for direct usage by customers. Multiple IC dies are fabricated on a semiconductor wafer in a conventional fashion, solder bumped or the like, and singulated. The singulated dies, which may be of different sizes and functionality, are then flip-chip assembled onto a single tile substrate of thin-film material which has been patterned with vias, peripheral connection pads, and one or more ground planes. Once dies are flip-chip mounted to the thin-film tile, all of the dies on the entire tile may be probed using automated testing equipment. Sets of dies of different functionality may be tested as a system or subsystem. Once test probing is complete, the dies (or sets of dies) and tile are singulated into die/tile assemblies.

Claims (28)

1. An integrated circuit packaging structure, including:

(1) a thin-film tile having a first surface and a second surface, and provisioned with probe-compatible connection pads on at least one of the first surface and/or the second surface; and

(2) a plurality of integrated circuit dies flip-chip assembled on at least the first surface of the thin-film tile, each integrated circuit die and a corresponding portion of the thin-film tile forming a die/tile assembly testable at microwave frequencies;

wherein the probe-compatible connection pads on at least one of the first surface and/or the second surface of the thin-film tile are accessible for connection to one or more probes after assembly of the plurality of flip-chipped integrated circuit dies on the thin-film tile, and the thin-film tile is configured to allow testing, before singulation of the die/tile assemblies, of some or all of the integrated circuit dies flip-chip assembled on at least the first surface of the thin-film tile.

2. The invention of claim 1 , wherein at least one of the plurality of integrated circuit dies has a different functionality and/or size from at least one other of the plurality of integrated circuit dies.

3. The invention of claim 1 , wherein at least some of the probe-compatible connection pads are configured as ground-signal-ground sets of pads.

4. The invention of claim 1 , wherein the plurality of integrated circuit dies include at least one of the following dies: RF front end chip comprising amplifiers and switches; an RF transceiver chip with up/down converters and IF amplifiers; a power control chip; and a digital/analog chip performing control and baseband functions.

5. The invention of claim 1 , wherein one or more passive devices is embedded in, formed on, and/or affixed to the thin-film tile.

6. The invention of claim 1 , further including at last one patch antenna formed on or affixed to at least one of the first surface and/or the second surface of the thin-film tile.

7. The invention of claim 1 , wherein at least one die/tile assembly further includes a battery.

8. The invention of claim 1 , wherein only a subset of probe-compatible connection pads is used for testing.

9. The invention of claim 1 , wherein each die/tile assembly is configured to be thermally coupled to a heat source or sink when at least one probe makes contact with one of the probe-compatible connection pads.

10. The invention of claim 1 , wherein two or more flip-chipped integrated circuit dies of a single die/tile assembly are interconnected by a signal path having an impedance greater than the characteristic input impedance of the one or more probes.

11. An integrated circuit packaging structure including:

(a) an electronic circuit embodied in a plurality of integrated circuit dies on a silicon-based substrate;

(b) electrically conductive structures positioned on each integrated circuit die; and

(c) a thin-film tile having a first surface and a second surface, and provisioned with probe-compatible connection pads on at least one of the first surface and/or the second surface and a plurality of vias within the tile;

where the plurality of integrated circuit dies are affixed on at least the first surface of the thin-film tile by means of the electrically conductive structures, each integrated circuit die and a corresponding portion of the thin-film tile forming a die/tile assembly testable at microwave frequencies;

wherein the probe-compatible connection pads on at least one of the first surface and/or the second surface of the thin-film tile are accessible for connection to probes after assembly of the plurality of integrated circuit dies on the thin-film tile, and the thin-film tile is configured to allow testing, before singulation of the die/tile assemblies, of some or all of the integrated circuit dies affixed on at least the first surface of the thin-film tile.

12. The invention of claim 11 , wherein at least one of the plurality of integrated circuit dies has a different functionality and/or size from at least one other of the plurality of integrated circuit dies.

13. The invention of claim 11 , wherein at least some of the probe-compatible connection pads are configured as ground-signal-ground sets of pads.

14. The invention of claim 11 , wherein the plurality of integrated circuit dies include at least one of the following dies: RF front end chip comprising amplifiers and switches; an RF transceiver chip with up/down converters and IF amplifiers; a power control chip; and a digital/analog chip performing control and baseband functions.

15. The invention of claim 11 , wherein one or more passive devices is embedded in, formed on, and/or affixed to the thin-film tile.

16. The invention of claim 11 , further including at last one patch antenna formed on or affixed to at least one of the first surface and/or the second surface of the thin-film tile.

17. The invention of claim 11 , wherein at least one die/tile assembly further includes a battery.

18. The invention of claim 11 , wherein only a subset of probe-compatible connection pads is used for testing.

19. The invention of claim 11 , wherein each die/tile assembly is configured to be thermally coupled to a heat source or sink when at least one probe makes contact with one of the probe-compatible connection pads.

20. The invention of claim 11 , wherein two or more integrated circuit dies of a single die/tile assembly are interconnected by a signal path having an impedance greater than the characteristic input impedance of the one or more probes.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 13, 2025
From: CHRISTIE, ANDREW; PILGRIM, DUNCAN
To: PEREGRINE SEMICONDUCTOR CORPORATION
Reel/Frame 072014/0548 →
CHANGE OF NAME Recorded Aug 13, 2025
From: PEREGRINE SEMICONDUCTOR CORPORATION
To: PSEMI CORPORATION
Reel/Frame 072439/0340 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 14, 2018
From: REEDY, RONALD EUGENE; MOFFAT, MARK
To: PSEMI CORPORATION
Reel/Frame 047783/0554 →
Continuity (3)
Continuation In Part 15799870 · Oct 31, 2017
Division 14741303 · Jun 16, 2015
Related Publication 20190096772A1 · Mar 28, 2019