Photomask having a plurality of shielding layers
View Patent ↗Some embodiments pertain to a photomask for mask patterning. The photomask includes a phase shift layer overlying a transparent layer, a first shielding layer overlying the phase shift layer, and a second shielding layer overlying the first shielding layer. The first shielding layer has a first optical density, and the second shielding layer has a second optical density. The second optical density is less than the first optical density.
1. A photomask for mask patterning, comprising:
a phase shift layer overlying a transparent layer;
a first shielding layer overlying the phase shift layer, wherein the first shielding layer has a first optical density; and
a second shielding layer overlying the first shielding layer, wherein the second shielding layer has a second optical density, wherein the second optical density is less than the first optical density.
2. The photomask for mask patterning of claim 1 , wherein the first shielding layer has a first thickness and the second shielding layer has a second thickness, the second thickness is less than the first thickness.
3. The photomask for mask patterning of claim 2 , wherein the first shielding layer and the second shielding layer have a combined optical density that is at least 1.8.
4. The photomask for mask patterning of claim 1 , wherein the first optical density is greater than 1 and the second optical density is less than 1.
5. The photomask for mask patterning of claim 1 , wherein the second shielding layer comprises chromium (Cr).
6. The photomask for mask patterning of claim 1 , wherein the phase shift layer comprises a molybdenum silicide (MoSi) layer.
7. The photomask for mask patterning of claim 1 , wherein the transparent layer comprises quartz.
8. The photomask for mask patterning of claim 1 , wherein the photomask has a photomask optical density of greater than 3.0.
9. The photomask for mask patterning of claim 1 , wherein the phase shift layer covers some portions of the transparent layer while leaving other portions of the transparent layer uncovered.
10. The photomask for mask patterning of claim 1 , wherein the first shielding layer covers some portions of the phase shift layer but leaves other portions of the phase shift layer uncovered.
11. A photomask for mask patterning, comprising:
a molybdenum silicide (MoSi) layer overlying a transparent layer;
a first shielding layer overlying the MoSi layer, wherein the first shielding layer comprises tantalum or boron and has a first thickness; and
a second shielding layer overlying the first shielding layer, wherein the second shielding layer comprises chromium and has a second thickness less than the first thickness, wherein a combined thickness of the first shielding layer and the second shielding layer is greater than about 19 nanometers and less than about 40 nanometers.
12. The photomask for mask patterning of claim 11 , wherein the MoSi layer covers some portions of the transparent layer while leaving other portions of the transparent layer uncovered.
13. The photomask for mask patterning of claim 11 , wherein the first shielding layer covers some portions of the MoSi layer but leaves other portions of the MoSi layer uncovered.
14. The photomask for mask patterning of claim 11 , wherein the first shielding layer and the second shielding layer collectively have a combined optical density greater than one.
15. The photomask for mask patterning of claim 14 , wherein the combined optical density is approximately 1.8.
16. The photomask for mask patterning of claim 11 , wherein the first shielding layer has a first optical density and the second shielding layer has a second optical density, and wherein the second optical density is less than the first optical density.
17. The photomask for mask patterning of claim 16 , wherein the first optical density is approximately 1.6 and the second optical density is approximately 0.23.
18. The photomask for mask patterning of claim 16 , wherein the first optical density is greater than 1 and the second optical density is less than 1.
19. A photomask for mask patterning, comprising:
a transparent layer;
a phase shift layer overlying the transparent layer, wherein the phase shift layer covers some portions of the transparent layer while leaving other portion of the transparent layer uncovered;
a first shielding layer overlying the phase shift layer and having a first thickness between an uppermost surface of the first shielding layer and a lowermost surface of the first shielding layer, wherein the first shielding layer has a first optical density for the first thickness and covers some portions of the phase shift layer but leaves other portions of the phase shift layer uncovered; and
a second shielding layer overlying the first shielding layer and having a second thickness between an uppermost surface of the second shielding layer and a lowermost surface of the second shielding layer, wherein the second shielding layer has a second optical density for the second thickness, wherein the second optical density is less than the first optical density.
20. The photomask for mask patterning of claim 19 , wherein the phase shift layer comprises a molybdenum silicide (MoSi) layer and the transparent layer comprises quartz.