FinFET having upper spacers adjacent gate and source/drain contacts
Processes form integrated circuit apparatuses that include parallel fins, wherein the fins are patterned in a first direction, and parallel gate structures intersect the fins in a second direction perpendicular to the first direction. Also, source/drain structures are positioned on the fins between the gate structures, source/drain contacts are positioned on the source/drain structures, sidewall insulators are positioned between the gate structures and the source/drain contacts (wherein the sidewall insulators have a lower portion adjacent to the fins and an upper portion distal to the fins), and upper sidewall spacers are positioned between the upper portion of the sidewall insulators and the source/drain contacts.
1. An integrated circuit apparatus comprising:
parallel fins extending from a layer, wherein the fins are patterned in a first direction;
parallel gate structures intersecting the fins in a second direction perpendicular to the first direction;
source/drain structures positioned on the fins between the gate structures;
source/drain contacts positioned on the source/drain structures;
sidewall insulators positioned on and between the gate structures and the source/drain contacts, wherein the sidewall insulators have a lower portion adjacent to the fins and an upper portion distal to the fins; and
upper sidewall spacers positioned on and between the upper portion of the sidewall insulators and the source/drain contacts,
wherein the upper sidewall spacers contact the upper portion of the sidewall insulators only, and are not adjacent the lower portion of the sidewall insulators, and
wherein only the lower portion of the sidewall insulators contacts the source/drain contacts.
2. The integrated circuit apparatus according to claim 1 , wherein the source/drain structures extend a first height from the fins, and wherein the upper sidewall spacers are positioned, on the sidewall insulators, more than the first height from the fins.
3. The integrated circuit apparatus according to claim 1 , wherein the upper sidewall spacers provide additional insulator width to narrow upper portions of the source/drain contacts relative to lower portions of the source/drain contacts.
4. The integrated circuit apparatus according to claim 1 , wherein the upper sidewall spacers are a different insulator material from the sidewall insulators.
5. The integrated circuit apparatus according to claim 1 , wherein the sidewall insulators and the upper sidewall spacers have different dielectric constants.
6. The integrated circuit apparatus according to claim 1 , wherein the source/drain contacts and an upper portion of the gate structures are the same material.
7. The integrated circuit apparatus according to claim 1 , further comprising gate contacts positioned on the gate structures, wherein the upper sidewall spacers are positioned on a full length of sidewalls of the gate contacts.
8. An integrated circuit apparatus comprising:
parallel fins extending from a layer, wherein the fins are patterned in a first direction;
parallel gate structures intersecting the fins in a second direction perpendicular to the first direction;
gate contacts positioned on the gate structures;
source/drain structures positioned on the fins between the gate structures;
source/drain contacts positioned on the source/drain structures;
sidewall insulators positioned on and between the gate structures and the source/drain contacts, wherein the sidewall insulators have a lower portion adjacent to the fins and an upper portion distal to the fins; and
upper sidewall spacers positioned on and between the upper portion of the sidewall insulators and the source/drain contacts and positioned on sidewalls of the gate contacts,
wherein the upper sidewall spacers contact the upper portion of the sidewall insulators only, and are not adjacent the lower portion of the sidewall insulators, and
wherein only the lower portion of the sidewall insulators contacts the source/drain contacts.
9. The integrated circuit apparatus according to claim 8 , wherein the source/drain structures extend a first height from the fins, and wherein the upper sidewall spacers are positioned, on the sidewall insulators, more than the first height from the fins.
10. The integrated circuit apparatus according to claim 8 , wherein the upper sidewall spacers provide additional insulator width to narrow upper portions of the source/drain contacts relative to lower portions of the source/drain contacts.
11. The integrated circuit apparatus according to claim 8 , wherein the upper sidewall spacers are a different insulator material from the sidewall insulators.
12. The integrated circuit apparatus according to claim 8 , wherein the sidewall insulators and the upper sidewall spacers have different dielectric constants.
13. The integrated circuit apparatus according to claim 8 , wherein the source/drain contacts and the upper portion of the gate structures are the same material.
14. The integrated circuit apparatus according to claim 8 , wherein the upper sidewall spacers are positioned on a full length of the sidewalls of the gate contacts.
15. An integrated circuit apparatus comprising:
fins extending from a layer;
gate structures intersecting the fins;
source/drain structures positioned on the fins between the gate structures;
source/drain contacts positioned on the source/drain structures;
sidewall insulators positioned on and between the gate structures and the source/drain contacts, wherein the sidewall insulators have a lower portion and an upper portion; and
upper sidewall spacers positioned on and between the upper portion of the sidewall insulators and the source/drain contacts,
wherein the upper sidewall spacers contact the upper portion of the sidewall insulators only, and are not adjacent the lower portion of the sidewall insulators, and
wherein only the lower portion of the sidewall insulators contacts the source/drain contacts.
16. The integrated circuit apparatus according to claim 15 , wherein the source/drain structures extend a first height from the fins, and wherein the upper sidewall spacers are positioned, on the sidewall insulators, more than the first height from the fins.
17. The integrated circuit apparatus according to claim 15 , wherein the upper sidewall spacers provide additional insulator width to narrow upper portions of the source/drain contacts relative to lower portions of the source/drain contacts.
18. The integrated circuit apparatus according to claim 15 , wherein the upper sidewall spacers are a different insulator material from the sidewall insulators.
19. The integrated circuit apparatus according to claim 15 , wherein the sidewall insulators and the upper sidewall spacers have different dielectric constants.
20. The integrated circuit apparatus according to claim 15 , wherein the source/drain contacts and an upper portion of the gate structures are the same material.