Semiconductor device and method of forming the same
The present disclosure provides a semiconductor device. The semiconductor device includes a substrate having a first conductive pattern and a conductive mask disposed over the first conductive pattern. The semiconductor device further includes a second conductive pattern disposed over the conductive mask, and electrically connecting with the first conductive pattern through the conductive mask. The conductive mask has a lower etch rate to a predetermined etchant than the second conductive pattern. A method for forming the semiconductor device is also provided.
1. A semiconductor device, comprising:
a substrate having a first conductive pattern;
a conductive mask disposed over the first conductive pattern; and
a second conductive pattern, disposed over the conductive mask and electrically connecting with the first conductive pattern through the conductive mask;
wherein the conductive mask has a lower etch rate to a predetermined etchant than the second conductive pattern, a first width of the first conductive pattern and a second width of the second conductive pattern gradually increase toward each other, and wherein the conductive mask comprises two corners from a cross-sectional view, and the second conductive pattern covers up at least one corner.
2. The semiconductor device of claim 1 , wherein the predetermined etchant comprises halogens.
3. The semiconductor device of claim 1 , wherein a material of the conductive mask comprises cobalt (Co) or nickel (Ni).
4. The semiconductor device of claim 1 , wherein the first conductive pattern has a surface coplanar with a dielectric surface of the substrate.
5. The semiconductor device of claim 4 , wherein the whole dielectric surface of the substrate is free from the conductive mask.
6. The semiconductor device of claim 1 , wherein the conductive mask includes a sidewall surface covered with the second conductive pattern.
7. A semiconductor device, comprising:
a substrate having a first conductive via, the first conductive via having a first width gradually changed;
a conductive mask disposed over the first conductive via, the conductive mask includes a sidewall surface; and
a second conductive via disposed over the conductive mask, the second conductive via having a second width gradually changed,
wherein the first width of the first conductive via and the second width of the second conductive via gradually increase toward each other, and the sidewall surface of the conductive mask is embedded in the second conductive via.
8. The semiconductor device of claim 7 , wherein the conductive mask has a lower etch rate to a predetermined etchant than the second conductive via.
9. The semiconductor device of claim 7 , wherein the conductive mask comprises cobalt (Co) or nickel (Ni).
10. The semiconductor device of claim 7 , wherein the substrate comprises a dielectric material and the first conductive via is embedded in the dielectric material.
11. The semiconductor device of claim 10 , wherein the whole dielectric material of the substrate is free from the conductive mask.
12. The semiconductor device of claim 10 , wherein the first conductive via has a surface coplanar with a dielectric surface of the substrate.
13. The semiconductor device of claim 7 , wherein the conductive mask comprises:
a first surface contacting with the first conductive via; and
a second surface contacting with the second conductive via.
14. The semiconductor device of claim 7 , wherein the substrate has a dielectric surface, and the second conductive via partially covers the dielectric surface of the substrate.
15. The semiconductor device of claim 14 , wherein the first conductive via has a surface coplanar with the dielectric surface of the substrate.
16. A method for forming a semiconductor device, comprising:
forming a substrate having a dielectric material and a first conductive pattern embedded in the dielectric material, wherein the first conductive pattern comprises a first conductive material;
forming a conductive mask over the first conductive pattern;
forming second conductive pattern over the conductive mask and electrically connecting with the first conductive pattern through the conductive mask, wherein the conductive mask has a lower etch rate to a predetermined etchant than the second conductive pattern, and a first width of the first conductive pattern and a second width of the second conductive pattern gradually increase toward each other; and
aligning the second conductive pattern to the conductive mask within an offset so that the second conductive pattern covers at least one corner of the conductive mask.
17. The method of claim 16 , wherein the first conductive pattern tapers toward a first direction and the second conductive pattern tapers toward a second direction opposite to the first direction.
18. The method of claim 16 , wherein forming the second conductive pattern comprises:
forming a blanket metal layer on the substrate;
forming a photo-sensitive polymer layer over the blanket metal layer;
patterning the photo-sensitive polymer layer so that a portion of the blanket metal layer is exposed from the photo-sensitive polymer; and
etching a portion of blanket metal layer with the predetermined etchant.
19. The method of claim 16 , wherein forming the conductive mask over the first conductive pattern comprises selectively forming the conductive mask over the first conductive pattern.
20. The method of claim 19 , wherein selectively forming the conductive mask over the first conductive pattern comprises metal-metal epitaxy on silicon (MMES).