Field effect transistor devices with buried well protection regions
A method of forming a transistor device includes providing a drift layer having a first conductivity type, forming a first region in the drift layer, the first region having a second conductivity type that is opposite the first conductivity type, forming a body layer on the drift layer including the first region, forming a source layer on the body layer, forming a trench in the source layer and the body layer above the first region and extending into the first region, forming a gate insulator on the inner sidewall of the trench, and forming a gate contact on the gate insulator.
1. A transistor device, comprising:
a drift layer having a first conductivity type;
a body layer on the drift layer, the body layer having a second conductivity type opposite the first conductivity type;
a source region on the body layer, the source region having the first conductivity type;
a trench extending through the source region, the trench comprising a sidewall and a floor;
a second conductivity type region in the drift layer and below the body layer;
a gate insulator on at least one of the source region, the floor of the trench, and the sidewall of the trench; and
a channel layer on the gate insulator between the gate insulator and the body layer,
wherein the channel layer has the second conductivity type.
2. The transistor device of claim 1 , wherein the second conductivity type region is below the trench.
3. The transistor device of claim 2 , wherein a width of the second conductivity type region is less than a width of the trench.
4. The transistor device of claim 1 , wherein the gate insulator is between a gate conductor and the second conductivity type region.
5. The transistor device of claim 1 , wherein an upper portion of the drift layer adjacent the body layer is doped with first conductivity type dopants more heavily than a lower portion of the drift layer.
6. The transistor device of claim 1 , wherein the gate insulator directly contacts the second conductivity type region.
7. The transistor device of claim 1 , further comprising a buried well region having the second conductivity type in the drift layer and extending towards the second conductivity type region.
8. A transistor device, comprising:
a drift layer having a first conductivity type;
a body layer on the drift layer, the body layer having a second conductivity type opposite the first conductivity type;
a source region on the body layer, the source region having the first conductivity type;
a trench extending through the source region, the trench comprising a sidewall and a floor;
a gate insulator on at least one of the source region, the floor of the trench, and the sidewall of the trench;
a body contact region having the second conductivity type extending through the source region and the body layer; and
a buried well region having the second conductivity type in the drift layer and in electrical contact with the body contact region,
wherein a width of the buried well region is greater than a width of the body contact region.
9. The transistor device of claim 8 , further comprising a channel layer on the gate insulator between the gate insulator and the body layer.
10. The transistor device of claim 8 , further comprising a second conductivity type region in the drift layer,
wherein the second conductivity type region is below the trench.
11. The transistor device of claim 10 , wherein a width of the second conductivity type region is less than a width of the trench.
12. A transistor device, comprising:
a drift layer having a first conductivity type;
a body layer on the drift layer, the body layer having a second conductivity type opposite the first conductivity type;
a trench extending into the body layer, the trench comprising a sidewall and a floor;
a body contact region having the second conductivity type extending into the body layer;
a first buried region having the second conductivity type in the drift layer and adjacent the floor of the trench; and
a second buried region having the second conductivity type in the drift layer and in electrical contact with the body contact region, the second buried region extending towards the first buried region,
wherein a width of the second buried region is greater than a width of the body contact region.
13. The transistor device of claim 12 , further comprising:
a channel layer having the second conductivity type on the sidewall of the trench between the trench and the body layer.
14. The transistor device of claim 12 , wherein an upper portion of the drift layer adjacent the body layer is doped with first conductivity type dopants more heavily than a lower portion of the drift layer.
15. The transistor device of claim 14 , wherein the first buried region extends into, but not through the upper portion of the drift layer.
16. A transistor device, comprising:
a drift layer having a first conductivity type;
a body layer on the drift layer, the body layer having a second conductivity type opposite the first conductivity type;
a trench extending into the body layer, the trench comprising a sidewall and a floor;
a body contact region having the second conductivity type extending into the body layer; and
a first buried region having the second conductivity type in the drift layer and adjacent the floor of the trench,
wherein a width of the first buried region is less than a width of the trench.
17. A transistor device, comprising:
a drift layer having a first conductivity type;
a source region on the drift layer, the source region having the first conductivity type;
a first buried region below a top surface of the drift layer, the first buried region having a second conductivity type opposite the first conductivity type;
a body contact region having the second conductivity type extending through the source region;
a second buried region having the second conductivity type in the drift layer and in electrical contact with the body contact region, the second buried region extending towards, and separated from, the first buried region; and
a channel layer having the second conductivity type on a sidewall of the source region.
18. The transistor device of claim 17 , further comprising a trench extending through the source region, the trench comprising a sidewall and a floor, wherein the first buried region is below the trench.
19. The transistor device of claim 18 , further comprising:
a body layer on the drift layer, the body layer having the second conductivity type;
a gate conductor layer adjacent the body layer and the source region; and
a gate insulator between the first buried region and the gate conductor layer, wherein the second buried region is separated from the gate insulator by a first distance.
20. The transistor device of claim 18 , wherein an upper portion of the drift layer is doped with first conductivity type dopants more heavily than a lower portion of the drift layer, and
wherein the first buried region is within the upper portion of the drift layer.