Micromechanical z-inertial sensor
A micromechanical z-inertial sensor, having a movable MEMS structure developed in a micromechanical function layer; a torsion spring connected to the movable MEMS structure; and a spring device connected to the torsion spring, the spring device being developed to hamper a deflection of the torsion spring orthogonal to a sensing direction of the MEMS structure in a defined manner.
1. A z-inertial sensor, comprising:
a movable structure developed in a function layer;
a torsion spring connected to the movable structure; and
a spring device connected to the torsion spring, the spring device being developed to hamper a deflection of the torsion spring orthogonal to a sensing direction of the structure in a defined manner.
2. The z-inertial sensor as recited in claim 1 , wherein a height of the spring device amounts to approximately one-third to approximately one-tenth of a height of the torsion spring.
3. The z-inertial sensor as recited in claim 1 , wherein the spring device is attached to a substrate.
4. The z-inertial sensor as recited in claim 3 , wherein the spring device is developed in a layer that is developed between the substrate and the function layer.
5. The z-inertial sensor as recited in claim 1 , wherein the spring device is at least partly situated below the movable structure.
6. The z-inertial sensor as recited in claim 1 , wherein the spring device is at least partly developed above the function layer.
7. The z-inertial sensor as recited claim 1 , wherein one end of the torsion spring is connected to a part of the spring device that is developed above the function layer, and another part of the torsion spring is connected to a part of the spring device that is developed below the function layer.
8. The z-inertial sensor as recited in claim 1 , wherein the spring device has sections that have an orthogonal alignment with respect to one another.
9. The z-inertial sensor as recited in claim 8 , wherein at least one element of the spring device has a reinforcement structure.
10. A method for producing a z-inertial sensor, comprising:
providing a movable structure developed in a function layer;
providing a torsion spring connected to the movable structure; and
providing a spring device connected to the torsion spring in such a way that a deflection of the torsion spring orthogonal to a sensing direction of the structure is able to be hampered in a defined manner.