Solid state imaging device and electronic apparatus
A solid state imaging device including: a pixel region that is formed on a light incidence side of a substrate and to which a plurality of pixels that include photoelectric conversion units is arranged; a peripheral circuit unit that is formed in a lower portion in the substrate depth direction of the pixel region and that includes an active element; and a light shielding member that is formed between the pixel region and the peripheral circuit unit and that shields the incidence of light, emitted from an active element, to the photoelectric conversion unit.
1. A light detecting device, comprising:
a photoelectric conversion region that is formed in a first substrate;
a circuit region that is formed in a second substrate
a first multilayer-wiring layer formed at a first side of the first substrate, the first multilayer-wiring layer including a first wiring layer having a first wiring and a second wiring layer having a second wiring, the first wiring and the second wiring being arranged via a first interlayer insulating film, and the first wiring being disposed above the second wiring; and
a second multilayer-wiring layer formed at a first side of the second substrate, the second multilayer-wiring layer including a third wiring layer having a third wiring and a fourth wiring layer having a fourth wiring, the third wiring and the fourth wiring being arranged via a second interlayer insulating film, and the third wiring being disposed above the fourth wiring;
wherein the first substrate and the second substrate are stacked such that the first multilayer-wiring layer and the second multilayer-wiring layer face each other, and
wherein at least two of the first wiring, the second wiring, the third wiring, or the fourth wiring are disposed between the photoelectric conversion region and the circuit region.
2. The light detecting device according to claim 1 , wherein the photoelectric conversion region includes a photodiode and a plurality of pixel transistors, and
an active element of the circuit region is formed by one or both of a MOS transistor and a diode.
3. The light detecting device according to claim 2 ,
wherein the circuit region includes a logic circuit, and
wherein the first substrate and the second substrate are electrically connected by a connected conductor.
4. The light detecting device according to claim 3 , wherein the connected conductor portion penetrates the first semiconductor substrate.
5. The light detecting device according to claim 1 , wherein at least two of the first wiring, the second wiring, the third wiring or the fourth wiring are formed by a reflection and dispersion member that reflects and disperses light.
6. The light detecting device according to claim 1 , wherein at least two of the first wiring, the second wiring, the third wiring or the fourth wiring are formed by a light absorbing member that absorbs light.
7. The light detecting device according to claim 1 , wherein at least two of the first wiring, the second wiring, the third wiring or the fourth wiring are formed by a combination of a reflection and dispersion member that reflects and disperses light and a light absorbing member that absorbs light.
8. The light detecting device according to claim 5 , wherein the reflection and dispersion member is formed by a single metallic film.
9. The light detecting device according to claim 5 , wherein the reflection and dispersion member is formed by a wiring of a plurality of layers, a dummy wiring of a plurality of layers, or a combination of a wiring and a dummy wiring of a plurality of layers of the multilayer wiring layer, each of which partially overlaps another.
10. The light detecting device according to claim 5 , wherein the reflection and dispersion member is formed by a combination of a single metallic film and wiring of a plurality of layers, dummy wiring of a plurality of layers, or a combination of wiring and dummy wiring of a plurality of layers of the multilayer wiring layer.
11. The light detecting device according to claim 6 , wherein the light absorbing member is formed of a single film using a semiconductor with a small band gap.
12. An electronic apparatus comprising:
a light detecting device;
an optical system that guides incident light to photoelectric conversion units of the light detecting device; and
a signal processing circuit that processes an output signal of the light detecting device,
wherein the light detecting device is configured by a light detecting device according to claim 1 .
13. The light detecting device according to claim 1 , wherein at least two of the first wiring, the second wiring, the third wiring, or the fourth wiring partially overlap each other.
14. The light detecting device according to claim 1 , wherein at least two of the first wiring, the second wiring, the third wiring, or the fourth wiring extend in a first direction.
15. The light detecting device according to claim 1 , wherein at least two of the first wiring, the second wiring, the third wiring, or the fourth wiring shield incidence of light emitted from an active element in the circuit region to the photoelectric conversion region.