Three-dimensional memory device having semiconductor plug formed using backside substrate thinning
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory stack including interleaved conductive layers and dielectric layers, a channel structure extending vertically through the memory stack, and a semiconductor layer above the memory stack. The channel structure includes a channel plug in a lower portion of the channel structure, a memory film along a sidewall of the channel structure, and a semiconductor channel over the memory film and in contact with the channel plug. The semiconductor layer includes a semiconductor plug above and in contact with the semiconductor channel.
1. A three-dimensional (3D) memory device, comprising:
a memory stack comprising interleaved conductive layers and dielectric layers;
a channel structure extending vertically through the memory stack and comprising:
a channel plug in a lower portion of the channel structure;
a memory film along a sidewall of the channel structure; and
a semiconductor channel over the memory film and in contact with the channel plug; and
a semiconductor layer above the memory stack and comprising a semiconductor plug above and in contact with the semiconductor channel, wherein a top surface of the semiconductor plug is flush with a top surface of the semiconductor layer.
2. The 3D memory device of claim 1 , wherein the memory film does not extend along a top surface and a bottom surface of the channel structure.
3. The 3D memory device of claim 1 , wherein the semiconductor layer comprises single crystalline silicon.
4. The 3D memory device of claim 3 , wherein the semiconductor plug is an epitaxially-grown silicon plug.
5. The 3D memory device of claim 3 , wherein the semiconductor plug is a deposited polysilicon plug or a silicide plug.
6. The 3D memory device of claim 1 , wherein an upper end of the semiconductor channel is in contact with a bottom surface of the semiconductor plug.
7. The 3D memory device of claim 1 , wherein a bottom surface of the semiconductor plug is above a top surface of the memory stack.
8. The 3D memory device of claim 1 , further comprising
a substrate above which the memory stack is disposed; and
a joining interface vertically between the substrate and the memory stack.
9. The 3D memory device of claim 1 , further comprising a peripheral device above the semiconductor layer.
10. The 3D memory device of claim 8 , further comprising a peripheral device vertically between the substrate and the memory stack.
11. A three-dimensional (3D) memory device, comprising:
a first memory deck comprising a first plurality of interleaved conductive layers and dielectric layers;
an etch stop layer on the first memory deck;
a second memory deck comprising a second plurality of interleaved conductive layers and dielectric layers on the etch stop layer;
a channel structure extending vertically through the first and second memory decks and the etch stop layer; and
a semiconductor plug above a top surface of the second memory deck and in contact with the channel structure, wherein a top surface of the semiconductor plug is flush with a top surface of the semiconductor layer.
12. The 3D memory device of claim 11 , wherein the etch stop layer comprises a metal or a semiconductor.
13. The 3D memory device of claim 11 , the channel structure comprises:
a channel plug in a lower portion of the channel structure;
a memory film along a sidewall of the channel structure; and
a semiconductor channel over the memory film and in contact with the channel plug and the semiconductor plug.
14. A method for forming a three-dimensional (3D) memory device, comprising:
forming a dielectric stack comprising interleaved sacrificial layers and dielectric layers on a front side of a first substrate;
forming a channel hole through the dielectric stack;
forming a memory film and a semiconductor channel along a sidewall and on a bottom surface of the channel hole;
forming a memory stack comprising interleaved conductive layers and dielectric layers by replacing the sacrificial layers in the dielectric stack with the conductive layers;
attaching the first substrate to a second substrate, wherein the front side of the first substrate is toward the second substrate;
thinning the first substrate from a backside of the first substrate to remove parts of the memory film and semiconductor channel on the bottom surface of the channel hole; and
forming a semiconductor plug in the thinned first substrate to contact the semiconductor channel.
15. The method of claim 14 , further comprising, prior to attaching, forming a channel plug in an upper portion of the channel hole to contact the semiconductor channel.
16. The method of claim 14 , wherein forming the semiconductor plug comprises removing parts of the memory film and semiconductor channel in the thinned first substrate to form a recess.
17. The method of claim 16 , wherein forming the semiconductor plug further comprises depositing the semiconductor plug in the recess.
18. The method of claim 16 , wherein forming the semiconductor plug further comprises epitaxially growing the semiconductor plug in the recess from the thinned first substrate.
19. The method of claim 14 , wherein forming the dielectric stack comprises:
forming a first dielectric deck comprising a first plurality of interleaved sacrificial layers and dielectric layers on the frontside of the first substrate;
forming an etch stop layer on the first dielectric deck to cover the first dielectric deck; and
forming a second dielectric deck comprising a second plurality of interleaved sacrificial layers and dielectric layers on the etch stop layer.
20. The method of claim 14 , further comprising:
prior to attaching, forming a peripheral device on the second substrate; or
after forming the semiconductor plug, forming a peripheral device above the thinned first substrate.