Purification methods
View Patent ↗Provided are purification methods, comprising: (a) providing an organic solvent and a phenolic peroxide formation inhibitor, wherein the organic solvent has a first boiling point at standard atmospheric pressure (bp 1 ) and the phenolic peroxide formation inhibitor has a second boiling point at standard atmospheric pressure (bp 2 ) that satisfy the following inequality (I): bp 2 ≤(1.10)(bp 1 ) (I); and (b) heating the organic solvent and the phenolic peroxide formation inhibitor to a temperature causing the organic solvent and phenolic peroxide formation inhibitor to vaporize, and (ii) condensing the vaporized organic solvent and peroxide formation inhibitor to provide a purified mixture of the organic solvent and peroxide formation inhibitor. The methods find particular use in the purification of solvents that are useful in process chemicals for the manufacture of semiconductor devices.
1. A purification method, comprising:
(a) providing an organic solvent and a phenolic peroxide formation inhibitor, wherein the organic solvent has a first boiling point at standard atmospheric pressure (bp 1 ) and the phenolic peroxide formation inhibitor has a second boiling point at standard atmospheric pressure (bp 2 ) that satisfy the following inequality (I):
bp 2 ≤(1.10)(bp 1 ) (I); and
(b) heating the organic solvent and the phenolic peroxide formation inhibitor to a temperature causing the organic solvent and phenolic peroxide formation inhibitor to vaporize, and (ii) condensing the vaporized organic solvent and phenolic peroxide formation inhibitor to provide a purified mixture of the organic solvent and phenolic peroxide formation inhibitor.
2. The purification method of claim 1 , wherein the purification method is a distillation process.
3. The purification method of claim 1 , wherein the purification method is performed under vacuum.
4. The purification method of claim 1 , wherein the organic solvent and the phenolic peroxide formation inhibitor are mixed prior to the step of heating.
5. The purification method of claim 1 , wherein the phenolic peroxide formation inhibitor has a second boiling point at standard atmospheric pressure (bp 2 ) that satisfies the following inequality (II):
(0.90)(bp 1 )<bp 2 <(1.10)(bp 1 ) (II).
6. The purification method claim 1 , wherein bp 2 is less than bp 1 .
7. The purification method of claim 1 , wherein the phenolic peroxide formation inhibitor is chosen from phenol, 2-methylphenol, 2-(trifluoromethyl)phenol, 4-methoxyphenol, 4-(trifluoromethoxy)phenol, 2,4-dimethyl-6-tert-butylphenol, 2,4-di(trifluoromethyl)-6-tert-butylphenol, 2,6-di-tert-butylphenol, 4-tert-butylpyrocatechol, and combinations thereof.
8. The purification method of claim 7 , wherein the phenolic peroxide formation inhibitor is chosen from 2-methylphenol, 2,4-dimethyl-6-tert-butylphenol, and combinations thereof.
9. The purification method of claim 1 , wherein the organic solvent is chosen from one or more of isoamyl ether, 2-butoxyethanol, dipropylene glycol monomethyl ether, dipropylene glycol dimethyl ether, tripropylene glycol monomethyl ether, ethyl-3-ethoxy propionate, ethyl lactate, propylene glycol, tripropylene glycol, diisopropyl benzene, triisopropyl benzene, cyclopentanone, cyclohexanone and combinations thereof.
10. The purification method of claim 9 , wherein the organic solvent is tripropylene glycol monomethyl ether and the phenolic peroxide formation inhibitor is 2,4-dimethyl-6-tert-butylphenol, or wherein the solvent is dipropylene glycol methyl ether and the phenolic peroxide formation inhibitor is 2-methylphenol.