IP Library Granted Patent US 10,794,866
Granted Patent B2
US 10,794,866 · App. 16/242,395 · Granted Oct 6, 2020

Acoustic wave sensors and methods of sensing a gas-phase analyte

Inventors: Christopher Gilmore (Natick, MA); Aaron A. Rachford (South Grafton, MA); Hee Jae Yoon (Seoul, KR); Jaclyn Murphy (Ashland, MA); Peter Trefonas, III (Medway, MA); Deyan Wang (Hudson, MA)
Assignees: Rohm and Haas Electronic Materials LLC; Rohm and Haas Electronic Materials Korea Ltd.
G01N29/036C08F232/06C08F238/00C08L39/04C08L79/08G01N29/022G01N29/223G01N29/36H01L41/1132G01N2291/014G01N2291/0215G01N2291/0255G01N2291/0256G01N2291/0257G01N2291/0423G01N2291/0426
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Quick Facts
Patent No.
US 10,794,866
App. No.
16/242,395
Granted
Oct 6, 2020
Kind
B2
Abstract

Acoustic wave sensors comprise: a piezoelectric layer, first and second electrodes arranged with the piezoelectric layer in a piezoelectric transducer circuit; and a polymeric sensing layer for adsorbing a gas-phase analyte, the adsorption of which analyte causes a change in resonant frequency of the piezoelectric transducer circuit, wherein the polymeric sensing layer comprises: (a) a polymer chosen from substituted or unsubstituted: polyarylenes comprising the reaction product of monomers comprising a first monomer comprising an aromatic acetylene group and a second monomer comprising a cyclopentadienone group; polyamides; polypyrazoles; or novolacs; or a cured product thereof; (b) a polymer chosen from substituted or unsubstituted: polyamic acids; or polyamic acid-polyimide copolymers; (c) a polymer formed from one or more monomers comprising a monomer comprising a polar group-substituted arylcyclobutene group, or a cured product thereof; or (d) a polymer comprising polymerized units of a monomer chosen from substituted or unsubstituted: maleimides; or norbomenes; or a cured product thereof. The acoustic wave sensors and methods of using such sensors find particular applicability in the sensing of gas-phase analytes.

Claims (30)

1. An acoustic wave sensor, comprising:

a piezoelectric layer;

first and second electrodes arranged with the piezoelectric layer in a piezoelectric transducer circuit; and

a polymeric sensing layer for adsorbing a gas-phase analyte, the adsorption of which analyte causes a change in resonant frequency of the piezoelectric transducer circuit, wherein the polymeric sensing layer comprises:

(a) a polymer chosen from substituted or unsubstituted: polyarylenes comprising the reaction product of monomers comprising a first monomer comprising an aromatic acetylene group and a second monomer comprising a cyclopentadienone group; polypyrazoles; or novolacs; or a cured product thereof;

(b) a polymer formed from one or more monomers comprising a monomer comprising a polar group-substituted arylcyclobutene group, or a cured product thereof; or

(c) a polymer comprising polymerized units of a monomer chosen from substituted or unsubstituted: maleimides; or norbornenes; or a cured product thereof.

2. The acoustic wave sensor of claim 1 , wherein the polymeric sensing layer comprises a polymer chosen from substituted or unsubstituted polyarylenes comprising the reaction product of monomers comprising a first monomer comprising an aromatic acetylene group and a second monomer comprising a cyclopentadienone group, or a cured product thereof.

3. The acoustic wave sensor of claim 1 , wherein the polymeric sensing layer comprises a polymer chosen from substituted or unsubstituted: polypyrazoles; or novolacs; or a cured product thereof.

4. The acoustic wave sensor of claim 1 , wherein the polymeric sensing layer comprises a polymer formed from one or more monomers comprising a monomer comprising a polar group-substituted arylcyclobutene group, or a cured product thereof.

5. The acoustic wave sensor of claim 1 , wherein the polymeric sensing layer comprises a polymer comprising polymerized units of a monomer chosen from substituted or unsubstituted: maleimides; or norbornenes; or a cured product thereof.

6. The acoustic wave sensor of claim 1 , wherein the acoustic wave sensor is a quartz crystal microbalance sensor, a film bulk acoustic resonator, or a surface acoustic wave sensor.

7. A method of sensing a gas-phase analyte, comprising:

(a) providing an acoustic wave sensor according to any of claims 1 ;

(b) exposing the polymeric sensing layer to an atmosphere comprising a gas-phase analyte; and

(c) monitoring resonant frequency of the acoustic wave sensor in response to the presence of the gas-phase analyte on the polymeric sensing layer.

8. The method of claim 7 , further comprising, in sequence:

(d) exposing the sensor to a second atmosphere effective to reduce the content of the gas-phase analyte in the sensor;

(e) allowing the resonant frequency of the acoustic wave sensor to recover to a baseline frequency; and

(f) exposing the sensor to a third atmosphere comprising a gas-phase analyte;

wherein the step (d), (e), and (f) sequence is performed one or more times.

9. The method of claim 7 , wherein the gas-phase analyte is an organic material.

10. The method of claim 7 , wherein the gas-phase analyte is chosen from one or more of toluene, ethanol, formaldehyde, acetaldehyde, acetone, acetic acid, or a trialkylamine.

11. The method of claim 7 , wherein the gas-phase analyte is chosen from an alkyl thiol or hydrogen sulfide.

12. The method of claim 7 , wherein the polymeric sensing layer comprises a polymer chosen from substituted or unsubstituted polyarylenes comprising the reaction product of monomers comprising a first monomer comprising an aromatic acetylene group and a second monomer comprising a cyclopentadienone group, or a cured product thereof.

13. The method of claim 7 , wherein the polymeric sensing layer comprises a polymer chosen from substituted or unsubstituted: polypyrazoles; or novolacs;

or a cured product thereof.

14. The method of claim 7 , wherein the polymeric sensing layer comprises a polymer formed from one or more monomers comprising a monomer comprising a polar group-substituted arylcyclobutene group, or a cured product thereof.

15. The method of claim 7 , wherein the polymeric sensing layer comprises a polymer comprising polymerized units of a monomer chosen from substituted or unsubstituted: maleimides; or norbornenes; or a cured product thereof.

16. The method of claim 7 , wherein the acoustic wave sensor is a quartz crystal microbalance sensor, a film bulk acoustic resonator, or a surface acoustic wave sensor.

Assignments (6)
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 073515/0243 →
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
Reel/Frame 073517/0298 →
CHANGE OF NAME Recorded Oct 29, 2024
From: ROHM & HAAS ELECTRONIC MATERIALS LLC
To: DUPONT ELECTRONIC MATERIALS INTERNATIONAL, LLC
Reel/Frame 069272/0383 →
CHANGE OF NAME Recorded Oct 17, 2024
From: ROHM & HAAS ELECTRONIC MATERIALS KOREA LTD
To: DUPONT SPECIALTY MATERIALS KOREA LTD
Reel/Frame 069185/0438 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 25, 2019
From: GILMORE, CHRISTOPHER; RACHFORD, AARON A.; MURPHY, JACLYN; TREFONAS, PETER, III; WANG, DEYAN
To: ROHM AND HAAS ELECTRONIC MATERIALS LLC
Reel/Frame 048134/0918 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 25, 2019
From: YOON, HEE JAE
To: ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.
Reel/Frame 048135/0068 →
Continuity (2)
Provisional Application 62617324 · Jan 15, 2018
Related Publication 20190219543A1 · Jul 18, 2019