IP Library Granted Patent US 10,640,523
Granted Patent B2
US 10,640,523 · App. 16/242,706 · Granted May 5, 2020

Aminoiodosilanes and methods of synthesizing these aminoiodosilanes

Inventors: Thomas H. Baum (New Fairfield, CT); Manish Khandelwal (Danbury, CT); David Kuiper (Brookfield, CT)
Assignee: ENTEGRIS, INC.
C07F13/005C07F7/10B01D3/10
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Quick Facts
Patent No.
US 10,640,523
App. No.
16/242,706
Granted
May 5, 2020
Kind
B2
Abstract

Methods of synthesizing aminoiodosilanes are disclosed. The reaction to produce the disclosed aminoiodosilanes is represented by the formula: SiI 4 +z (NH 2 R 1 )=SiI y (NHR 1 ) z , wherein R 1 is selected from a C 1 -C 10 alkyl or cycloalkyl, aryl, or a hetero group; y=1 to 3; and z=4−y.

Claims (13)

1. A method of synthesizing an aminoiodosilane comprising:

contacting an iodosilane having the formula SiI 4 with an monosubstituted amine having the formula NH 2 R 1 to produce an aminoiodosilane reaction product having the formula SiI y (NHR 1 ) z , wherein R 1 is selected from a C 1 -C 10 alkyl or cycloalkyl, aryl, or a hetero group; y=1 to 3; and z=4−y.

2. The method of claim 1 , wherein a molar ratio of the iodosilane to the monosubstituted amine ranges from approximately 1:2 to 1:4.

3. The method of claim 1 , further comprising isolating the aminoiodosilane reaction product from a crude mixture produced by the reaction.

4. The method of claim 1 , further comprising vacuum distilling the aminoiodosilane reaction product.

5. The method of claim 1 , wherein the method produces an aminoiodosilane reaction product and an alkylammoniuim iodide salt.

6. The method of claim 1 , wherein the reaction is performed in a solvent.

7. The method of claim 6 , wherein the solvent is toluene.

8. The method of claim 1 , wherein the monosubstituted amine is t-butylamine and the aminoiodosilane is t-butylaminotriiodosilane.

9. The method of claim 1 , wherein the monosubstituted amine is methylamine or ethylamine and the aminoiodosilane is methylaminotriiodosilane or ethylaminotriiodosilane.

10. The method of claim 1 , wherein the monosubstituted amine is isopropylamine and the aminoiodosilane is isopropylaminotriiodosilane.

11. The method of claim 1 , wherein the aminoiodosilane is bis(t-butylamino)diiodosilane or bis(isopropylamino)diiodosilane.

12. The method of claim 1 , wherein the amine is added to the iodosilane.

Assignments (3)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 060614/0980 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 9, 2019
From: BAUM, THOMAS H.; KHANDELWAL, MANISH; KUIPER, DAVID
To: ENTEGRIS, INC.
Reel/Frame 047938/0456 →