Semiconductor memory
A semiconductor memory includes a memory cell region that includes multiple memory cells stacked above a semiconductor substrate, first and second dummy regions on opposite sides of the memory cell region, each dummy region including multiple dummy cells stacked above the semiconductor substrate, and a wiring that electrically connects dummy cells of the first and second dummy regions that are at a same level above the semiconductor substrate.
1. A memory comprising:
a substrate;
a first memory cell array above the substrate;
a second memory cell array above the substrate;
a first dummy memory cell array above the substrate, wherein the first dummy memory cell array is between the first memory cell array and the second memory cell array;
a first wire electrically connected to the first dummy memory cell array, wherein a first part of the first wire is located between the first memory cell array and the second memory cell array; and
a second wire electrically connected to a memory cell of the first memory cell array and to a memory cell of the second memory cell array, wherein a part of the second wire is above the first memory cell array, the second memory cell array, and the first part of the first wire.
2. The memory according to claim 1 , wherein
the second wire is not electrically connected to the first dummy memory cell array.
3. The memory according to claim 1 , wherein
a second part of the first wire is not located between the first memory cell array and the second memory cell array.
4. The memory according to claim 1 , wherein the first memory cell array and the second memory cell array are aligned along a first direction parallel to a surface of the substrate.
5. The memory according to claim 4 , wherein the second wire extends in the first direction.
6. The memory according to claim 4 , further comprising:
a third memory cell array above the substrate aligned with the first memory cell array and the second memory cell array along the first direction; and
a second dummy memory cell array above the substrate, wherein the second dummy memory cell array is between the first memory cell array and the third memory cell array and the second wire is not electrically connected to the second dummy memory cell array.
7. The memory according to claim 6 , wherein
a third part of the first wire is electrically connected to the second dummy memory cell array and is located between the first memory cell array and the third memory cell array, and
the part of the second wire is also above the third part of the first wire and the second dummy memory cell array.
8. The memory according to claim 7 , wherein the first wire has a fourth part that is not between the first memory cell array and the third memory cell array and is on an opposite side of the first memory cell array from the second part in the second direction.
9. The memory according to claim 4 , further comprising:
a plurality of first word lines and second word lines electrically connected to the first memory cell array and stacked above the substrate, wherein
first contacts for the first word lines are located on a first side of the first memory cell array and second contacts for the second word lines are located on a second side of the memory cell array that is opposite to the first side in a second direction that crosses the first direction.
10. The memory according to claim 9 , wherein
the first word lines have a stair shape on a side facing away from the second word lines and the first contacts are formed on upper surfaces of the first word lines that are exposed by the stair shape; and
the second word lines have a stair shape on a side facing away from the first word lines and the second contacts are formed on upper surfaces of the second word lines that are exposed by the stair shape.
11. The memory according to claim 9 , wherein the first and second word lines that are at a first level above the substrate are controlled separately, and the first and second word lines that are at a second level above the substrate are controlled separately.
12. The memory according to claim 9 , wherein each of the first and second word lines has a planar shape, and the first word lines have a protruding portion that protrudes towards the second word lines and the second word lines have a protruding portion that protrudes towards the first word lines.
13. The memory according to claim 12 , wherein the protruding portion of the first word lines and the protruding portions of the second word lines are adjacent to each other along the first direction.
14. The memory according to claim 13 , wherein the first memory cell array includes a plurality of memory strings, each of the memory strings including memory cells that are electrically connected in series and have gates that are electrically connected to the first word lines and the second word lines.
15. The memory according to claim 14 , wherein the memory strings have a U-shape.
16. The memory according to claim 1 , wherein the substrate is a semiconductor substrate.