IP Library Granted Patent US 10,483,270
Granted Patent B2
US 10,483,270 · App. 16/270,526 · Granted Nov 19, 2019

Integrated assemblies and methods of forming integrated assemblies

Inventors: Justin B. Dorhout (Boise, ID); Kunal R. Parekh (Boise, ID); Martin C. Roberts (Boise, ID); Mohd Kamran Akhtar (Boise, ID); Chet E. Carter (Boise, ID); David Daycock (Boise, ID)
Assignee: Micron Technology, Inc.
H01L27/11524H01L27/11551H01L27/11553H01L27/11556H01L27/11582H01L27/1157
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Quick Facts
Patent No.
US 10,483,270
App. No.
16/270,526
Granted
Nov 19, 2019
Kind
B2
Abstract

Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region have the same majority carriers. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending along a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends laterally outward from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.

Claims (11)

1. An integrated assembly, comprising:

a first channel structure extending substantially vertically;

a second channel structure extending substantially vertically; each of the first and the second semiconductor channel structures having a first doped channel region interfacing a second doped channel region at a boundary region, the first doped channel regions being differently doped relative to the second doped channel regions; and

a gating structure extending between the first channel structure and the second channel structure and having a first gating region extending along the first channel structure, a second gating region extending along the second channel structure, and an interconnecting region extending laterally between the first and second gating regions, the interconnecting region being vertically narrower than first and second the gating regions.

2. The integrated assembly of claim wherein all of the first and second doped channel regions are doped to have the same majority carriers.

3. The integrated assembly of claim 2 wherein said same majority carriers are majority carriers are n-type.

4. The integrated assembly of claim 2 wherein said same majority carriers are p-type.

5. The integrated assembly of claim 1 wherein a first part of the gating structure and the first channel structure are incorporated into a select device electrically coupled in series with a plurality of memory cells.

6. The integrated assembly of claim 5 wherein the plurality of memory cells are vertically-stacked over the select device.

7. The integrated assembly of claim 1 wherein the first and second channel structures are supported by a semiconductor base having a substantially horizontal primary surface, and wherein the first and second channel structures extend primarily substantially orthogonally relative to the substantially horizontal primary surface.

8. The integrated assembly of claim 1 wherein the gating structure extends within a stack of alternating first and second insulating materials; a bottom surfaces of the gating regions being along a lower tier of the first insulating, material; a bottom surface of the interconnecting region being along a higher tier of the first insulating material; and an intermediate tier of the second insulating material being between the lower and higher tiers of the first insulating material and being directly against side surfaces of the gating regions.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 15, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 051041/0317 →
RELEASE OF SECURITY INTEREST Recorded Oct 14, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050724/0392 →
SUPPLEMENT NO. 12 TO PATENT SECURITY AGREEMENT Recorded Apr 19, 2019
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 048948/0677 →
SUPPLEMENT NO. 3 TO PATENT SECURITY AGREEMENT Recorded Apr 19, 2019
From: MICRON TECHNOLOGY, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 048951/0902 →
Continuity (3)
Continuation 15818338 · Nov 20, 2017
Division 14949807 · Nov 23, 2015
Related Publication 20190206883A1 · Jul 4, 2019