IP Library Granted Patent US 11,145,620
Granted Patent B2
US 11,145,620 · App. 16/292,469 · Granted Oct 12, 2021

Formation of bonding wire vertical interconnects

Inventors: Mow Huat Goh (Singapore, SG); Jiang Huang (Chengdu, CN); Ya Ping Zhu (Chengdu, CN); Chi Kwan Park (Singapore, SG); Keng Yew Song (Singapore, SG)
Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
H01L24/85B23K20/00B23K20/10H01L24/05H01L24/13H01L24/43H01L24/45H01L24/48H01L24/745H01L24/78H01L2224/78301H01L2224/78621
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Quick Facts
Patent No.
US 11,145,620
App. No.
16/292,469
Granted
Oct 12, 2021
Kind
B2
Abstract

A wire bonding method, comprising the steps of: extending a length of bonding wire from a capillary to form a wire tail; deforming a point on the wire tail to form a weakened portion between the wire tail and a remainder of the bonding wire retained within the capillary; and retracting at least a portion of the wire tail including the weakened portion into the capillary prior to bonding the wire tail to at least one of a bonding pad and a substrate.

Claims (17)

1. A wire bonding method, comprising the steps of:

extending a length of bonding wire from a capillary to form a wire tail;

deforming a point on the wire tail to form a weakened portion between an unweakened portion of the wire tail and a remainder of the bonding wire retained within the capillary; and

retracting at least a portion of the wire tail including the weakened portion into the capillary prior to bonding the wire tail to at least one of a bonding pad and a substrate.

2. The method of claim 1 , wherein the wire tail has a free end distal from the capillary and the weakened portion is proximate the capillary.

3. The method of claim 1 , wherein the step of deforming comprises pressing the wire tail with the capillary against at least one of the substrate and the bonding pad.

4. The method of claim 1 , wherein the step of deforming comprises pressing the point on the wire tail against at least one of the substrate and the bonding pad.

5. The method of claim 2 , wherein the step of deforming comprises translating the wire tail towards at least one of the substrate and the bonding pad to contact the free end of the wire tail against at least one of the substrate and the bonding pad, continued translation of the wire tail causing the free end to move over a surface of at least one of the substrate and the bonding pad out of axial alignment with the remainder of the bonding wire retained within the capillary.

6. The method of claim 1 , wherein the step of deforming comprises displacing the capillary in a displacement direction towards at least one of the substrate and the bonding pad while translating the capillary in a direction transverse the displacement direction.

7. The method of claim 1 , wherein the step of deforming comprises compressing a cross section of the wire tail to form the weakened portion.

8. The method of claim 1 , wherein the step of deforming further comprises the step of forming the wire tail around a tip of the capillary.

9. The method of claim 1 , wherein the step of retracting further includes the step of aligning the wire tail with respect to the remainder of the bonding wire retained within the capillary prior to bonding.

10. The method of claim 1 , comprising forming a bond ball on the free end of the wire tail prior to bonding.

11. The method of claim 10 , comprising displacing the bond ball to bond with the bond pad to form a ball wire bond.

12. The method of claim 6 , comprising repeatedly translating the capillary in directions transverse the displacement direction to further weaken the weakened portion.

13. The method of claim 12 , comprising aligning an opening of the capillary through which the bonded wire extends proximate the weakened portion while repeatedly translating the capillary in the direction transverse the displacement direction to further weaken the weakened portion.

14. The method of claim 1 , comprising displacing the remainder of the bonding wire and gripping the remainder of the bonding wire to detach it from a ball wire bond at the weakened portion.

Assignments (2)
CHANGE OF NAME Recorded Jan 20, 2023
From: ASM TECHNOLOGY SINGAPORE PTE LTD
To: ASMPT SINGAPORE PTE. LTD.
Reel/Frame 062444/0830 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 30, 2019
From: GOH, MOW HUAT; HUANG, JIANG; ZHU, YA PING; PARK, CHI KWAN; SONG, KENG YEW
To: ASM TECHNOLOGY SINGAPORE PTE LTD
Reel/Frame 049035/0802 →
Continuity (1)
Related Publication 20200286855A1 · Sep 10, 2020
Cited By (2)
US 12,685,190 US 12,686,071