Solid-state imaging element and solid-state imaging apparatus
A first solid-state imaging element according to an embodiment of the present disclosure includes a bottom-electrode; a top-electrode opposed to the bottom-electrode; a photoelectric conversion layer provided between the bottom-electrode and the top-electrode and including a first organic semiconductor material; and an—upper inter-layer provided between the top-electrode and the photoelectric conversion layer, and including a second organic semiconductor material having a halogen atom in a molecule at a concentration in a range from 0 volume % or more to less than 0.05 volume %.
1. A solid-state imaging element comprising:
a bottom-electrode;
a top-electrode opposed to the bottom-electrode;
a photoelectric conversion layer provided between the bottom-electrode and the top-electrode and including a first organic semiconductor material; and
an upper inter-layer provided between the top-electrode and the photoelectric conversion layer, and including a second organic semiconductor material having a halogen atom in a molecule, wherein a concentration of the second organic semiconductor material is less than 0.05 volume % of the upper inter-layer.
2. The solid-state imaging element according to claim 1 , wherein the first organic semiconductor material includes one or two or more halogen atoms in the molecule, and a binding energy of a halogen atom having smallest binding energy in the molecule is 5.4 eV or higher.
3. The solid-state imaging element according to claim 1 , wherein the photoelectric conversion layer includes a third organic semiconductor material or a fourth organic semiconductor material or both, the third organic semiconductor material serving as an electron donor to the first organic semiconductor material and the fourth organic semiconductor material serving as an electron acceptor to the first organic semiconductor material.
4. The solid-state imaging element according to claim 1 , wherein the first organic semiconductor material is a boronated subphthalocyanine derivative.
5. The solid-state imaging element according to claim 2 , wherein in a case where the top-electrode functions as a cathode, a work function (WF) of the top-electrode, an electron affinity of the upper inter-layer (EA 1 ), and an electron affinity of a material having smallest electron affinity of materials included in the photoelectric conversion layer (EA 2 ) satisfy EA 2 ≤EA 1 ≤WF.
6. The solid-state imaging element according to claim 2 , wherein in a case where the top-electrode functions as an anode, the work function (WF) of the top-electrode and the electron affinity of the upper inter-layer (EA 1 ) satisfy EA 1 >WF.
7. The solid-state imaging element according to claim 1 , wherein a distance between the top-electrode and the photoelectric conversion layer is in a range from 5 nm to 20 nm, both inclusive.
8. The solid-state imaging element according to claim 1 , wherein the top-electrode is formed including one or more kinds of indium tin oxide (ITO), indium zinc oxide (IZO), and indium-tungsten oxide (IWO).
9. The solid-state imaging element according to claim 1 , wherein an organic photoelectric converter including one or a plurality of the photoelectric conversion layers, and one or a plurality of inorganic photoelectric converters are stacked, the inorganic photoelectric converters performing photoelectric conversion in a different wavelength range from the organic photoelectric converter.
10. The solid-state imaging element according claim 9 , wherein
the inorganic photoelectric converter is formed to be embedded in a semiconductor substrate, and
the organic photoelectric converter is formed on a side on which a first surface is located of the semiconductor substrate.
11. A solid-state imaging element comprising:
a bottom-electrode;
a top-electrode opposed to the bottom-electrode;
a photoelectric conversion layer provided between the bottom-electrode and the top-electrode and including an organic semiconductor material having a halogen atom in a molecule; and
an organic semiconductor layer provided between the top-electrode and the photoelectric conversion layer, wherein
a distance between the top-electrode and the photoelectric conversion layer is in a range from 5 nm to 20 nm, both inclusive.
12. A solid-state imaging apparatus provided with a plurality of pixels each including one or a plurality of solid-state imaging elements, each of the solid-state imaging elements comprising:
a bottom-electrode;
a top-electrode opposed to the bottom-electrode;
a photoelectric conversion layer provided between the bottom-electrode and the top-electrode and including a first organic semiconductor material; and
an upper inter-layer provided between the top-electrode and the photoelectric conversion layer, and including a second organic semiconductor material having a halogen atom in a molecule, wherein a concentration of the second organic semiconductor material is less than 0.05 volume % of the upper inter-layer.
13. A solid-state imaging apparatus provided with a plurality of pixels each including one or a plurality of solid-state imaging elements, each of the solid-state imaging elements comprising:
a bottom-electrode;
a top-electrode opposed to the bottom-electrode;
a photoelectric conversion layer provided between the bottom-electrode and the top-electrode and including an organic semiconductor material having a halogen atom in a molecule; and
an organic semiconductor layer provided between the top-electrode and the photoelectric conversion layer, wherein
a distance between the top-electrode and the photoelectric conversion layer is in a range from 5 nm to 20 nm, both inclusive.