Advanced lithography and self-assembled devices
Advanced lithography techniques including sub-10 nm pitch patterning and structures resulting therefrom are described. Self-assembled devices and their methods of fabrication are described.
1. An integrated circuit structure, comprising:
a plurality of semiconductor bodies protruding from a surface of a semiconductor substrate, the plurality of semiconductor bodies having a grating pattern interrupted by a partial body portion;
a trench isolation layer between the plurality of semiconductor bodies and adjacent to lower portions of the plurality of semiconductor bodies, but not adjacent to upper portions of the plurality of semiconductor bodies, wherein the trench isolation layer is over the partial body portion;
one or more gate electrode stacks on top surfaces and laterally adjacent to sidewalls of the upper portions of the plurality of semiconductor bodies and on portions of the trench isolation layer; and
a back end of line (BEOL) metallization layer above the one or more gate electrode stacks, the BEOL metallization layer comprising a plurality of alternating first and second conductive line types along a same direction, wherein a total composition of the first conductive line type is different from a total composition of the second conductive line type.
2. The integrated circuit structure of claim 1 , wherein the lines of the first conductive line type are spaced apart by a pitch, and wherein the lines of the second conductive line type are spaced apart by the pitch.
3. The integrated circuit structure of claim 1 , wherein the plurality of alternating first and second conductive line types is in an inter-layer dielectric (ILD) layer.
4. The integrated circuit structure of claim 1 , wherein the lines of the plurality of alternating first and second conductive line types are separated by an air gap.
5. The integrated circuit structure of claim 1 , wherein the total composition of the first conductive line type substantially comprises copper, and wherein the total composition of the second conductive line type substantially comprises a material selected from the group consisting of Al, Ti, Zr, Hf, V, Ru, Co, Ni, Pd, Pt, Cu, W, Ag, Au and alloys thereof.
6. The integrated circuit structure of claim 1 , wherein the lines of the plurality of alternating first and second conductive line types each comprise a barrier layer along a bottom of and sidewalls of the line.
7. The integrated circuit structure of claim 1 , wherein the lines of the plurality of alternating first and second conductive line types each comprise a barrier layer along a bottom of the line but not along sidewalls of the line.
8. The integrated circuit structure of claim 1 , wherein one or more of the lines of the plurality of alternating first and second conductive line types is connected to an underlying via connected to an underlying metallization layer, the underlying metallization layer between the one or more gate electrode stacks and the BEOL metallization layer, and wherein one or more of the lines of the plurality of alternating first and second conductive line types is interrupted by a dielectric plug.
9. The integrated circuit structure of claim 1 , wherein the grating pattern has a constant pitch.
10. The integrated circuit structure of claim 1 , further comprising:
source or drain regions on both sides of the one or more gate electrode stacks, wherein the source or drain regions are adjacent to the upper portions of the plurality of semiconductor bodies and comprise a semiconductor material different than the semiconductor material of the semiconductor bodies.
11. The integrated circuit structure of claim 1 , further comprising:
source or drain regions on both sides of the one or more gate electrode stacks, wherein the source or drain regions are within the upper portions of the plurality of semiconductor bodies.
12. The integrated circuit structure of claim 1 , wherein each of the one or more gate electrode stacks comprises a high-k gate dielectric layer and a metal gate electrode.
13. The integrated circuit structure of claim 1 , wherein the first conductive line types have an upper surface with a metallic composition different from a metallic composition of an upper surface of the second conductive line types.
14. An integrated circuit structure, comprising:
a plurality of semiconductor bodies protruding from a surface of a semiconductor substrate, the plurality of semiconductor bodies having a grating pattern interrupted by a partial body portion;
a trench isolation layer between the plurality of semiconductor bodies and adjacent to lower portions of the plurality of semiconductor bodies, but not adjacent to upper portions of the plurality of semiconductor bodies, wherein the trench isolation layer is over the partial body portion;
one or more gate electrode stacks on top surfaces and laterally adjacent to sidewalls of the upper portions of the plurality of semiconductor bodies and on portions of the trench isolation layer; and
a back end of line (BEOL) metallization layer above the one or more gate electrode stacks, the BEOL metallization layer comprising a plurality of alternating first and second conductive line types along a same direction, wherein the lines of the plurality of alternating first and second conductive line types each comprise a barrier layer along a bottom of the line but not along sidewalls of the line.
15. The integrated circuit structure of claim 14 , wherein the lines of the first conductive line type are spaced apart by a pitch, and wherein the lines of the second conductive line type are spaced apart by the pitch.
16. The integrated circuit structure of claim 14 , wherein the plurality of alternating first and second conductive line types is in an inter-layer dielectric (ILD) layer.
17. The integrated circuit structure of claim 14 , wherein the lines of the plurality of alternating first and second conductive line types are separated by an air gap.
18. The integrated circuit structure of claim 14 , wherein a total composition of the first conductive line type is the same as a total composition of the second conductive line type.
19. The integrated circuit structure of claim 14 , wherein a total composition of the first conductive line type substantially comprises copper, and wherein a total composition of the second conductive line type substantially comprises a material selected from the group consisting of Al, Ti, Zr, Hf, V, Ru, Co, Ni, Pd, Pt, Cu, W, Ag, Au and alloys thereof.
20. The integrated circuit structure of claim 14 , wherein one or more of the lines of the plurality of alternating first and second conductive line types is connected to an underlying via connected to an underlying metallization layer, the underlying metallization layer between the one or more gate electrode stacks and the BEOL metallization layer, and wherein one or more of the lines of the plurality of alternating first and second conductive line types is interrupted by a dielectric plug.
21. The integrated circuit structure of claim 14 , wherein the grating pattern has a constant pitch.
22. The integrated circuit structure of claim 14 , further comprising:
source or drain regions on both sides of the one or more gate electrode stacks, wherein the source or drain regions are adjacent to the upper portions of the plurality of semiconductor bodies and comprise a semiconductor material different than the semiconductor material of the semiconductor bodies.
23. The integrated circuit structure of claim 14 , further comprising:
source or drain regions on both sides of the one or more gate electrode stacks, wherein the source or drain regions are within the upper portions of the plurality of semiconductor bodies.
24. An integrated circuit structure, comprising:
a plurality of semiconductor bodies protruding from a surface of a semiconductor substrate, the plurality of semiconductor bodies having a first grating pattern interrupted by a partial body portion;
a trench isolation layer between the plurality of semiconductor bodies and adjacent to lower portions of the plurality of semiconductor bodies, but not adjacent to upper portions of the plurality of semiconductor bodies, wherein the trench isolation layer is over the partial body portion;
one or more gate electrode stacks on top surfaces and laterally adjacent to sidewalls of the upper portions of the plurality of semiconductor bodies and on portions of the trench isolation layer;
a first back end of line (BEOL) metallization layer above the one or more gate electrode stacks, the first BEOL metallization layer comprising a second grating of alternating metal lines and dielectric lines in a first direction; and
a second BEOL metallization layer above the first BEOL metallization layer, the second BEOL metallization layer comprising a third grating of alternating metal lines and dielectric lines in a second direction, the second direction orthogonal to the first direction, wherein each metal line of the third grating of the second BEOL metallization layer is on a dielectric layer comprising alternating distinct regions of a first dielectric material and a second dielectric material corresponding to the alternating metal lines and dielectric lines of the first BEOL metallization layer, and wherein each dielectric line of the third grating of the second BEOL metallization layer comprises a continuous region of a third dielectric material distinct from the alternating distinct regions of the first dielectric material and the second dielectric material.
25. The integrated circuit structure of claim 24 , wherein a metal line of the second BEOL metallization layer is electrically coupled to a metal line of the first BEOL metallization layer by a via having a center directly aligned with a center of the metal line of the first BEOL metallization layer and with a center of the metal line of the second BEOL metallization layer.