Image sensors and methods of forming the same
An image sensor includes a substrate including a light-receiving region and a light-shielding region, a device isolation pattern in the substrate of the light-receiving region to define active pixels, and a device isolation region in the substrate of the light-shielding region to define reference pixels. An isolation technique of the device isolation pattern is different from that of the device isolation region.
1. An image sensor comprising:
a substrate having a first surface and a second surface opposite to the first surface;
a plurality of photoelectric conversion parts between the first and second surfaces;
a light shielding pattern on the second surface of the substrate;
first device isolation patterns in first trenches overlapped with the light shielding pattern, the first trenches disposed in the substrate; and
second device isolation patterns in second trenches disposed between the photoelectric conversion parts and exposed by the light shielding pattern,
wherein adjacent two of the second device isolation patterns are separated by a distance that is less than a distance separating adjacent two of the first device isolation patterns.
2. The image sensor of claim 1 ,
wherein the first device isolation patterns are disposed between the photoelectric conversion parts,
wherein the first trenches are recessed from the second surface of the substrate, and
wherein the second trenches are recessed from the second surface of the substrate.
3. The image sensor of claim 2 , wherein a pitch of the first trenches is different from a pitch of the second trenches.
4. The image sensor of claim 1 , further comprising a doped region provided between adjacent ones of the photoelectric conversion parts and overlapped with the light shielding pattern.
5. The image sensor of claim 4 , wherein the doped region comprises a different material from the first device isolation patterns.
6. The image sensor of claim 4 , wherein at least one of the photoelectric conversion parts is provided between the doped region and the first device isolation patterns.
7. The image sensor of claim 3 , wherein a total area of an interface between the first device isolation patterns and the substrate in a first unit area is smaller than that of an interface between the second device isolation patterns in a second unit area, and
wherein the number of the photoelectric conversion parts in the first unit area is equal to the number of the photoelectric conversion parts in the second unit area.
8. The image sensor of claim 1 , further comprising:
transfer gates on the first surface of the substrate, and
a plurality of interconnection structures covering the transfer gate on the first surface of the substrate.
9. The image sensor of claim 1 , further comprising:
micro-lens disposed on the second surface of the substrate, the micro-lens does not overlap with the light shielding pattern in a plan view.
10. A semiconductor device comprising:
a substrate;
a light shielding pattern disposed on a surface of the substrate;
a plurality of first photoelectric conversion parts provided in the substrate and overlapped with the light shielding pattern;
a plurality of second photoelectric conversion parts provided in the substrate and exposed by the light shielding pattern;
first trenches recessed from the surface of the substrate and disposed between the first photoelectric conversion parts; and
second trenches recessed from the surface of the substrate and disposed between the second photoelectric conversion parts,
wherein a distance between adjacent two of the second trenches is less than a distance between adjacent two of the first trenches.
11. The semiconductor device of claim 10 , further comprising:
first device isolation patterns in the first trench; and
second device isolation patterns in the second trench.
12. The semiconductor device of claim 11 , wherein a pitch of the first device isolation patterns is different from a pitch of the second device isolation patterns.
13. The semiconductor device of claim 10 , further comprising a device isolation region between another adjacent of two the second photoelectric conversion parts in the substrate.
14. The semiconductor device of claim 13 , wherein the device isolation region comprising a different material than first device isolation patterns.
15. The semiconductor device of claim 13 , wherein each of the first photoelectric conversion parts is surrounded by first device isolation patterns, and
wherein at least one of the second photoelectric conversion parts is surrounded by second device isolation patterns and the device isolation region.
16. An image sensor comprising:
a substrate having a first surface and a second surface opposite to the first surface;
a plurality of photoelectric conversion parts between the first and second surfaces, the photoelectric conversion parts the comprising a first photoelectric conversion part, a second photoelectric conversion part, and a third photoelectric conversion part;
a first device isolation pattern between the first photoelectric conversion part and the second photoelectric conversion part in the substrate;
a device isolation region between the second photoelectric conversion part and the third photoelectric conversion part in the substrate; and
a light shielding pattern on the second surface of the substrate and overlapped with the first photoelectric conversion part, the second photoelectric conversion part, the third photoelectric conversion part, the first device isolation pattern, and the device isolation region,
wherein the first device isolation pattern includes a different material from the device isolation region.
17. The image sensor of claim 16 , wherein the first device isolation pattern is provided in first trenches recessed from the second surface of the substrate.
18. The image sensor of claim 16 , wherein the device isolation region is a dopant region, the dopant region comprising a portion of the substrate including dopants.
19. The image sensor of claim 16 , wherein the photoelectric conversion parts further comprise a fourth photoelectric conversion part and a fifth photoelectric conversion part in the substrate,
wherein a second device isolation pattern is provided between the fourth photoelectric conversion part and the fifth photoelectric conversion part,
wherein the fourth photoelectric conversion part, the fifth photoelectric conversion part, and the second device isolation pattern are exposed by the light shielding pattern, and
wherein the second device isolation pattern includes a different material from the device isolation region.
20. The image sensor of claim 16 , further comprising second device isolation patterns disposed in second trenches and exposed by the light shielding pattern,
wherein the first device isolation pattern comprising a plurality of first device isolation patterns, and
wherein a pitch of the second device isolation pattern is different from a pitch of the first device isolation patterns.