IP Library Granted Patent US 11,127,692
Granted Patent B2
US 11,127,692 · App. 16/393,073 · Granted Sep 21, 2021

Semiconductor package

Inventors: Gun Lee (Suwon-si, KR); Jun Gul Hwang (Suwon-si, KR); Ji Eun Woo (Suwon-si, KR); Sung Keun Park (Suwon-si, KR)
Assignee: SAMSUNG ELECTRONICS CO., LTD.
H01L23/562H01L23/3128H01L23/485H01L23/5383H01L23/5386H01L23/5389H01L23/552H01L24/20H01L2224/214H01L2924/3025
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,127,692
App. No.
16/393,073
Granted
Sep 21, 2021
Kind
B2
Abstract

A semiconductor package includes a semiconductor chip, and a connection structure disposed on at least one side of the semiconductor chip, and including an insulating layer and a redistribution layer electrically connected to the semiconductor chip, wherein the redistribution layer includes a plurality of conductive patterns, and at least two of the plurality of conductive patterns have different degrees of surface roughness, and a conductive pattern having a higher surface roughness has a width wider than a width of a conductive pattern having a lower surface roughness.

Claims (27)

1. A semiconductor package comprising:

a semiconductor chip; and

a connection structure disposed on at least one side of the semiconductor chip, and including a first insulating layer and a redistribution layer electrically connected to the semiconductor chip,

wherein the redistribution layer includes a plurality of conductive patterns,

at least two of the plurality of conductive patterns have different degrees of surface roughness, and a conductive pattern having a higher surface roughness has a width wider than a width of a conductive pattern having a lower surface roughness, and

only a first surface of the conductive pattern having the higher surface roughness among the first surface of the conductive pattern having the higher surface roughness and a second surface, that faces in a same direction as the first surface, of the conductive pattern having the lower surface roughness has a concave-convex structure, the concave-convex structure of the first surface being an irregular concave-convex structure.

2. The semiconductor package of claim 1 , wherein the plurality of conductive patterns include a signal pattern and a ground pattern, and

a surface roughness of the ground pattern is greater than a surface roughness of the signal pattern.

3. The semiconductor package of claim 1 , wherein the irregular concave-convex structure is a surface-etched irregular structure.

4. The semiconductor package of claim 1 , wherein the first surface of the conductive pattern having the higher surface roughness is in contact with the first insulating layer.

5. The semiconductor package of claim 4 , wherein a surface roughness of a surface opposing the first surface of the conductive pattern having the higher surface roughness is lower than the surface roughness of the first surface of the conductive pattern having the higher surface roughness.

6. The semiconductor package of claim 5 , wherein the first surface of the conductive pattern having the higher surface roughness is disposed further from the semiconductor chip than the opposing surface.

7. The semiconductor package of claim 5 , wherein the first surface of the conductive pattern having the higher surface roughness and side surfaces of the conductive pattern having the higher surface roughness are embedded in the first insulating layer, and

the opposing surface is in contact with a second insulating layer of the connection structure.

8. The semiconductor package of claim 1 , wherein the conductive pattern having the higher surface roughness has a flat plate shape.

9. A semiconductor package comprising:

a semiconductor chip; and

a connection structure disposed on at least one side of the semiconductor chip, and including a first insulating layer and a redistribution layer electrically connected to the semiconductor chip,

wherein the redistribution layer includes a plurality of conductive patterns,

at least portions of surfaces of the plurality of conductive patterns which are in contact with the first insulating layer have a regular concave-convex structure,

at least one of the plurality of conductive patterns is a ground pattern that is connected to a ground terminal of the semiconductor chip,

a largest concave-convex structure on the each of the portions of the surfaces of the plurality of conductive patterns, including the ground pattern, is the regular concave-convex structure, and

a size of the largest concave-convex structure is 1μm or less.

10. The semiconductor package of claim 9 , wherein a surface opposing surfaces of the plurality of conductive patterns which have the regular concave-convex structure does not include a regular concave-convex structure.

11. The semiconductor package of claim 10 , wherein the surfaces of the plurality of conductive patterns which have the regular concave-convex structure are disposed further from the semiconductor chip than the opposing surface.

12. The semiconductor package of claim 10 , wherein the surfaces of the plurality of conductive patterns which have the regular concave-convex structure, and side surfaces of the plurality of conductive patterns are embedded in the first insulating layer, and

the opposing surface is in contact with a second insulating layer of the connection structure.

Assignments (3)
CORRECTIVE ASSIGNMENT TO CORRECT THE CONVEYING PARTY BY ADDING THE FOURTH ASSIGNOR NAME PREVIOUSLY RECORDED AT REEL: 0490777 FRAME: 0881. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jul 15, 2021
From: LEE, GUN; HWANG, JUN GUL; WOO, JI EUN; PARK, SUNG KEUN
To: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Reel/Frame 056888/0293 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 3, 2019
From: SAMSUNG ELECTRO-MECHANICS CO., LTD.
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 049350/0756 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 3, 2019
From: LEE, GUN; HWANG, JUN GUL; WOO, JI EUN
To: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Reel/Frame 049077/0881 →
Priority Claims (1)
KR 10-2018-0146215 · Nov 23, 2018 · national
Continuity (1)
Related Publication 20200168562A1 · May 28, 2020