Laser doping apparatus and laser doping method

1. A laser doping apparatus that irradiates a semiconductor substrate with a pulse laser beam to perform doping to the semiconductor substrate, the laser doping apparatus comprising:

a laser device configured to output first and second pulse laser beams; and

a controlling device configured to control a time-domain pulse waveform, a fluence, and an irradiated region of each of the first and second pulse laser beams such that

a first irradiated region of the semiconductor substrate is irradiated with the first pulse laser beam that has a first time-domain pulse waveform and a first fluence, and

a second irradiated region of the semiconductor substrate, the second irradiated region being different from the first irradiated region, is irradiated with the second pulse laser beam that has a second time-domain pulse waveform and a second fluence, the second time-domain pulse waveform being different from the first time-domain pulse waveform and the second fluence being different from the first fluence, wherein

the controlling device includes an optical pulse stretcher configured to control the time-domain pulse waveform of the first pulse laser beam by

branching the first pulse laser beam to third and fourth pulse laser beams,

delaying the fourth pulse laser beam from the third pulse laser beam, and

outputting the third and fourth pulse laser beams.

2. The laser doping apparatus according to claim 1 , wherein

a maximum optical intensity of the third pulse laser beam outputted from the optical pulse stretcher is higher than a maximum optical intensity of the fourth pulse laser beam outputted from the optical pulse stretcher.

3. The laser doping apparatus according to claim 2 , wherein

time-domain pulse waveforms of the third and fourth pulse laser beams outputted from the optical pulse stretcher overlap with each other.

4. The laser doping apparatus according to claim 1 , wherein the optical pulse stretcher further controls the time-domain pulse waveform of the second pulse laser beam by

branching the second pulse laser beam to fifth and sixth pulse laser beams,

delaying the sixth pulse laser beam from the fifth pulse laser beam, and

outputting the fifth and sixth pulse laser beams.

5. The laser doping apparatus according to claim 4 , wherein

a maximum optical intensity of the third pulse laser beam outputted from the optical pulse stretcher is higher than a maximum optical intensity of the fourth pulse laser beam outputted from the optical pulse stretcher, and

a maximum optical intensity of the fifth pulse laser beam outputted from the optical pulse stretcher is higher than a maximum optical intensity of the sixth pulse laser beam outputted from the optical pulse stretcher.

6. The laser doping apparatus according to claim 5 , wherein

time-domain pulse waveforms of the third and fourth pulse laser beams outputted from the optical pulse stretcher overlap with each other, and

time-domain pulse waveforms of the fifth and sixth pulse laser beams outputted from the optical pulse stretcher overlap with each other.

7. The laser doping apparatus according to claim 1 , wherein the controlling device includes an attenuator configured to control the fluence of each of the first and second pulse laser beams.

8. The laser doping apparatus according to claim 1 , wherein the controlling device includes a variable slit configured to control the irradiated region of each of the first and second pulse laser beams.

9. The laser doping apparatus according to claim 1 , wherein the controlling device controls the time-domain pulse waveform, the fluence, and the irradiated region of each of the first and second pulse laser beams such that

dopant concentration in the first irradiated region is higher than dopant concentration in the second irradiated region, and

doping depth in the first irradiated region is smaller than doping depth in the second irradiated region.

10. The laser doping apparatus according to claim 1 , wherein the controlling device controls the time-domain pulse waveform, the fluence, and the irradiated region of each of the first and second pulse laser beams such that

the first fluence is higher than the second fluence, and

a first pulse width shown in the first time-domain pulse waveform is smaller than a second pulse width shown in the second time-domain pulse waveform.

11. The laser doping apparatus according to claim 1 , wherein the pulse laser beam has a wavelength of 248 nm or more and 308 nm or less.

12. A laser doping apparatus that irradiates a semiconductor substrate with a pulse laser beam to perform doping to the semiconductor substrate, the laser doping apparatus comprising:

a laser device configured to output first and second pulse laser beams; and

a controlling device configured to control a time-domain pulse waveform, a fluence, and an irradiated region of each of the first and second pulse laser beams such that

a first irradiated region of the semiconductor substrate is irradiated with the first pulse laser beam that has a first time-domain pulse waveform and a first fluence, and

a second irradiated region of the semiconductor substrate, the second irradiated region being different from the first irradiated region, is irradiated with the second pulse laser beam that has a second time-domain pulse waveform and a second fluence, the second time-domain pulse waveform being different from the first time-domain pulse waveform and the second fluence being different from the first fluence, wherein

the laser device includes:

a first laser unit configured to output seventh and eighth pulse laser beams;

a second laser unit configured to output ninth and tenth pulse laser beams; and

an optical system configured to combine the seventh and ninth pulse laser beams to output the first pulse laser beam, and combine the eighth and tenth pulse laser beams to output the second pulse laser beam.

13. The laser doping apparatus according to claim 12 , wherein the controlling device includes a delay circuit configured to control the time-domain pulse waveform of the first pulse laser beam by

outputting a first trigger signal to the first laser unit such that the first laser unit outputs the seventh pulse laser beam at a first timing, and

outputting a second trigger signal to the second laser unit such that the second laser unit outputs the ninth pulse laser beam at a second timing after the first timing.

14. The laser doping apparatus according to claim 13 , wherein

the controlling device sets target values of pulse energy of the first and second laser units such that a maximum optical intensity of the seventh pulse laser beam outputted from the optical system is higher than a maximum optical intensity of the ninth pulse laser beam outputted from the optical system.

15. The laser doping apparatus according to claim 14 , wherein

time-domain pulse waveforms of the seventh and ninth pulse laser beams outputted from the optical system overlap with each other.

16. The laser doping apparatus according to claim 13 , wherein the delay circuit further controls the time-domain pulse waveform of the second pulse laser beam by

outputting a third trigger signal to the first laser unit such that the first laser unit outputs the eighth pulse laser beam at a third timing, and

outputting a fourth trigger signal to the second laser unit such that the second laser unit outputs the tenth pulse laser beam at a fourth timing after the third timing.

17. The laser doping apparatus according to claim 16 , wherein

the controlling device sets target values of pulse energy of the first and second laser units such that a maximum optical intensity of the seventh pulse laser beam outputted from the optical system is higher than a maximum optical intensity of the ninth pulse laser beam outputted from the optical system and a maximum optical intensity of the eighth pulse laser beam outputted from the optical system is higher than a maximum optical intensity of the tenth pulse laser beam outputted from the optical system.

18. The laser doping apparatus according to claim 17 , wherein

time-domain pulse waveforms of the seventh and ninth pulse laser beams outputted from the optical system overlap with each other, and

time-domain pulse waveforms of the eighth and tenth pulse laser beams outputted from the optical system overlap with each other.

19. The laser doping apparatus according to claim 12 , wherein the controlling device includes an attenuator configured to control the fluence of each of the first and second pulse laser beams.

20. A laser doping method to irradiate a semiconductor substrate with a pulse laser beam to perform doping to the semiconductor substrate, the method comprising:

outputting first and second pulse laser beams; and

controlling a time-domain pulse waveform, a fluence, and an irradiated region of each of the first and second pulse laser beams such that

a first irradiated region of the semiconductor substrate is irradiated with the first pulse laser beam that has a first time-domain pulse waveform and a first fluence, and

a second irradiated region of the semiconductor substrate, the second irradiated region being different from the first irradiated region, is irradiated with the second pulse laser beam that has a second time-domain pulse waveform and a second fluence, the second time-domain pulse waveform being different from the first time-domain pulse waveform and the second fluence being different from the first fluence, wherein

the first time-domain pulse waveform of the first pulse laser beam is controlled with an optical pulse stretcher by

branching the first pulse laser beam to third and fourth pulse laser beams,

delaying the fourth pulse laser beam from the third pulse laser beam, and

outputting the third and fourth pulse laser beams.