Gold plating on metal layer for backside connection access
A backside connection access structure and method for manufacturing are described. The method including forming a gold layer over at least a portion of a substrate. The method also including forming a metal layer over the gold layer. And, the method includes forming an opening in the substrate to expose at least a portion of the gold layer.
1. A device comprising:
a metal substrate defining an opening;
a metal layer within a dielectric layer having a portion of the metal layer disposed opposite the opening in the metal substrate; and
a gold layer within the opening and disposed between the opening in the metal substrate and the metal layer within the opening such that the metal layer is not exposed within the opening in the metal substrate,
the opening is configured to expose at least a portion of the gold layer.
2. The device of claim 1 comprising a strike layer configured initially between the metal substrate and the gold layer.
3. The device of claim 2 , wherein the strike layer is a nickel layer.
4. The device of claim 1 comprising a barrier layer between the gold layer and metal layer.
5. The device of claim 4 , wherein the barrier layer is a nickel layer.