Method of manufacture of super-junction power semiconductor device

1. A method for manufacturing a super-junction MOSFET comprising:

forming a first trench in a semiconductor layer of a substrate;

forming a first oxide layer over the semiconductor layer and in the first trench, wherein the first oxide layer is along a first bottom and first sidewalls of the first trench;

depositing an electrically conductive material in the first trench to form a first shield electrode;

removing a first portion of the electrically conductive material from the first trench, wherein a first part of the first oxide layer on the first sidewalls of the first trench is exposed from the electrically conductive material when the first portion of the electrically conductive material is removed;

removing the first part of the first oxide layer from the first sidewalls of the first trench, the removing the first part of the first oxide layer additionally removing another part of the first oxide layer adjacent to first shield sidewalls of the first shield electrode to produce first openings along a first top part of the first shield sidewalls;

forming a second oxide layer over and in contact with the first shield electrode, the second oxide layer filling the first openings, wherein the forming the second oxide layer comprises applying the second oxide layer to a depth great enough to entirely fill the first openings;

removing a second part of the second oxide layer to expose a first top surface of the first shield electrode;

forming a gate dielectric over the first top surface of the first shield electrode; and

depositing additional electrically conductive material over the gate dielectric in the first trench to form a gate electrode of the MOSFET.

2. The method of claim 1 wherein:

the forming the second oxide layer further comprises forming the second oxide layer along the first sidewalls of the first trench;

the removing the second part of the second oxide layer further comprises removing the second oxide layer from the first sidewalls of the first trench to produce exposed first sidewalls; and

the forming the gate dielectric further comprises forming the gate dielectric on the exposed first sidewalls.

3. The method of claim 1 further comprising:

forming a second trench in the semiconductor layer of the substrate;

forming the first oxide layer along a second bottom and second sidewalls of the second trench;

depositing the electrically conductive material in the second trench to form a second shield electrode;

removing a second portion of the electrically conductive material from the second trench;

removing the first part of the first oxide layer in the second trench to produce second openings along a second top part of the second shield sidewalls of the second shield electrode;

forming the second oxide layer over and in contact with the second recessed portion of the second shield electrode, the second oxide layer filling the second openings;

removing the second part of the second oxide layer to expose a second top surface of the second shield electrode; and

forming the gate dielectric over the second top surface of the second shield electrode.

4. The method of claim 3 wherein:

the removing the first portion removes the electrically conductive material to a first depth in the first trench; and

the removing the second portion removes the electrically conductive material to a second depth in the second trench, the second depth being less than the first depth.

5. The method of claim 3 further comprising removing the gate dielectric from the second top surface of the second shield electrode following formation of the gate electrode.

6. The method of claim 1 wherein the gate electrode is vertically spaced from the first shield electrode such that the gate electrode does not lie lateral to the first shield sidewalls of the first shield electrode.

7. The method of claim 1 wherein the removing the second part of the second oxide layer includes isotropically etching the second oxide layer.

8. The method of claim 1 wherein the second oxide layer comprises tetraethyl orthosilicate (TEOS).

9. The method of claim 1 wherein the gate dielectric is formed by thermal oxidation.

10. The method of claim 1 wherein the electrically conductive material is first polysilicon material, the additional electrically conductive material is second polysilicon material, and the gate dielectric is an inter-poly dielectric.

11. A method of making a semiconductor device comprising:

forming a first mask over a semiconductor layer of a substrate, wherein the substrate includes a major surface, and a first trench and a second trench extend into the semiconductor layer from the major surface, each of the first and second trenches including a first dielectric layer along respective sidewalls and each of the first and second trenches being filled with a first polysilicon material, wherein the first mask is configured to cover the second trench;

removing a first portion of the first polysilicon material from the first trench;

removing the first mask;

removing a second portion of the first polysilicon material from the first and second trenches to produce a first shield electrode in the first trench and a second shield electrode in the second trench, wherein a first part of the first dielectric layer on the sidewalls of the first trench is exposed from the electrically conductive material following removal of the first and second portions of the electrically conductive material;

removing a first part of the first dielectric layer from the first and second trenches, wherein the removing the first part of the first dielectric layer removes the first dielectric layer from the sidewalls of the first trench, produces first openings along a first top part of the sidewalls of the first trench, and produces second openings along a second top part of the sidewalls of the second trench;

forming a second dielectric layer over and in contact with the first and second shield electrodes, wherein the forming the second dielectric layer comprises applying the second dielectric layer to a depth great enough to entirely fill the first and second openings;

removing a second part of the second dielectric layer to expose a first top surface of the first shield electrode, the first sidewalls of the first trench, and a second top surface of the second shield electrode;

forming a gate dielectric over the first and second top surfaces of the first and second shield electrodes and over the first sidewalls of the first trench; and

depositing a second polysilicon material in the first trench to form a gate electrode, wherein the gate dielectric remains between the first and second polysilicon materials in the first trench and the gate dielectric remains on the first sidewalls.

12. The method of claim 11 wherein:

the removing the first portion removes the electrically conductive material to a first depth in the first trench; and

the removing the second portion removes the electrically conductive material to a second depth in the second trench, the second depth being less than the first depth.

13. The method of claim 11 further comprising removing the gate dielectric from the second top surface of the second shield electrode following formation of the gate electrode.

14. The method of claim 11 wherein the removing the second part of the second dielectric layer includes isotropically etching the second dielectric layer.

15. The method of claim 11 wherein the second dielectric layer comprises tetraethyl orthosilicate (TEOS).

16. The method of claim 11 further comprising:

forming a doped implant region in a top portion of the semiconductor layer between the first and second trenches;

depositing a dielectric material over the substrate;

forming a first contact in the dielectric material over and in contact with the gate electrode; and

forming a second contact in the dielectric material over and in contact with the second shield electrode.

17. A method for manufacturing a super-junction MOSFET comprising:

forming a first trench in a semiconductor layer of a substrate;

forming a first oxide layer over the semiconductor layer and in the first trench, wherein the first oxide layer is along a first bottom and first sidewalls of the first trench;

depositing an electrically conductive material in the first trench to form a first shield electrode;

removing a first portion of the electrically conductive material from the first trench, wherein a first part of the first oxide layer on the first sidewalls of the first trench is exposed from the electrically conductive material when the first portion of the electrically conductive material is removed;

removing the first part of the first oxide layer from the first sidewalls of the first trench, the removing the first part of the first oxide layer additionally removing another part of the first oxide layer adjacent to first shield sidewalls of the first shield electrode to produce first openings along a first top part of the first shield sidewalls;

forming a second oxide layer over and in contact with the first recessed portion of the first shield electrode, wherein the second oxide layer is applied to a depth great enough to entirely fill the first openings and the second oxide layer is formed along the first sidewalls of the first trench;

removing a second part of the second oxide layer to expose a first top surface of the first shield electrode and to remove the second oxide layer from the first sidewalls of the trench to produce exposed sidewalls;

forming a gate dielectric over the first top surface of the first shield electrode and on the exposed first sidewalls; and

depositing additional electrically conductive material over the gate dielectric in the first trench to form a gate electrode of the MOSFET.

18. The method of claim 17 further comprising:

forming a second trench in the semiconductor layer of the substrate;

forming the first oxide layer along a second bottom and second sidewalls of the second trench;

depositing the electrically conductive material in the second trench to form a second shield electrode;

removing a second portion of the electrically conductive material from the second trench;

removing the first part of the first oxide layer in the second trench to produce second openings along a second top part of the second shield sidewalls of the second shield electrode;

forming the second oxide layer over and in contact with the second recessed portion of the second shield electrode, the second oxide layer entirely filling the second openings;

removing the second part of the second oxide layer to expose a second top surface of the second shield electrode; and

forming the gate dielectric over the second top surface of the second shield electrode.

19. The method of claim 18 further comprising removing the gate dielectric from the second top surface of the second shield electrode following formation of the gate electrode.