Carbon nanotube electron emitter, method of manufacturing the same and X-ray source using the same
View Patent ↗The present disclosure provides a method of manufacturing a carbon nanotube electron emitter, including: forming a carbon nanotube film; performing densification by dipping the carbon nanotube film in a solvent; cutting an area of the carbon nanotube film into a pointed shape or a line shape; and fixing the cutting area of the carbon nanotube film arranged between at least two metal members to face upwards with lateral pressure.
1. An X-ray source using a carbon nanotube electron emitter, comprising:
a cathode electrode;
an anode electrode arranged above the cathode electrode to face the cathode electrode;
a carbon nanotube electron emitter formed on the cathode electrode;
a gate electrode arranged between the cathode electrode and the anode electrode and arranged corresponding to the carbon nanotube electron emitter;
a focusing lens arranged between the gate electrode and the anode electrode; and
a getter arranged under the cathode electrode,
wherein the carbon nanotube electron emitter includes:
a carbon nanotube film which is densified with a solvent or carbonized by adding a carbon-based material; and
at least two metal members arranged on respective sides of the carbon nanotube film and fixing the carbon nanotube film,
wherein the gate electrode includes:
a metal plate formed into one or more holes or a mesh; and
one or more layers of graphene arranged on the metal plate, and
the graphene is formed as a single layer, a double layer, or a multilayer, or includes at least one selected from them to overlap with each other, and
wherein the gate electrode is formed including the graphene between upper and lower metal plates.
2. The X-ray source of claim 1 ,
wherein the solvent includes at least any one of isopropyl alcohol (IPA), ethanol, and nitric acid, and
the densified carbon nanotube film is dipped in the solvent and then dried, and in the densified carbon nanotube film, a space between carbon nanotubes is reduced by removing sodium dodecyl sulfate (SDS) remaining between the carbon nanotubes, and, thus, bonding strength between the carbon nanotubes is increased.
3. The X-ray source of claim 1 ,
wherein the carbon-based material includes at least one of graphite adhesive, carbon paste, and carbon nanotube (CNT) paste, and
the carbonized carbon nanotube film is prepared by performing heat treatment to the carbon-based material-added carbon nanotube film at a high temperature in a vacuum for a predetermined period of time, and in the carbonized carbon nanotube film, the added carbon-based material fills a space between carbon nanotubes, and, thus, bonding strength between the carbon nanotubes is increased.
4. The X-ray source of claim 1 ,
wherein in the carbon nanotube electron emitter,
multiple carbon nanotube films are arranged in an array type and the metal member is arranged between the carbon nanotube films.
5. An X-ray source using a gate electrode in which graphene is arranged, comprising:
a cathode electrode;
an anode electrode arranged above the cathode electrode to face the cathode electrode;
a carbon nanotube electron emitter formed on the cathode electrode;
a gate electrode arranged between the cathode electrode and the anode electrode and arranged corresponding to the carbon nanotube electron emitter;
a focusing lens arranged between the gate electrode and the anode electrode; and
a getter arranged under the cathode electrode,
wherein graphene is arranged in the gate electrode,
wherein the gate electrode includes:
a metal plate formed into one or more holes or a mesh; and
one or more layers of graphene arranged on the metal plate, and
the graphene is formed as a single layer, a double layer, or a multilayer, or includes at least one selected from them to overlap with each other, and
wherein the gate electrode is formed including the graphene between upper and lower metal plates.
6. The X-ray source of claim 5 ,
wherein the carbon nanotube electron emitter includes:
a carbon nanotube film which is densified with a solvent or carbonized by adding a carbon-based material; and
at least two metal members arranged on respective sides of the carbon nanotube film and fixing the carbon nanotube film.