Integrated circuit sensor package and method of manufacturing the same
An integrated circuit sensor package ( 1 ) with a package body ( 5 ) moulded at least in part around a substrate ( 2 ) and a plurality of lead frame members ( 6, 8 ). The substrate ( 2 ) has a first sensor element ( 3 ) on a first side surface ( 2 a ). The package body ( 5 ) comprises an aperture ( 5 a ) exposing a sensitive surface ( 4 ) of the first sensor element ( 3 ). Electrically conductive glue connections ( 7, 9 ) are provided between contact terminals of the first sensor element ( 3 ) and one or more of the plurality of lead frame members ( 6, 8 ).
1. An integrated circuit sensor package comprising
a package body moulded at least in part around a substrate and a plurality of lead frame members,
wherein the substrate comprises a first sensor element on a first side surface of the substrate and wherein the package body comprises an aperture exposing a sensitive surface of the first sensor element, wherein the aperture is arranged to allow direct contact between a sensing area of the sensitive surface and an environment; and
wherein the integrated circuit sensor package further comprises an electrically conductive glue connection between contact terminals of the first sensor element and one or more of the plurality of lead frame members,
wherein the electrically conductive glue connection is provided on the first side surface of the substrate, and wherein the substrate further comprises a second side surface opposite the first side surface.
2. The integrated circuit sensor package according to claim 1 , wherein the the first side surface of the substrate is an upper side.
3. The integrated circuit sensor package according to claim 1 , wherein the first sensor element is a gas sensor.
4. The integrated circuit sensor package according to claim 3 , wherein the gas sensor is a hydrogen gas sensor comprising a titanium oxide layer, wherein the electrically conductive glue connection is provided between terminal parts of the first sensor element and the one or more of the plurality of lead frame members.
5. The integrated circuit sensor package according to claim 1 , wherein the second side surface is provided with one or more electronic components.
6. The integrated circuit sensor package according to claim 5 , wherein the one or more electronic components are electrically connected by means of bonding wires to further ones of the plurality of lead frame members.
7. The integrated circuit sensor package according to claim 5 , wherein the one or more electronic components comprises a second sensor element.
8. The integrated circuit sensor package according to claim 5 , wherein the one or more electronic components comprises an integrated circuit.
9. The integrated circuit sensor package according to claim 5 , wherein the one or more electronic components comprises a thin film heater element on the second side surface.
10. A method of manufacturing an integrated circuit sensor package, the method comprising:
providing a lead frame of electrically conductive material, the lead frame comprising a plurality of lead frame members;
applying electrically conductive glue to one or more of the plurality of lead frame members;
positioning contact terminal parts of the first sensor element on the first side surface of the substrate against the electrically conductive glue on the one or more of the plurality of lead frame members, wherein the electrically conductive glue is provided on the first side surface of the substrate, and wherein the substrate further comprises a second side surface opposite the first side surface; and
moulding the package body at least in part around the substrate and the plurality of lead frame members and providing an aperture in the package body exposing at least in part a sensitive surface of the first sensor element, wherein the aperture is arranged to allow direct contact between a sensing area of the sensitive surface and an environment.
11. The method od according to claim 10 , further comprising trimming a portion of the lead frame that extends outside the package body to provide the sensor package with a plurality of external electrical contacts.
12. The method according to claim 10 , further comprising providing one or more electronic components on the second side surface of the substrate;
wire bonding the one or more electronic components to further ones of the plurality of lead frame members.
13. The integrated circuit sensor package according to claim 7 , wherein the second sensor element is a temperature sensor.
14. The integrated circuit sensor package according to claim 1 , wherein an environment is an environment outside the integrated circuit sensor package.