Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device
Assuming that one or more defects satisfying relations of Formula 1 and Formula 2 are first defects, and one or more defects satisfying relations of Formula 3 and Formula 2 are second defects, where an off angle is θ°, the thickness of a silicon carbide layer in a direction perpendicular to a second main surface is W μm, the width of each of the one or more defects in a direction obtained by projecting a direction parallel to an off direction onto the second main surface is L μm, and the width of each of the one or more defects in a direction perpendicular to the off direction and parallel to the second main surface is Y μm, a value obtained by dividing the number of the second defects by the sum of the number of the first defects and the number of the second defects is greater than 0.5.
1. A silicon carbide epitaxial substrate comprising:
a silicon carbide single-crystal substrate having a first main surface; and
a silicon carbide layer on the first main surface,
the silicon carbide layer including a surface in contact with the silicon carbide single-crystal substrate, and a second main surface opposite to the surface,
the second main surface being a plane inclined at an off angle in an off direction relative to a {0001} plane,
the second main surface having one or more defects, and
assuming that the one or more defects satisfying relations of Formula 1 and Formula 2 are first defects, and the one or more defects satisfying relations of Formula 3 and Formula 2 are second defects, where the off angle is θ°, a thickness of the silicon carbide layer in a direction perpendicular to the second main surface is W μm, a width of each of the one or more defects in a direction parallel to a direction obtained by projecting the off direction onto the second main surface is L μm, and a width of each of the one or more defects in a direction perpendicular to the off direction and parallel to the second main surface is Y μm, then a value obtained by dividing a number of the second defects by a sum of a number of the first defects and the number of the second defects being greater than 0.5:
L
Y
≦
1
Formula
1
0.8
×
W
tan
θ
<
L
<
1.2
×
W
tan
θ
Formula
2
1
<
L
Y
.
Formula
3
2. The silicon carbide epitaxial substrate according to claim 1 , wherein
the thickness of the silicon carbide layer is 5 μm or more and 100 μm or less.
3. The silicon carbide epitaxial substrate according to claim 1 , wherein
the off angle is greater than 0° and smaller than or equal to 8°.
4. The silicon carbide epitaxial substrate according to claim 1 , wherein
the value obtained by dividing the number of the second defects by the sum of the number of the first defects and the number of the second defects is greater than 0.6.
5. The silicon carbide epitaxial substrate according to claim 1 , wherein
the value obtained by dividing the number of the second defects by the sum of the number of the first defects and the number of the second defects is greater than 0.7.
6. The silicon carbide epitaxial substrate according to claim 1 , wherein
the value obtained by dividing the number of the second defects by the sum of the number of the first defects and the number of the second defects is greater than 0.8.
7. The silicon carbide epitaxial substrate according to claim 1 , wherein
the value obtained by dividing the number of the second defects by the sum of the number of the first defects and the number of the second defects is greater than 0.9.
8. A method for manufacturing a silicon carbide semiconductor device, the method comprising:
preparing the silicon carbide epitaxial substrate according to claim 1 ; and
processing the silicon carbide epitaxial substrate.
9. A silicon carbide epitaxial substrate comprising:
a silicon carbide single-crystal substrate having a first main surface; and
a silicon carbide layer on the first main surface,
the silicon carbide layer including a surface in contact with the silicon carbide single-crystal substrate, and a second main surface opposite to the surface,
the second main surface being a plane inclined at an off angle in an off direction relative to a {0001} plane,
a thickness of the silicon carbide layer is 5 μm or more and 100 μm or less,
the off angle is greater than 0° and smaller than or equal to 8°, the second main surface having one or more defects, and
assuming that the one or more defects satisfying relations of Formula 1 and Formula 2 are first defects, and the one or more defects satisfying relations of Formula 3 and Formula 2 are second defects, where the off angle is θ°, the thickness of the silicon carbide layer in a direction perpendicular to the second main surface is W μm, a width of each of the one or more defects in a direction parallel to a direction obtained by projecting the off direction onto the second main surface is L μm, and a width of each of the one or more defects in a direction perpendicular to the off direction and parallel to the second main surface is Y μm, then a value obtained by dividing a number of the second defects by a sum of a number of the first defects and the number of the second defects being greater than 0.8:
L
Y
≦
1
Formula
1
0.8
×
W
tan
θ
<
L
<
1.2
×
W
tan
θ
Formula
2
1
<
L
Y
.
Formula
3
10. A method for manufacturing a silicon carbide semiconductor device, the method comprising:
preparing the silicon carbide epitaxial substrate according to claim 2 ; and
processing the silicon carbide epitaxial substrate.
11. A method for manufacturing a silicon carbide semiconductor device, the method comprising:
preparing the silicon carbide epitaxial substrate according to claim 3 ; and
processing the silicon carbide epitaxial substrate.
12. A method for manufacturing a silicon carbide semiconductor device, the method comprising:
preparing the silicon carbide epitaxial substrate according to claim 4 ; and
processing the silicon carbide epitaxial substrate.
13. A method for manufacturing a silicon carbide semiconductor device, the method comprising:
preparing the silicon carbide epitaxial substrate according to claim 5 ; and
processing the silicon carbide epitaxial substrate.
14. A method for manufacturing a silicon carbide semiconductor device, the method comprising:
preparing the silicon carbide epitaxial substrate according to claim 6 ; and
processing the silicon carbide epitaxial substrate.
15. A method for manufacturing a silicon carbide semiconductor device, the method comprising:
preparing the silicon carbide epitaxial substrate according to claim 7 ; and
processing the silicon carbide epitaxial substrate.
16. A method for manufacturing a silicon carbide semiconductor device, the method comprising:
preparing the silicon carbide epitaxial substrate according to claim 9 ; and
processing the silicon carbide epitaxial substrate.