Method for forming pattern using antireflective coating composition including photoacid generator
An antireflective coating composition, including a polymer, a photoacid generator having a crosslinkable group, a compound capable of crosslinking the polymer and the photoacid generator, a thermal acid generator, and an organic solvent.
1. An antireflective coating composition, comprising:
a polymer, wherein the polymer comprises a cyanurate structural unit,
a photoacid generator comprising a crosslinkable group,
a compound capable of crosslinking the polymer and the photoacid generator,
a thermal acid generator, and
an organic solvent,
wherein the photoacid generator is an onium salt having G + A − formula wherein G + has Formula 1 and A − is a non-polymerizable organic anion:
wherein, in Formula 1,
Y is I or S,
each R 1 is independently a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted polycyclic or monocyclic C 3-30 cycloalkyl group, a substituted or unsubstituted polycyclic or monocyclic C 6-30 aryl group, wherein when Y is S, one of the R 1 is optionally attached to one adjacent R 1 by a single bond or a linking group,
provided that at least one R 1 is a monocyclic C 6-30 aryl group bearing a hydroxyl group attached thereto through a single bond or an unsubstituted or substituted C 1 -C 30 linking group optionally including at least one heteroatom selected from O, S, N, and P, and
z is 2 or 3, wherein when Y is I, z is 2, or when Y is S, z is 3.
2. The antireflective coating composition of claim 1 , wherein G + is represented by Formula 2:
wherein, in Formula 2,
each R a is independently hydrogen, halogen, a cyano group, a nitro group, an amino group, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 3 -C 30 cycloalkyl group, a substituted or unsubstituted C 3 -C 30 cycloalkenyl group, a substituted or unsubstituted C 6 -C 30 aryl group, a substituted or unsubstituted C 6 -C 30 aryloxy group, a substituted or unsubstituted C 6 -C 30 arylthio group, a substituted or unsubstituted C 7 -C 30 arylalkyl group,
each R b is a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted polycyclic or monocyclic C 3-30 cycloalkyl group, a substituted or unsubstituted polycyclic or monocyclic C 6-30 aryl group, wherein groups R b are optionally attached to each other by a single bond or a linking group,
each L is a single bond, a substituted or unsubstituted C 1 -C 30 alkylene group, a substituted or unsubstituted C 2 -C 30 alkenylene group, a substituted or unsubstituted C 2 -C 30 alkynylene group, a substituted or unsubstituted C 3 -C 30 cycloalkenylene group, a substituted or unsubstituted C 3 -C 30 cycloalkynylene group, a substituted or unsubstituted C 6 -C 30 arylene group, or a substituted or unsubstituted C 6 -C 30 heteroarylene group, in each of which groups at least one non-adjacent —CH 2 — group is optionally replaced by —SO 2 —, —C(═O)—, —O—, —S—, —SO—, —C(═O)O—, —OC(═O)—, —C(═O)NR—, or —NRC(═O)—, wherein R is hydrogen or a C 1 -C 10 alkyl group, or a combination thereof;
n1 is an integer from 1 to 5, and
n2 is an integer from 0 to 4,
provided that the sum of n1 and n2 does not exceed 5.
3. The antireflective coating composition of claim 1 , wherein G + is represented by Formula 3:
wherein, in Formula 3,
each R a is hydrogen, a halogen, a cyano group, a nitro group, an amino group, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 3 -C 30 cycloalkyl group, a substituted or unsubstituted C 3 -C 30 cycloalkenyl group, a substituted or unsubstituted C 6 -C 30 aryl group, a substituted or unsubstituted C 6 -C 30 aryloxy group, a substituted or unsubstituted C 6 -C 30 arylthio group, a substituted or unsubstituted C 7 -C 30 arylalkyl group, wherein groups R a are optionally attached to each other by a single bond or a linking group,
R b is independently a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted polycyclic or monocyclic C 3-30 cycloalkyl group, a substituted or unsubstituted polycyclic or monocyclic C 6-30 aryl group,
each L is a single bond, a substituted or unsubstituted C 1 -C 30 alkylene group, a substituted or unsubstituted C 2 -C 30 alkenylene group, a substituted or unsubstituted C 2 -C 30 alkynylene group, a substituted or unsubstituted C 3 -C 30 cycloalkenylene group, a substituted or unsubstituted C 3 -C 30 cycloalkynylene group, a substituted or unsubstituted C 6 -C 30 arylene group, or a substituted or unsubstituted C 6 -C 30 heteroarylene group, in each of which groups at least one non-adjacent —CH 2 — group is optionally replaced by —SO 2 —, —C(═O)—, —O—, —S—, —SO—, —C(═O)O—, —OC(═O)—, —C(═O)NR—, or —NRC(═O)—, wherein R is hydrogen or a C 1 -C 10 alkyl group, or a combination thereof;
each n1 is an integer from 1 to 5,
each n2 is an integer from 0 to 4, and
provided that each sum of n1 and n2 does not exceed 5.
4. The antireflective coating composition of claim 1 , wherein G + is represented by Formula 4:
wherein, in Formula 4,
each R a is hydrogen, a halogen, a cyano group, a nitro group, an amino group, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 3 -C 30 cycloalkyl group, a substituted or unsubstituted C 3 -C 30 cycloalkenyl group, a substituted or unsubstituted C 6 -C 30 aryl group, a substituted or unsubstituted C 6 -C 30 aryloxy group, a substituted or unsubstituted C 6 -C 30 arylthio group, a substituted or unsubstituted C 7 -C 30 arylalkyl group,
each L is a single bond, a substituted or unsubstituted C 1 -C 30 alkylene group, a substituted or unsubstituted C 2 -C 30 alkenylene group, a substituted or unsubstituted C 2 -C 30 alkynylene group, a substituted or unsubstituted C 3 -C 30 cycloalkenylene group, a substituted or unsubstituted C 3 -C 30 cycloalkynylene group, a substituted or unsubstituted C 6 -C 30 arylene group, or a substituted or unsubstituted C 6 -C 30 heteroarylene group, in each of which groups at least one non-adjacent —CH 2 — group is optionally replaced by —SO 2 —, —C(═O)—, —O—, —S—, —SO—, —C(═O)O—, —OC(═O)—, —C(═O)NR—, or —NRC(═O)—, wherein R is hydrogen or a C 1 -C 10 alkyl group, or a combination thereof;
each n1 is an integer from 1 to 5,
each n2 is an integer from 0 to 4, and
provided that each sum of n1 and n2 does not exceed 5.
5. The antireflective coating composition of claim 1 , wherein the cyanurate structural unit is derived from a compound represented by Formula 5:
wherein, in Formula 5,
R 2 , R 3 , R 4 , and each X are independently hydrogen, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 2-30 alkanoyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 1 -C 30 alkylthio group, a substituted or unsubstituted C 1 -C 30 alkylsulfinyl group, a substituted or unsubstituted C 1 -C 30 alkylsulfonyl group, —COOH, a substituted or unsubstituted C 2 -C 30 alkoxycarbonyl group, a substituted or unsubstituted C 7 -C 30 alkylaryl group, a substituted or unsubstituted C 6 -C 30 aryl, a substituted or unsubstituted C 3 -C 30 heteroalicyclic, or a substituted or unsubstituted C 3 -C 30 heteroaromatic group, and
each m1 is independently an integer of 1 to 10.
6. The antireflective coating composition of claim 1 , wherein the cyanurate structural unit is derived from a compound represented by Formula 6:
wherein, in Formula 6,
each X′ is independently hydrogen, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 2-30 alkanoyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 1 -C 30 alkylthio group, a substituted or unsubstituted C 1 -C 30 alkylsulfinyl group, a substituted or unsubstituted C 1 -C 30 alkylsulfonyl group, —COOH, a substituted or unsubstituted C 2 -C 30 alkoxycarbonyl group, a substituted or unsubstituted C 7 -C 30 alkylaryl group, a substituted or unsubstituted C 6 -C 30 aryl, a substituted or unsubstituted C 3 -C 30 heteroalicyclic, or a substituted or unsubstituted C 3 -C 30 heteroaromatic group, and
each m2 is independently an integer of 1 to 10.
7. The antireflective coating composition of claim 1 , wherein the compound capable of crosslinking the photoacid generator and the polymer is represented by Formula 7:
wherein, in Formula 7,
each X′, each X″, each R 5 , R 6 , and R 7 are independently hydrogen, a halogen, a hydroxyl group, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 3 -C 30 cycloalkyl group, a substituted or unsubstituted C 7 -C 30 arylalkyl group, and
each m2 and each m3 are independently an integer of 2 to 10.
8. The antireflective coating composition of claim 1 , wherein the thermal acid generator comprises a benzenesulfonic acid generator represented by Formula 9:
wherein,
each R 1 is independently hydroxyl, cyano, halogen, amino, optionally substituted alkyl, optionally substituted heteroalkyl, optionally substituted carbocyclic, or optionally substituted heteroaryl; and
n is an integer from 0 to 5; and
M + is a cation.
9. The antireflective coating composition of claim 1 , wherein the thermal acid generator comprises a pyridinium acid generator represented by Formula 10:
wherein,
R 1 is optionally substituted alkyl, optionally substituted heteroalkyl, optionally substituted carbocyclic, or optionally substituted heteroaryl;
each R 2 is independently hydroxyl, cyano, halogen, amino, optionally substituted alkyl, optionally substituted heteroalkyl, optionally substituted carbocyclic, or optionally substituted heteroaryl; and
n is an integer from 0 to 5.
10. The antireflective coating composition of claim 1 , wherein A − is a sulfonate anion.
11. The antireflective coating composition of claim 1 , wherein the cyanurate structural unit comprises
a first nitrogen ring atom substituted with a first carboxy group of formula—COOR a , wherein R a is hydrogen or C 1-12 alkyl, and
a second nitrogen ring atom substituted with a second carboxy group of formula—COOR b , wherein R b is hydrogen or C 1-12 alkyl,
provided that the first carboxy group is different from the second carboxy group.
12. A coated substrate, comprising (a) a substrate; and (b) a layer of a antireflective coating composition disposed over the substrate,
wherein the antireflective coating composition comprises:
a polymer, wherein the polymer comprises a cyanurate structural unit,
a photoacid generator comprising a crosslinkable group,
a compound capable of crosslinking the polymer and the photoacid generator,
a thermal acid generator, and
an organic solvent,
wherein the photoacid generator is an onium salt having formula G + A − wherein G + has Formula 1 and A − is a non-polymerizable organic anion:
wherein, in Formula 1,
Y is I or S,
each R 1 is independently a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted polycyclic or monocyclic C 3-30 cycloalkyl group, a substituted or unsubstituted polycyclic or monocyclic C 6-30 aryl group, wherein when Y is S, one of the R 1 is optionally attached to one adjacent R 1 by a single bond or a linking group,
provided that at least one R 1 is a monocyclic C 6-30 aryl group bearing a hydroxyl group attached thereto through a single bond or an unsubstituted or substituted C 1 -C 30 linking group optionally including at least one heteroatom selected from O, S, N, and P, and
z is 2 or 3, wherein when Y is I, z is 2, or when Y is S, z is 3.
13. The coated substrate of claim 12 , wherein G + is represented by Formula 2:
wherein, in Formula 2,
each R a is independently hydrogen, a halogen, a cyano group, a nitro group, an amino group, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 3 -C 30 cycloalkyl group, a substituted or unsubstituted C 3 -C 30 cycloalkenyl group, a substituted or unsubstituted C 6 -C 30 aryl group, a substituted or unsubstituted C 6 -C 30 aryloxy group, a substituted or unsubstituted C 6 -C 30 arylthio group, a substituted or unsubstituted C 7 -C 30 arylalkyl group,
each R b is a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted polycyclic or monocyclic C 3-30 cycloalkyl group, a substituted or unsubstituted polycyclic or monocyclic C 6-30 aryl group, wherein groups R b are optionally attached to each other by a single bond or a linking group,
each L is a single bond, a substituted or unsubstituted C 1 -C 30 alkylene group, a substituted or unsubstituted C 2 -C 30 alkenylene group, a substituted or unsubstituted C 2 -C 30 alkynylene group, a substituted or unsubstituted C 3 -C 30 cycloalkenylene group, a substituted or unsubstituted C 3 -C 30 cycloalkynylene group, a substituted or unsubstituted C 6 -C 30 arylene group, or a substituted or unsubstituted C 6 -C 30 heteroarylene group, in each of which groups at least one non-adjacent —CH 2 — group is optionally replaced by —SO 2 —, —C(═O)—, —O—, —S—, —SO—, —C(═O)O—, —OC(═O)—, —C(═O)NR—, or —NRC(═O)—, wherein R is hydrogen or a C 1 -C 10 alkyl group, or a combination thereof;
n1 is an integer from 1 to 5, and
n2 is an integer from 0 to 4,
provided that the sum of n1 and n2 does not exceed 5.
14. The coated substrate of claim 12 , wherein G + is represented by Formula 3:
wherein, in Formula 3,
each R a is hydrogen, a halogen, a cyano group, a nitro group, an amino group, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 3 -C 30 cycloalkyl group, a substituted or unsubstituted C 3 -C 30 cycloalkenyl group, a substituted or unsubstituted C 6 -C 30 aryl group, a substituted or unsubstituted C 6 -C 30 aryloxy group, a substituted or unsubstituted C 6 -C 30 arylthio group, a substituted or unsubstituted C 7 -C 30 arylalkyl group, wherein groups R a are optionally attached to each other by a single bond or a linking group,
R b is independently a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted polycyclic or monocyclic C 3-30 cycloalkyl group, a substituted or unsubstituted polycyclic or monocyclic C 6-30 aryl group,
each L is a single bond, a substituted or unsubstituted C 1 -C 30 alkylene group, a substituted or unsubstituted C 2 -C 30 alkenylene group, a substituted or unsubstituted C 2 -C 30 alkynylene group, a substituted or unsubstituted C 3 -C 30 cycloalkenylene group, a substituted or unsubstituted C 3 -C 30 cycloalkynylene group, a substituted or unsubstituted C 6 -C 30 arylene group, or a substituted or unsubstituted C 6 -C 30 heteroarylene group, in each of which groups at least one non-adjacent —CH 2 — group is optionally replaced by —SO 2 -, —C(═O)—, —O—, —S—, —SO—, —C(═O)O—, —OC(═O)—, —C(═O)NR—, or —NRC(═O)—, wherein R is hydrogen or a C 1 -C 10 alkyl group, or a combination thereof;
each n1 is an integer from 1 to 5,
each n2 is an integer from 0 to 4, and
provided that each sum of n1 and n2 does not exceed 5.
15. The coated substrate of claim 12 , wherein G + is represented by Formula 4:
wherein, in Formula 4,
each R a is hydrogen, a halogen, a cyano group, a nitro group, an amino group, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 3 -C 30 cycloalkyl group, a substituted or unsubstituted C 3 -C 30 cycloalkenyl group, a substituted or unsubstituted C 6 -C 30 aryl group, a substituted or unsubstituted C 6 -C 30 aryloxy group, a substituted or unsubstituted C 6 -C 30 arylthio group, a substituted or unsubstituted C 7 -C 30 arylalkyl group,
each L is a single bond, a substituted or unsubstituted C 1 -C 30 alkylene group, a substituted or unsubstituted C 2 -C 30 alkenylene group, a substituted or unsubstituted C 2 -C 30 alkynylene group, a substituted or unsubstituted C 3 -C 30 cycloalkenylene group, a substituted or unsubstituted C 3 -C 30 cycloalkynylene group, a substituted or unsubstituted C 6 -C 30 arylene group, or a substituted or unsubstituted C 6 -C 30 heteroarylene group, in each of which groups at least one non-adjacent —CH 2 — group is optionally replaced by —SO 2 —, —C(═O)—, —O—, —S—, —SO—, —C(═O)O—, —OC(═O)—, —C(═O)NR—, or —NRC(═O)—, wherein R is hydrogen or a C 1 -C 10 alkyl group, or a combination thereof;
each n1 is an integer from 1 to 5,
each n2 is an integer from 0 to 4, and
provided that each sum of n1 and n2 does not exceed 5.
16. The coated substrate of claim 12 , wherein the cyanurate structural unit is derived from a compound represented by Formula 5:
wherein, in Formula 5,
R 2 , R 3 , R 4 , and each X are independently hydrogen, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 2-30 alkanoyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 1 -C 30 alkylthio group, a substituted or unsubstituted C 1 -C 30 alkylsulfinyl group, a substituted or unsubstituted C 1 -C 30 alkylsulfonyl group, —COOH, a substituted or unsubstituted C 2 -C 30 alkoxycarbonyl group, a substituted or unsubstituted C 7 -C 30 alkylaryl group, a substituted or unsubstituted C 6 -C 30 aryl, a substituted or unsubstituted C 3 -C 30 heteroalicyclic, or a substituted or unsubstituted C 3 -C 30 heteroaromatic group, and
each m1 is independently an integer of 1 to 10.
17. The coated substrate of claim 12 , wherein the cyanurate structural unit is derived from a compound represented by Formula 6:
wherein, in Formula 6,
each X′ is independently hydrogen, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 2-30 alkanoyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 1 -C 30 alkylthio group, a substituted or unsubstituted C 1 -C 30 alkylsulfinyl group, a substituted or unsubstituted C 1 -C 30 alkylsulfonyl group, —COOH, a substituted or unsubstituted C 2 -C 30 alkoxycarbonyl group, a substituted or unsubstituted C 7 -C 30 alkylaryl group, a substituted or unsubstituted C 6 -C 30 aryl, a substituted or unsubstituted C 3 -C 30 heteroalicyclic, or a substituted or unsubstituted C 3 -C 30 heteroaromatic group, and
each m2 is independently an integer of 1 to 10.
18. The coated substrate of claim 12 , wherein the compound capable of crosslinking the photoacid generator and the polymer is represented by Formula 7:
wherein, in Formula 7,
each X′, each X″, each R 5 , R 6 , and R 7 are independently hydrogen, a halogen, a hydroxyl group, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 3 -C 30 cycloalkyl group, a substituted or unsubstituted C 7 -C 30 arylalkyl group, and
each m2 and each m3 are independently an integer of 2 to 10.
19. The method of claim 10 , wherein the thermal acid generator comprises a benzenesulfonic acid generator represented by Formula 9:
wherein,
each R 1 is independently hydroxyl, cyano, halogen, amino, optionally substituted alkyl, optionally substituted heteroalkyl, optionally substituted carbocyclic, or optionally substituted heteroaryl; and
n is an integer from 0 to 5; and
M + is a cation.
20. The coated substrate of claim 12 , wherein the thermal acid generator comprises a benzenesulfonic acid generator represented by Formula 9:
wherein,
each R 1 is independently hydroxyl, cyano, halogen, amino, optionally substituted alkyl, optionally substituted heteroalkyl, optionally substituted carbocyclic, or optionally substituted heteroaryl; and
n is an integer from 0 to 5; and
M + is a cation.
21. The coated substrate of claim 12 , wherein the thermal acid generator comprises a pyridinium acid generator represented by Formula 10:
wherein,
R 1 is optionally substituted alkyl, optionally substituted heteroalkyl, optionally substituted carbocyclic, or optionally substituted heteroaryl;
each R 2 is independently hydroxyl, cyano, halogen, amino, optionally substituted alkyl, optionally substituted heteroalkyl, optionally substituted carbocyclic, or optionally substituted heteroaryl; and
n is an integer from 0 to 5.
22. The coated substrate of claim 12 , wherein the cyanurate structural unit comprises
a first nitrogen ring atom substituted with a first carboxy group of formula—COOR a , wherein R a is hydrogen or C 1-12 alkyl, and
a second nitrogen ring atom substituted with a second carboxy group of formula—COOR b , wherein R b is hydrogen or C 1-12 alkyl,
provided that the first carboxy group is different from the second carboxy group.
23. A method of forming a pattern, comprising: (a) applying a layer of the antireflective coating composition over a substrate; (b) curing the applied antireflective coating composition to form an antireflective layer; (c) forming a photoresist layer over the antireflective layer; and (d) patterning the photoresist layer and transferring the pattern from the patterned photoresist layer to the antireflective layer,
wherein the antireflective coating composition comprises:
a polymer, wherein the polymer comprises a cyanurate structural unit,
a photoacid generator comprising a crosslinkable group,
a compound capable of crosslinking the polymer and the photoacid generator,
a thermal acid generator, and
an organic solvent,
wherein the photoacid generator is an onium salt having formula G + A − wherein G + has Formula 1 and A − is a non-polymerizable organic anion:
wherein, in Formula 1,
Y is I or S,
each R 1 is independently a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted polycyclic or monocyclic C 3-30 cycloalkyl group, a substituted or unsubstituted polycyclic or monocyclic C 6-30 aryl group, wherein when Y is S, one of the R 1 is optionally attached to one adjacent R 1 by a single bond or a linking group,
provided that at least one R 1 is a monocyclic C 6-30 aryl group bearing a hydroxyl group attached thereto through a single bond or an unsubstituted or substituted C 1 -C 30 linking group optionally including at least one heteroatom selected from O, S, N, and P, and
z is 2 or 3, wherein when Y is I, z is 2, or when Y is S, z is 3.
24. The method of claim 23 , wherein the patterning the photoresist layer and transferring the pattern from the patterned photoresist layer to the antireflective layer comprises: (d)(1) exposing the photoresist layer and the antireflective layer to activating radiation, and (d)(2) developing the exposed photoresist layer and antireflective layer with an organic solvent developer.
25. The method of claim 23 , wherein G + is represented by Formula 2:
wherein, in Formula 2,
each R a is independently hydrogen, a halogen, a cyano group, a nitro group, an amino group, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 3 -C 30 cycloalkyl group, a substituted or unsubstituted C 3 -C 30 cycloalkenyl group, a substituted or unsubstituted C 6 -C 30 aryl group, a substituted or unsubstituted C 6 -C 30 aryloxy group, a substituted or unsubstituted C 6 -C 30 arylthio group, a substituted or unsubstituted C 7 -C 30 arylalkyl group,
each R b is a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted polycyclic or monocyclic C 3-30 cycloalkyl group, a substituted or unsubstituted polycyclic or monocyclic C 6-30 aryl group, wherein groups R b are optionally attached to each other by a single bond or a linking group,
each L is a single bond, a substituted or unsubstituted C 1 -C 30 alkylene group, a substituted or unsubstituted C 2 -C 30 alkenylene group, a substituted or unsubstituted C 2 -C 30 alkynylene group, a substituted or unsubstituted C 3 -C 30 cycloalkenylene group, a substituted or unsubstituted C 3 -C 30 cycloalkynylene group, a substituted or unsubstituted C 6 -C 30 arylene group, or a substituted or unsubstituted C 6 -C 30 heteroarylene group, in each of which groups at least one non-adjacent —CH 2 — group is optionally replaced by —SO 2 —, —C(═O)—, —O—, —S—, —SO—, —C(═O)O—, —OC(═O)—, —C(═O)NR—, or —NRC(═O)—, wherein R is hydrogen or a C 1 -C 10 alkyl group, or a combination thereof;
n1 is an integer from 1 to 5, and
n2 is an integer from 0 to 4,
provided that the sum of n1 and n2 does not exceed 5.
26. The method of claim 23 , wherein G + is represented by Formula 3:
wherein, in Formula 3,
each R a is hydrogen, a halogen, a cyano group, a nitro group, an amino group, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 3 -C 30 cycloalkyl group, a substituted or unsubstituted C 3 -C 30 cycloalkenyl group, a substituted or unsubstituted C 6 -C 30 aryl group, a substituted or unsubstituted C 6 -C 30 aryloxy group, a substituted or unsubstituted C 6 -C 30 arylthio group, a substituted or unsubstituted C 7 -C 30 arylalkyl group, wherein groups R a are optionally attached to each other by a single bond or a linking group,
R b is independently a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted polycyclic or monocyclic C 3-30 cycloalkyl group, a substituted or unsubstituted polycyclic or monocyclic C 6-30 aryl group,
each L is a single bond, a substituted or unsubstituted C 1 -C 30 alkylene group, a substituted or unsubstituted C 2 -C 30 alkenylene group, a substituted or unsubstituted C 2 -C 30 alkynylene group, a substituted or unsubstituted C 3 -C 30 cycloalkenylene group, a substituted or unsubstituted C 3 -C 30 cycloalkynylene group, a substituted or unsubstituted C 6 -C 30 arylene group, or a substituted or unsubstituted C 6 -C 30 heteroarylene group, in each of which groups at least one non-adjacent —CH 2 — group is optionally replaced by —SO 2 —, —C(═O)—, —O—, —S—, —SO—, —C(═O)O—, —OC(═O)—, —C(═O)NR—, or —NRC(═O)—, wherein R is hydrogen or a C 1 -C 10 alkyl group, or a combination thereof;
each n1 is an integer from 1 to 5,
each n2 is an integer from 0 to 4, and
provided that each sum of n1 and n2 does not exceed 5.
27. The method of claim 23 , wherein G + is represented by Formula 4:
wherein, in Formula 4,
each R a is hydrogen, a halogen, a cyano group, a nitro group, an amino group, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 3 -C 30 cycloalkyl group, a substituted or unsubstituted C 3 -C 30 cycloalkenyl group, a substituted or unsubstituted C 6 -C 30 aryl group, a substituted or unsubstituted C 6 -C 30 aryloxy group, a substituted or unsubstituted C 6 -C 30 arylthio group, a substituted or unsubstituted C 7 -C 30 arylalkyl group,
each L is a single bond, a substituted or unsubstituted C 1 -C 30 alkylene group, a substituted or unsubstituted C 2 -C 30 alkenylene group, a substituted or unsubstituted C 2 -C 30 alkynylene group, a substituted or unsubstituted C 3 -C 30 cycloalkenylene group, a substituted or unsubstituted C 3 -C 30 cycloalkynylene group, a substituted or unsubstituted C 6 -C 30 arylene group, or a substituted or unsubstituted C 6 -C 30 heteroarylene group, in each of which groups at least one non-adjacent —CH 2 — group is optionally replaced by —SO 2 —, —C(═O)—, —O—, —S—, —SO—, —C(═O)O—, —OC(═O)—, —C(═O)NR—, or —NRC(═O)—, wherein R is hydrogen or a C 1 -C 10 alkyl group, or a combination thereof;
each n1 is an integer from 1 to 5,
each n2 is an integer from 0 to 4, and
provided that each sum of n1 and n2 does not exceed 5.
28. The method of claim 23 , wherein the cyanurate structural unit is derived from a compound represented by Formula 5:
wherein, in Formula 5,
R 2 , R 3 , R 4 , and each X are independently hydrogen, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 2-30 alkanoyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 1 -C 30 alkylthio group, a substituted or unsubstituted C 1 -C 30 alkylsulfinyl group, a substituted or unsubstituted C 1 -C 30 alkylsulfonyl group, —COOH, a substituted or unsubstituted C 2 -C 30 alkoxycarbonyl group, a substituted or unsubstituted C 7 -C 30 alkylaryl group, a substituted or unsubstituted C 6 -C 30 aryl, a substituted or unsubstituted C 3 -C 30 heteroalicyclic, or a substituted or unsubstituted C 3 -C 30 heteroaromatic group, and each m1 is independently an integer of 1 to 10.
29. The method of claim 23 , wherein the thermal acid generator comprises a pyridinium acid generator represented by Formula 10:
wherein,
R 1 is optionally substituted alkyl, optionally substituted heteroalkyl, optionally substituted carbocyclic, or optionally substituted heteroaryl;
each R 2 is independently hydroxyl, cyano, halogen, amino, optionally substituted alkyl, optionally substituted heteroalkyl, optionally substituted carbocyclic, or optionally substituted heteroaryl; and
n is an integer from 0 to 5.
30. The method of claim 23 , wherein A − is a sulfonate anion.
31. The method of claim 23 , wherein the cyanurate structural unit is derived from a compound represented by Formula 6:
wherein, in Formula 6,
each X 1 is independently hydrogen, a substituted or unsubstituted C 1-30 alkyl group, a substituted or unsubstituted C 2-30 alkenyl group, a substituted or unsubstituted C 2-30 alkynyl group, a substituted or unsubstituted C 2-30 alkanoyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 1 -C 30 alkylthio group, a substituted or unsubstituted C 1 -C 30 alkylsulfonyl group, —COOH, a substituted or unsubstituted C 2 -C 30 alkoxycarbonyl group, a substituted or unsubstituted C 7 -C 30 alkylaryl group, a substituted or unsubstituted C 6 -C 30 aryl, a substituted or unsubstituted C 3 -C 30 heteroalicyclic, or a substituted or unsubstituted C 3 -C 30 heteroaromatic group, and each m2 is independently an integer of 1 to 10.
32. The method of claim 23 , wherein the cyanurate structural unit comprises
a first nitrogen ring atom substituted with a first carboxy group of formula—COOR a , wherein R a is hydrogen or C 1-12 alkyl, and
a second nitrogen ring atom substituted with a second carboxy group of formula—COOR b , wherein R b is hydrogen or C 1-12 alkyl,
provided that the first carboxy group is different from the second carboxy group.