Semiconductor memory structure having drain stressor, source stressor and buried gate and method of manufacturing the same
The present disclosure provides a semiconductor memory structure and a method for preparing the semiconductor memory structure. The semiconductor memory structure includes a substrate, a gate structure, a drain stressor and a source stressor. The gate structure is disposed in the substrate. Each of the source stressor and the drain stressor includes a strained part disposed in the substrate.
1. A method of manufacturing a semiconductor memory structure, comprising the steps of:
providing a substrate;
forming a gate trench in the substrate;
forming a gate structure in the gate trench;
forming a drain recess and a source recess in the substrate, wherein the gate trench is between the drain recess and the source recess, wherein the drain recess and the source recess respectively include bottoms exposing the substrate; and
forming a drain stressor and a source stressor in the drain recess and the source recess, respectively, wherein the drain stressor and the source stressor are deposited at the bottoms of the drain recess and the source recess to contact the substrate.
2. The method of manufacturing a semiconductor memory structure of claim 1 , wherein the step of forming the gate structure comprises the steps of:
forming a gate dielectric layer in the gate trench;
forming a gate electrode in the gate trench, on the gate dielectric layer; and
forming a gate seal on the gate electrode.
3. The method of manufacturing a semiconductor memory structure of claim 1 , wherein the step of forming a gate trench in the substrate comprises selective etching.
4. The method of manufacturing a semiconductor memory structure of claim 1 , wherein the step of forming a drain stressor and a source stressor comprises:
forming a first silicon-containing layer;
forming a second silicon-containing layer; and
forming a third silicon-containing layer.
5. The method of manufacturing a semiconductor memory structure of claim 4 , wherein the substrate comprises silicon germanium.
6. The method of manufacturing a semiconductor memory device of claim 1 , wherein the step of forming a drain recess and a source recess comprises selective etching.
7. The method of manufacturing a semiconductor memory structure of claim 1 , further comprising a step of forming a bit line contact on the drain stressor.
8. The method of manufacturing a semiconductor memory structure of claim 7 , further comprising a step of forming a bit line connected to the drain stressor via the bit line contact.
9. The method of manufacturing a semiconductor memory structure of claim 8 , further comprising a step of forming a storage node contact on the source stressor.
10. The method of manufacturing a semiconductor memory structure of claim 1 , further comprising a step of forming a storage capacitor connected to the source stressor via the storage node contact.
11. The method of manufacturing a semiconductor memory structure of claim 1 , further comprising a step of forming a shallow trench isolation in the substrate.