Methods for bonding substrates
Methods for bonding substrates used, for example, in substrate-level packaging, are provided herein. In some embodiments, a method for bonding substrates includes: performing electrochemical deposition (ECD) to deposit at least one material on each of a first substrate and a second substrate, performing chemical mechanical polishing (CMP) on the first substrate and the second substrate to form a bonding interface on each of the first substrate and the second substrate, positioning the first substrate on the second substrate so that the bonding interface on the first substrate aligns with the bonding interface on the second substrate, and bonding the first substrate to the second substrate using the bonding interface on the first substrate and the bonding interface on the second substrate.
1. A method for bonding substrates, comprising:
performing electrochemical deposition (ECD) to deposit at least one material on each of a first substrate and a second substrate;
performing chemical mechanical polishing (CMP) on the first substrate and the second substrate to form a bonding interface on each of the first substrate and the second substrate;
positioning the first substrate on the second substrate so that the bonding interface on the first substrate aligns with the bonding interface on the second substrate; and
bonding the first substrate to the second substrate using the bonding interface on the first substrate and the bonding interface on the second substrate, wherein bonding the first substrate to the second substrate is performed at a temperature not exceeding 250° C.
2. The method of claim 1 , wherein the at least one material is at least one of Sn, Ag, Pb, In, Bi, or Au.
3. The method of claim 2 , wherein at least one of the first substrate and the second substrate comprises at least one of Cu or Al, and at least one of Si, oxide, or a polymer, and
wherein the at least one material is deposited on the at least one of Cu or Al.
4. The method of claim 1 , wherein the at least one material is deposited on each of the first substrate and the second substrate to a thickness not exceeding 5 μm.
5. The method of claim 1 , wherein after CMP is performed, the bonding interface on the first substrate and the bonding interface on the second substrate each has a thickness not exceeding 100 nm.
6. The method of claim 1 , wherein bonding the first substrate to the second substrate is performed at atmospheric pressure.
7. The method of claim 1 further comprising:
performing physical vapor deposition (PVD) to deposit a first material on each of the first substrate and the second substrate,
wherein performing ECD to deposit the at least one material on each of the first substrate and the second substrate comprises performing ECD to deposit a second material on each of the first substrate and the second substrate, and
wherein performing CMP on the first substrate and the second substrate to form the bonding interface on each of the first substrate and the second substrate comprises performing on the first substrate and the second substrate to form a bonding interface of the second material on each of the first substrate and the second substrate.
8. The method of claim 7 , wherein the first material is one of Ti, Cu, and combinations thereof, and the second material is one of Sn, Ag, Pb, In, Bi, or Au.
9. The method of claim 8 , wherein at least one of the first substrate and the second substrate comprises at least one of Cu or Al, and at least one of Si, oxide, or a polymer, and
wherein the first material is deposited on the at least one of Cu or Al, and the second material is deposited on the first material.
10. The method of claim 7 , wherein the first material is deposited to a thickness not exceeding 1 μm, and
wherein the second material is deposited to a thickness not exceeding 5 μm.
11. The method of claim 7 , wherein after CMP is performed, the bonding interface and the first material on the first substrate have a combined thickness not exceeding 100 nm, and the bonding interface and the first material on the second substrate have a combined thickness not exceeding 100 nm.
12. The method of claim 7 , wherein bonding the first substrate to the second substrate is performed at atmospheric pressure.
13. The method of claim 7 , wherein bonding the first substrate to the second substrate is performed at a temperature not exceeding 250° C.
14. A nontransitory computer readable storage medium having stored thereon instructions that when executed by a processor perform a method for bonding substrates, the method comprising:
performing electrochemical deposition (ECD) to deposit at least one material on each of a first substrate and a second substrate;
performing chemical mechanical polishing (CMP) on the first substrate and the second substrate to form a bonding interface on each of the first substrate and the second substrate;
positioning the first substrate on the second substrate so that the bonding interface on the first substrate aligns with the bonding interface on the second substrate; and
bonding the first substrate to the second substrate using the bonding interface on the first substrate and the bonding interface on the second substrate,
wherein bonding the first substrate to the second substrate is performed at a temperature not exceeding 250° C.
15. The nontransitory computer readable storage medium of claim 14 , wherein the at least one material is at least one of Sn, Ag, Pb, In, Bi, or Au,
wherein at least one of the first substrate and the second substrate comprises at least one of Cu or Al, and at least one of Si, oxide, or a polymer,
wherein the at least one material is deposited on the at least one of Cu or Al, and
wherein the at least one material is deposited on each of the first substrate and the second substrate to a thickness not exceeding 5 μm.
16. The nontransitory computer readable storage medium of claim 14 , wherein after CMP is performed, the bonding interface on the first substrate and the bonding interface on the second substrate each has a thickness not exceeding 100 nm.
17. The nontransitory computer readable storage medium of claim 14 , wherein bonding the first substrate to the second substrate is performed at atmospheric pressure.
18. A method for bonding substrates, comprising:
performing electrochemical deposition (ECD) to deposit at least one material on each of a first substrate and a second substrate and form a bonding interface on each of the first substrate and the second substrate;
after performing ECD, performing chemical mechanical polishing (CMP) on the first substrate and the second substrate such that the formed bonding interface on each of the first substrate and the second substrate has a thickness not exceeding 100 nm;
positioning the first substrate on the second substrate so that the bonding interface on the first substrate aligns with the bonding interface on the second substrate; and
bonding the first substrate to the second substrate using the bonding interface on the first substrate and the bonding interface on the second substrate.