Solid state lighting devices with dielectric insulation and methods of manufacturing
Solid state lighting devices and associated methods of manufacturing are disclosed herein. In one embodiment, a solid state lighting device includes a first semiconductor material, a second semiconductor material spaced apart from the first semiconductor material, and an active region between the first and second semiconductor materials. The solid state lighting device also includes an indentation extending from the second semiconductor material toward the active region and the first semiconductor material and an insulating material in the indentation of the solid state lighting structure.
1. A method for forming a solid state lighting device, comprising:
forming a solid state lighting structure on a substrate material, the solid state lighting structure having:
a first semiconductor material remaining over the substrate material after formation of the solid state lighting device;
a second semiconductor material over and spaced apart from the first semiconductor material, wherein the second semiconductor material has a surface facing away from the active region;
an active region between the first and second semiconductor materials; and
an indentation having sidewalls extending at least partially through the second semiconductor material and at most partially into the first semiconductor material, wherein the sidewalls are surrounded by at least one of the second semiconductor material and the active region, wherein the indentation has the sidewalls extending from the surface of the second semiconductor material into the active region;
disposing a conductive material on the second semiconductor material; and
electrically insulating, via an insulating material, the conductive material from at least one of the active region and the first semiconductor material, wherein the conductive material includes (a) a first conductive portion over the second semiconductor material and (b) a second conductive portion between the sidewalls of the indentation and below an upper surface of the insulating material, wherein electrically insulating the conductive material includes:
depositing an insulating material on the solid state lighting structure, the insulating material including a first insulating portion on the surface of the second semiconductor material and a second insulating portion in the indentation; and
removing the first insulating portion of the insulating material from the surface of the second semiconductor material, the second insulating portion remaining in the indentation; and
wherein depositing the conductive material includes forming an electrical contact by depositing the conductive material on the surface of the second semiconductor material and the second insulating portion of the insulating material.
2. The method of claim 1 wherein:
the second semiconductor material has a surface facing away from the active region; and
the sidewalls extend from the surface of the second semiconductor material into the active region; and
electrically insulating the conductive material includes interposing the insulating material between the conductive material and the active region and between the conductive material and the first semiconductor material.
3. The method of claim 1 wherein:
electrically insulating the conductive material includes depositing the insulating material in the indentation prior to disposing the conductive material.
4. The method of claim 1 wherein:
electrically insulating the conductive material includes at least partially filling the indentation with the insulating material prior to disposing the conductive material.
5. The method of claim 1 wherein the indentation is a V-shaped indentation.
6. The method of claim 1 wherein the sidewalls of the indentation converge toward one another as they extend toward the first semiconductor material.
7. The method of claim 1 wherein electrically insulating the conductive material includes depositing the insulating material in the indentation and generally conforming to the sidewalls of the indentation.
8. The method of claim 1 wherein electrically insulating the conductive material includes at least partially filling the indentation with the insulating material.
9. A method for forming a solid state lighting device, comprising:
forming a solid state lighting structure on a substrate material, the solid state lighting structure having:
a first semiconductor material remaining over the substrate material after formation of the solid state lighting device;
a second semiconductor material over and spaced apart from the first semiconductor material, wherein the second semiconductor material has a surface facing away from the active region; and
an active region between the first and second semiconductor materials; and
an indentation having sidewalls extending at least partially through the second semiconductor material and at most partially into the first semiconductor material, wherein the sidewalls are surrounded by at least one of the second semiconductor material and the active region, wherein the indentation has the sidewalls extending from the surface of the second semiconductor material into the active region;
disposing a conductive material on the second semiconductor material;
electrically insulating, via an insulating material, the conductive material from at least one of the active region and the first semiconductor material, wherein the conductive material includes (a) a first conductive portion over the second semiconductor material and (b) a second conductive portion between the sidewalls of the indentation and below an upper surface of the insulating material, wherein electrically insulating the conductive material includes:
depositing the insulating material on the solid state lighting structure, the insulating material including a first insulating portion on the surface of the second semiconductor material and a second insulating portion in the indentation and generally conforming to the sidewalls of the indentation; and
removing the first insulating portion of the insulating material from the surface of the second semiconductor material, the second insulating portion remaining in the indentation; and
wherein depositing the conductive material includes forming an electrical contact by depositing the conductive material on the surface of the second semiconductor material and the second insulating portion of the insulating material.
10. A method of forming a solid state lighting device, comprising:
forming a solid state lighting structure on a substrate material, the solid state lighting structure having:
a first semiconductor material remaining over the substrate material after formation of the solid state lighting device;
a second semiconductor material over and spaced apart from the first semiconductor material, wherein the second semiconductor material has a surface facing away from the active region; and
an active region between the first and second semiconductor materials; and
an indentation having sidewalls extending at least partially through the second semiconductor material and at most partially into the first semiconductor material, wherein the sidewalls are surrounded by at least one of the second semiconductor material and the active region, wherein the indentation has the sidewalls extending from the surface of the second semiconductor material into the active region;
disposing a conductive material on the second semiconductor material;
electrically insulating, via an insulating material, the conductive material from at least one of the active region and the first semiconductor material, wherein the conductive material includes (a) a first conductive portion over the second semiconductor material and (b) a second conductive portion between the sidewalls of the indentation and below an upper surface of the insulating material, wherein electrically insulating the conductive material includes:
depositing the insulating material on the solid state lighting structure, the insulating material including a first insulating portion on the surface of the second semiconductor material and a second insulating portion in the indentation; and
removing the first insulating portion of the insulating material from the surface of the second semiconductor material, the second insulating portion remaining in the indentation; and
wherein depositing the conductive material includes forming an electrical contact by depositing the conductive material on the surface of the second semiconductor material and the second insulating portion of the insulating material.
11. A method for forming a solid state lighting device, comprising:
forming a solid state lighting structure on a substrate material, the solid state lighting structure having:
a first semiconductor material;
a second semiconductor material spaced apart from the first semiconductor material;
an active region between the first and second semiconductor materials; and
an indentation having sidewalls extending at least partially through the second semiconductor material and the first semiconductor material, wherein the sidewalls are surrounded by at least one of the second semiconductor material and the active region;
disposing a conductive material on the second semiconductor material; and
electrically insulating, via an insulating material, the conductive material from at least one of the active region and the first semiconductor material, wherein the conductive material includes (a) a first conductive portion over the second semiconductor material and (b) a second conductive portion between the sidewalls of the indentation and below an upper surface of the insulating material;
wherein:
the active region has a surface facing away from the first semiconductor material; and
the indentation has the sidewalls extending from the surface of the active region into the first semiconductor material; and
forming a solid state lighting structure includes:
depositing the insulating material on the solid state lighting structure, the insulating material including a first insulating portion on the surface of the active region and a second insulating portion in the indentation;
removing the first insulating portion of the insulating material from the surface of the active region, the second insulating portion remaining in the indentation; and
subsequently, forming the second semiconductor material on the active region and the second insulating portion of the insulating material.
12. A method for forming a solid state lighting device, comprising:
forming a solid state lighting structure on a substrate material, the solid state lighting structure having:
a first semiconductor material;
a second semiconductor material spaced apart from the first semiconductor material;
an active region between the first and second semiconductor materials; and
an indentation having sidewalls extending at least partially through the second semiconductor material and the first semiconductor material, wherein the sidewalls are surrounded by at least one of the second semiconductor material and the active region;
disposing a conductive material on the second semiconductor material, wherein the conductive material includes (1) a first conductive portion over the second semiconductor material and (2) a second conductive portion between the sidewalls of the indentation; and
electrically insulating, via an insulating material, the conductive material from at least one of the active region and the first semiconductor material, wherein
the second conductive portion is below an upper surface of the insulating material, and
the insulating material includes a first insulating portion on a surface of the active region and a second insulating portion in the indentation; and
removing the first insulating portion of the insulating material from the surface of the active region, the second insulating portion remaining in the indentation, wherein
the second semiconductor material is subsequently formed on the active region and the second insulating portion of the insulating material.