Laser bonding method
A laser bonding method includes forming a bonding part including an adhesive layer and a conductive particle disposed within the adhesive layer on a substrate; aligning a bonding target by disposing the bonding target on a surface of the bonding part opposite the substrate; disposing a pressing part on a surface of the bonding target that is opposite to the bonding part and pressing the bonding target onto the bonding part through the pressing part; heating the bonding target by irradiating at least the pressing part with a laser and conducting heat from the pressing part to the bonding target and from the bonding target to the bonding part; and bonding together the bonding part and the bonding target by the heat conducted from the bonding target to the bonding part so that the conductive particle electrically connects the substrate and the bonding target. The pressing part may be removed.
1. A laser bonding method, comprising:
forming a bonding part including an adhesive layer and a conductive particle disposed within the adhesive layer on a substrate;
aligning a bonding target by disposing the bonding target on a surface of the bonding part opposite the substrate;
disposing a pressing part on a surface of the bonding target that is opposite to the bonding part and pressing the bonding target onto the bonding part through the pressing part;
heating the bonding target by irradiating at least the pressing part with a laser and conducting heat from the pressing part to the bonding target and from the bonding target to the bonding part; and
bonding together the bonding part and the bonding target by the heat conducted from the bonding target to the bonding part so that the conductive particle electrically connects the substrate and the bonding target.
2. The method of claim 1 , wherein a pad is disposed on the substrate and a pad is disposed on the bonding target in alignment with one another, and
wherein the bonding together of the bonding target to the bonding part comprises:
bonding an upper part of the conductive particle disposed within the adhesive laver to the bonding target pad; and
bonding a lower part of the conductive particle disposed within the adhesive laver to the substrate pad.
3. The method of claim 2 , wherein the conductive particle is provided in plurality.
4. The method of claim 2 , wherein the bonding together of the upper part of the conductive particle to the bonding target pad comprises forming an upper intermetallic compound by the upper part of the conductive particle and the bonding target pad, and
wherein the bonding together of the lower part of the conductive particle to the bonding target pad comprises forming a lower intermetallic compound by the lower part of the conductive particle and the bonding target pad.
5. The method of claim 1 , further comprising removing the pressing part after bonding.
6. The method of claim 1 , wherein the pressing part comprises quartz.
7. The method of claim 2 , wherein the bonding part further comprises a spacer provided within the adhesive layer.
8. The method of claim 1 , wherein the bonding part further comprises a reducing agent, and
wherein the bonding together further comprises removing an oxide film from the conductive particle, a bonding target pad disposed on the bonding target, and a substrate pad disposed on the substrate, by contact thereof with the reducing agent.
9. The method of claim 1 , wherein the conductive particle comprises a solder.
10. A laser bonding method, comprising:
forming a bonding part including an adhesive layer and a spacer both disposed within the adhesive layer on a substrate;
aligning a bonding target by disposing the bonding target on a surface of the bonding part opposite the substrate;
disposing a pressing part on a surface of the bonding target that is opposite to the bonding part and pressing the bonding target onto the bonding part through the pressing part;
heating the bonding target by irradiating at least the pressing part with a laser and conducting heat from the pressing part to the bonding target and from the bonding target to the bonding part; and
bonding together the bonding part and the bonding target by the heat conducted from the bonding target to the bonding part.
11. The method of claim 10 , wherein a pad is disposed on the substrate and a pad is disposed on the bonding target in alignment with one another, wherein the spacer is disposed between the pad of the bonding target and the pad of the substrate to maintain a distance therebetween.
12. The method of claim 10 , wherein the spacer comprises a polymer, a ceramic, or a metal covered with an oxide film.
13. The method of claim 10 , wherein the bonding part further comprises a conductive particle provided in the adhesive layer.
14. The method of claim 13 , wherein a pad is disposed on the substrate and a pad is disposed on the bonding target, and
wherein the bonding of the bonding target to the bonding part comprises:
bonding an upper part of the conductive particle to the pad of the bonding target; and
bonding a lower part of the conductive particle to the pad of the substrate.
15. The method of claim 14 , wherein the bonding together of the upper part of the conductive particle to the pad of the bonding target comprises forming an upper intermetallic compound by the upper part of the conductive particle and by the pad of the bonding target, and
wherein the bonding together of the lower part of the conductive particle to the pad of the substrate comprises forming a lower intermetallic compound by the lower part of the conductive particle and by the pad of the substrate.