Polymer material, composition, and method of manufacturing semiconductor device
According to one embodiment, a polymer material is disclosed. The polymer material contains a polymer. The polymer contains a first monomer unit having a lone pair and an aromatic ring at a side chain, and a second monomer unit including a crosslinking group at a terminal of the side chain, with its molar ratio of 0.5 mol % to 10 mol % to all monomer units in the polymer. The polymer material can be used for manufacturing a composite film as a mask pattern for processing a target film on a substrate. The composite film can be formed by a process including, forming an organic film on the target film with the polymer material, patterning the organic film, and forming the composite film by impregnating a metal compound into the patterned organic film.
1. A composition comprising:
a polymer material including a polymer containing a first monomer unit having a lone pair and an aromatic ring at a side chain, and a second monomer unit including a crosslinking group at a terminal of the side chain, with its molar ratio of 0.5 mol % to 10 mol % to all monomer units in the polymer, the polymer material to be impregnated with 10 atom % or more of a metal, and
a solvent.
2. The composition according to claim 1 , wherein
a molar ratio of the first monomer unit to all monomer units in the polymer is 30 mol % to 99.5 mol %.
3. The composition according to claim 1 , wherein
a main component monomer of the polymer is a (meth)acrylate, and
a component monomer of the first monomer unit is an aromatic compound derivative of a (meth)acrylic acid.
4. The composition according to claim 1 , wherein
the first monomer unit has two or more lone pair at a side chain.
5. The composition according to claim 1 , wherein
the crosslinking group includes a glycidyl group.
6. The composition according to claim 1 , wherein
the second monomer unit has the molar ratio of 1 mol % to 7 mol % to all monomer units in the polymer.
7. The composition according to claim 1 , wherein
the second monomer unit has the molar ratio of 2 mol % to 5 mol % to all monomer units in the polymer.
8. The composition according to claim 1 , wherein
the first monomer unit has the lone pair contained in a ester bond (—COO—), a cyano group (—C≡N), a pyridine skeleton, and an amino group (—NH2).
9. The composition according to claim 1 , wherein
the polymer contains a third monomer unit including a group formable a carboxyl group due to heating or light irradiation at the terminal of the side chain.
10. The composition according to claim 9 , wherein
a molar ratio of the third monomer unit to all monomer units in the polymer is 0.2 mol % to 50 mol %, and
a molar ratio of the first monomer unit to all monomer units in the polymer is 49.5 mol % to 99.3 mol %.