Semiconductor device and method of manufacturing the same
View Patent ↗In a method of manufacturing a semiconductor device, the semiconductor device includes a non-volatile memory formed in a memory cell area and a ring structure area surrounding the memory cell area. In the method, a protrusion of a substrate is formed in the ring structure area. The protrusion protrudes from an isolation insulating layer. A high-k dielectric film is formed, thereby covering the protrusion and the isolation insulating layer. A poly silicon film is formed over the high-k dielectric film. The poly silicon film and the high-k dielectric film are patterned. Insulating layers are formed over the patterned poly silicon film and high-k dielectric film, thereby sealing the patterned high-k dielectric film.
1. A semiconductor device including:
a first ring structure disposed over a substrate; and
an interlayer dielectric (ILD) layer disposed over the first ring structure, wherein:
the first ring structure includes:
a first isolation insulating layer disposed in a first trench formed in the substrate;
a first frame shaped poly silicon layer;
a first dielectric layer disposed between the first frame shaped poly silicon layer and the substrate and between the first frame shaped poly silicon layer and the first isolation insulating layer; and
first sidewall spacers formed on sides of the first frame shaped poly silicon layer, and
the first dielectric layer is physically separated from the ILD layer by the first sidewall spacers.
2. The semiconductor device of claim 1 , further comprising a second ring structure surrounding the first ring structure, wherein:
the ILD layer is disposed over the second ring structure,
the second ring structure includes:
a second frame shaped poly silicon layer surrounding the first frame shaped poly silicon layer;
a second dielectric layer disposed between the second frame shaped poly silicon layer and the substrate; and
second sidewall spacers formed on sides of the second frame shaped poly silicon layer, and
the second dielectric layer is physically separated from the ILD layer by the second sidewall spacers.
3. The semiconductor device of claim 2 , wherein the first dielectric layer and the second dielectric layer are made of a same material.
4. The semiconductor device of claim 3 , wherein the same material is a high-k dielectric material made of an oxide of at least one element selected from the group consisting of Hf, Y, Ta, Ti, Al and Zr.
5. The semiconductor device of claim 2 , wherein:
the substrate includes a protrusion,
the first dielectric layer is disposed on a top and a first side of the protrusion, and
the second dielectric layer is disposed on the top and a second side of the protrusion opposite to the first side.
6. The semiconductor device of claim 5 , wherein a diffusion region is formed at the protrusion between the first ring structure and the second ring structure.
7. The semiconductor device of claim 5 , wherein:
the first isolation insulating layer is disposed in an inside the ring structure,
the semiconductor device comprises a second isolation insulating layer disposed in a second trench formed in the substrate in an outside the ring structure, and
a thickness of the first isolation insulating layer is smaller than a thickness of the second isolation insulating layer.
8. The semiconductor device of claim 1 , wherein:
the substrate includes a protrusion, and
the first dielectric layer is disposed on a top and a side of the protrusion.
9. A semiconductor device including:
a memory formed in a memory cell area of a substrate;
a logic circuit formed in a logic circuit area of the substrate;
a first ring structure surrounding the memory cell area and separating the memory cell area from the logic circuit area; and
an interlayer dielectric (ILD) layer disposed over the first ring structure, wherein:
the first ring structure includes:
a first frame shaped poly silicon layer;
a first dielectric layer disposed between the first frame shaped poly silicon layer and the substrate; and
first sidewall spacers formed on sides of the first frame shaped poly silicon layer, and
the first dielectric layer is physically separated from the ILD layer by the first sidewall spacers.
10. The semiconductor device of claim 9 , further comprising a second ring structure surrounding the memory cell area and separating the memory cell area from the logic circuit area, wherein:
the ILD layer is disposed over the second ring structure,
the second ring structure includes:
a second frame shaped poly silicon layer surrounding the first frame shaped poly silicon layer;
a second dielectric layer disposed between the second frame shaped poly silicon layer and the substrate; and
second sidewall spacers formed on sides of the second frame shaped poly silicon layer, and
the second dielectric layer is physically separated from the ILD layer by the second sidewall spacers.
11. The semiconductor device of claim 10 , wherein the first dielectric layer and the second dielectric layer are made of a same material.
12. The semiconductor device of claim 11 , wherein the same material is a high-k dielectric material made of an oxide of at least one element selected from the group consisting of Hf, Y, Ta, Ti, Al and Zr.
13. The semiconductor device of claim 10 , wherein:
the substrate includes a protrusion,
the first dielectric layer is disposed on a top and a first side of the protrusion, and
the second dielectric layer is disposed on the top and a second side of the protrusion opposite to the first side.
14. The semiconductor device of claim 13 , wherein a diffusion region is formed at the protrusion between the first ring structure and the second ring structure.
15. The semiconductor device of claim 13 , further comprising:
a first isolation insulating layer disposed in the memory cell area; and
a second isolation insulating layer disposed in the logic circuit area,
wherein a thickness of the first isolation insulating layer is smaller than a thickness of the second isolation insulating layer.
16. The semiconductor device of claim 9 , wherein the memory is a non-volatile memory.
17. The semiconductor device of claim 9 , wherein the first ring structure has a rectangular frame shape.
18. A semiconductor device including:
a logic circuit formed in a logic circuit area of a substrate;
a ring structure surrounding the logic circuit area; and
an interlayer dielectric (ILD) layer disposed over the ring structure, wherein:
the ring structure includes:
a frame shaped poly silicon layer;
a dielectric layer disposed between the frame shaped poly silicon layer and the substrate; and
sidewall spacers formed on sides of the frame shaped poly silicon layer, and the dielectric layer is physically separated from the ILD layer by the sidewall spacers.
19. The semiconductor device of claim 18 , wherein the dielectric layer is made of an oxide of at least one element selected from the group consisting of Hf, Y, Ta, Ti, Al and Zr.
20. The semiconductor device of claim 18 , wherein:
the substrate includes a protrusion,
the dielectric layer is disposed on a top and a side of the protrusion,
the semiconductor device further includes:
a first isolation insulating layer disposed over the substrate in an inside of the ring structure; and
a second isolation insulating layer disposed over the substrate in n outside of the ring structure, and
an upper surface of the first isolation insulating layer is higher than an upper surface of the second isolation insulating layer.