Semiconductor device
There is provided a semiconductor device including a substrate whose surface is made of an insulation material, a semiconductor chip flip-chip connected on the substrate, and a heat sink bonded to the semiconductor chip via a thermal interface material and fixed to the substrate outside the semiconductor chip, in which the heat sink has a protrusion part protruding toward the substrate and bonded to the substrate via a conductive resin between a part bonded to semiconductor chip and a part fixed to the substrate and the heat sink has a stress absorbing part. According to the present invention, the protrusion part of the heat sink is prevented from being peeled off from the substrate at the part where the protrusion part of the heat sink is bonded to the substrate.
1. A semiconductor device, comprising:
a substrate;
a semiconductor chip on a top side of the substrate;
an underfill between a bottom side of the semiconductor chip and the top side of the substrate; and
a heatsink on a top side of the substrate, wherein the heatsink comprises:
a central portion over a top side of the semiconductor chip;
a fixing part coupled to the top side of the substrate;
a protrusion part coupled to the top side of the substrate between the fixing part and the semiconductor chip; and
a recession between the central portion and the fixing part;
wherein a thickness of the heatsink at the recession is less than a thickness of the heatsink between the protrusion part and the fixing part, and a thickness of the heatsink adjacent to the fixing part is the same as a thickness of the central portion of the heatsink;
wherein the recession comprises an etched U-shape; and
further comprising a thermal interface material (TIM) contacting the central portion of the heatsink and the top side of the semiconductor chip, wherein the recession is free of the underfill, and the TIM is discrete from the underfill.
2. The semiconductor device of claim 1 , wherein the fixing part is attached to the top side of the substrate via an adhesive.
3. The semiconductor device of claim 1 , wherein the protrusion part is coupled to the top side of the substrate via a conductive adhesive.
4. The semiconductor device of claim 1 , wherein the heatsink has a lower rigidity at the recession than between the protrusion part and the fixing part.
5. The semiconductor device of claim 1 , wherein the recession comprises a groove in the heatsink.
6. The semiconductor device of claim 1 , wherein the recession has a rectangular shape.
7. The semiconductor device of claim 1 , wherein the recession has a curved shape.
8. The semiconductor device of claim 1 , wherein the recession is between the protrusion part and the fixing part.
9. The semiconductor device of claim 1 , further comprising a region in the heatsink between the protrusion part and the fixing part, wherein a thickness of the heatsink at the recession is less than a thickness of the heatsink at the region.
10. A semiconductor device, comprising:
a substrate;
a semiconductor chip on a top side of the substrate;
an underfill between a bottom side of the semiconductor chip and the top side of the substrate;
a lid on a top side of the substrate over the semiconductor chip, wherein the lid comprises:
a fixing part coupled to the top side of the substrate; and
a protrusion part coupled to the top side of the substrate between the fixing part and the semiconductor chip; and
wherein the lid has a recessed groove adjacent to the semiconductor chip and the fixing part, wherein a rigidity of the lid at the recessed groove is less than the rigidity of the lid between the protrusion part and the fixing part, a thickness of the lid at the recessed groove is less than a thickness of the lid between the protrusion part and the fixing part, and a thickness of the lid adjacent to the fixing part is the same as a thickness of a central portion of the lid;
wherein a sidewall of the recessed groove is contiguous with a sidewall of the protrusion part; and
further comprising a thermal interface material (TIM) contacting the central portion of the lid and the top side of the semiconductor chip, wherein the recessed groove is free of the underfill, and the TIM is discrete from the underfill.
11. The semiconductor device of claim 10 , wherein the fixing part is attached to the top side of the substrate via an adhesive.
12. The semiconductor device of claim 10 , wherein the protrusion part is coupled to the top side of the substrate via a conductive adhesive.
13. The semiconductor device of claim 10 , wherein the recessed groove has a rectangular shape.
14. The semiconductor device of claim 10 , wherein the recessed groove has a curved shape.
15. The semiconductor device of claim 10 , wherein the recessed groove is between the protrusion part and the fixing part.
16. The semiconductor device of claim 10 , further comprising a region in the lid between the protrusion part and the fixing part, wherein a thickness of the lid at the recessed groove is less than a thickness of the lid at the region.
17. The semiconductor device of claim 10 , wherein the recessed groove contiguously surrounds all four sides of the semiconductor chip.
18. A method, comprising:
providing a substrate;
providing a semiconductor chip on a top side of the substrate;
providing an underfill between a bottom side of the semiconductor chip and the top side of the substrate;
providing a heatsink on a top side of the substrate, wherein the heatsink comprises:
a central portion over a top side of the semiconductor chip;
a fixing part coupled to the top side of the substrate;
a protrusion part coupled to the top side of the substrate between the fixing part and the semiconductor chip; and
a recession between the central portion and the fixing part; and
providing a thermal interface material (TIM) contacting the central portion of the heatsink and the top side of the semiconductor chip, wherein the recession is free of the underfill, and the TIM is separate from the underfill;
wherein a thickness of the heatsink at the recession is less than a thickness of the heatsink between the protrusion part and the fixing part, and a thickness of the heatsink adjacent to the fixing part is the same as a thickness of the central portion of the heatsink; and
wherein the recession comprises an etched U-shape.
19. The method of claim 18 , wherein the fixing part is attached to the top side of the substrate via an adhesive.
20. The method of claim 18 , wherein the protrusion part is coupled to the top side of the substrate via a conductive adhesive.