IP Library Granted Patent US 10,889,905
Granted Patent B2
US 10,889,905 · App. 16/593,397 · Granted Jan 12, 2021

Methods of generating manganese (III) ions in mixed aqueous acid solutions using ozone

Inventors: Andreas Scheybal (Zurich, CH); Katharina Weitershaus (Kriens, CH); Krishna Balantrapu (Cambridge, MA)
C25C1/10C08J7/14
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,889,905
App. No.
16/593,397
Granted
Jan 12, 2021
Kind
B2
Abstract

Manganese-(III) species is generated and regenerated in a mixed aqueous acid solution containing manganese-(II) species by injecting ozone gas in the mixed aqueous acid solution such that ozone oxidizes at least some of the manganese-(II) species to the manganese-(III) species with at least 60% Mn(III) generation efficiency. The acids include sulfuric acid and an alkane sulfonic acid. The aqueous acid solution containing manganese-(III) and manganese-(II) species is used to etch polymer materials. The etch is a chrome-free etch method.

Claims (12)

1. A method comprising:

a) providing a substrate comprising one or more organic polymers;

b) providing an aqueous acid solution comprising sulfuric acid, one or more alkane sulfonic acids and Mn(II) ions and counter anions;

c) injecting ozone gas in the aqueous acid solution to oxidize the Mn(II) ions with ozone to generate at least 15 mmol/L Mn(III) ions, wherein efficiency of oxidizing Mn(II) ions with the ozone to generate the at least 15 mmol/L Mn(III) ions is at least 60%, and wherein the ozone gas is injected in the aqueous acid solution at a rate of 0.1 g/L/hour to 10 g/L/hour; and

d) contacting the substrate comprising the one or more organic polymers with an aqueous acid solution containing the at least 15 mmol/L Mn(III) ions to etch the one or more polymers of the substrate.

2. The method of claim 1 , wherein the efficiency is at least 70%.

3. The method of claim 2 , wherein the efficiency is 80% to 95%.

4. The method of claim 1 , wherein the aqueous ozone gas is injected in the aqueous acid solution at a rate of 0.2 g/L/hour to 7 g/L/hour.

5. The method of claim 1 , wherein a concentration of the Mn(III) ions is from 15-70 mmol/L.

6. The method of claim 5 , wherein the concentration of the Mn(III) ions is from 30-60 mmol/L.

7. The method of claim 6 , wherein the concentration of the Mn(III) ions is from 35-55 mmol/L.

8. The method of claim 1 , wherein the aqueous acid solution further comprises one or more sources of metal ions.

Assignments (4)
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 073515/0243 →
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
Reel/Frame 073517/0298 →
CHANGE OF NAME Recorded Oct 29, 2024
From: ROHM & HAAS ELECTRONIC MATERIALS LLC
To: DUPONT ELECTRONIC MATERIALS INTERNATIONAL, LLC
Reel/Frame 069272/0383 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 27, 2022
From: BALANTRAPU, KRISHNA; SCHEYBAL, ANDREAS; WEITERSHAUS, KATHARINA
To: ROHM AND HAAS ELECTRONIC MATERIALS LLC
Reel/Frame 058871/0156 →