Bonding apparatus and bonding method
A bonding apparatus bonds a semiconductor die, which has a first mam surface provided with a bump electrode, to a substrate by means of thermo-compression, with a thermo-compression film being interposed therebetween. The bonding apparatus includes: an intermediate stage that has a die placing surface on which the semiconductor die is placed such that the die placing surface faces the first main surface; and a bonding tool which detachably holds a second main surface of the semiconductor die that is placed on the intermediate stage, the second main surface being on the reverse side of the first main surface. The intermediate stage has a push-up mechanism which applies, to the first main surface of the semiconductor die, a force for separating the semiconductor die therefrom in the normal direction of the die placing surface (in a Z-axis direction).
1. A bonding apparatus, bonding an electronic component, which has an electrode surface provided with a plurality of electrode portions, to a substrate or another electronic component by thermo-compression, with a thermo-compression film attached to the electrode surface being interposed therebetween, the bonding apparatus comprising:
a stage that has a placing surface on which the electronic component is placed, with the thermo-compression film being interposed therebetween; and
a bonding tool which detachably holds a main surface of the electronic component that is placed on the stage, the main surface being on a reverse side of the electrode surface,
wherein the stage has a push-up unit which applies, to the electrode surface of the electronic component, a force for separating the electronic component therefrom in a normal direction of the placing surface.
2. The bonding apparatus according to claim 1 ,
wherein the push-up unit has a press-up member comprising a contact portion that is brought into contact with the electrode surface, and the press-up member reciprocates in the normal direction such that a first position at which the contact portion is not in contact with the electrode surface placed on the placing surface and a second position at which the contact portion is brought into contact with the electrode surface and the electronic component is separated from the placing surface in the normal direction are switched to each other.
3. The bonding apparatus according to claim 1 ,
wherein the push-up unit has a blowing portion from which gaseous matter is blown to the electrode surface.
4. A bonding method for bonding an electronic component using a bonding apparatus, the bonding apparatus bonding the electronic component, which has an electrode surface provided with a plurality of electrode portions, to a substrate or another electronic component by thermo-compression, with a thermo-compression film attached to the electrode surface being interposed therebetween, the bonding apparatus comprising:
a stage that has a placing surface on which the electronic component is placed, with the thermo-compression film being interposed therebetween; and
a bonding tool which detachably holds a main surface of the electronic component that is placed on the stage, the main surface being on a reverse side of the electrode surface,
wherein the stage has a push-up unit which applies, to the electrode surface of the electronic component, a force for separating the electronic component therefrom in a normal direction of the placing surface, the bonding method comprising:
a step of placing the electronic component on the stage that has the placing surface on which the electronic component is placed, with the thermo-compression film being interposed therebetween; and
a step of holding the electronic component by using the bonding tool which detachably holds the main surface of the electronic component that is placed on the stage, the main surface being on the reverse side of the electrode surface,
wherein the step of holding the electronic component includes
a step of separating the electronic component from the stage by applying the force to the electrode surface in the normal direction of the placing surface, and
a step of holding, by the bonding tool, the electronic component separated from the stage.