IP Library Granted Patent US 11,296,136
Granted Patent B2
US 11,296,136 · App. 16/640,957 · Granted Apr 5, 2022

Imaging apparatus and manufacturing method for imaging apparatus

Inventors: Nobuyuki Nagai (Kanagawa, JP); Shusaku Yanagawa (Kanagawa, JP)
Assignee: Sony Semiconductor Solutions Corporation
H01L27/14623H01L27/14618H01L27/14627H01L27/14685
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Quick Facts
Patent No.
US 11,296,136
App. No.
16/640,957
Granted
Apr 5, 2022
Kind
B2
Abstract

In an imaging apparatus provided with a substrate having transparency, warping of the substrate is prevented while stray light is shielded. The imaging apparatus includes a sensor chip, a transparent substrate, a light shielding wall, and an optical filter. In this imaging apparatus, a solid-state imaging element is provided in a light receiving region of the sensor chip. Furthermore, in the imaging apparatus, the transparent substrate is equipped on an outer edge portion of the sensor chip. In addition, in the imaging apparatus, the light shielding wall shields light that passes through the transparent substrate and enters the front light receiving region. The light shielding wall is formed on the optical filter.

Claims (40)

1. An imaging apparatus, comprising:

a sensor chip in which a solid-state imaging element is provided in a light receiving region;

a transparent substrate equipped on an outer edge portion of the sensor chip;

a light shielding wall that shields light that passes through the transparent substrate and enters the light receiving region; and

an optical filter on which the light shielding wall is formed,

wherein there is no physical contact between the transparent substrate and the optical filter.

2. The imaging apparatus according to claim 1 , further comprising a flexible material filled between the light shielding wall and the transparent substrate.

3. The imaging apparatus according to claim 1 , wherein the light shielding wall includes a cured ultraviolet curable resin.

4. The imaging apparatus according to claim 1 , wherein the light shielding wall includes a cured thermosetting resin.

5. The imaging apparatus according to claim 1 , wherein the light shielding wall has an L-shaped cross section, and

wherein an inner edge portion of the transparent substrate is provided with a step that restricts a movement of the optical filter in a direction parallel to a plane of the sensor chip.

6. The imaging apparatus according to claim 1 , wherein the light shielding wall protrudes in a direction perpendicular to the light receiving region, and

wherein the light shielding wall is formed in a vicinity of the transparent substrate on a surface of the optical filter facing the light receiving region, out of two surfaces of the optical filter.

7. The imaging apparatus according to claim 6 , further comprising:

a lens barrel; and

a partition plate whose side surface is connected to an inner wall of the lens barrel, wherein

a surface of the optical filter on which the light shielding wall is not formed, out of the two surfaces of the optical filter, is adhered to the partition plate.

8. The imaging apparatus according to claim 1 , wherein there is no physical contact between the transparent substrate and the light shielding wall.

9. The imaging apparatus according to claim 1 , wherein there is no physical contact between the light shielding wall and the sensor chip.

10. The imaging apparatus according to claim 1 , wherein a gap is provided between the transparent substrate and the light shielding wall.

11. The imaging apparatus according to claim 1 , wherein a gap is provided between the light shielding wall and the sensor chip.

12. The imaging apparatus according to claim 1 , wherein a gap is provided between the transparent substrate and the optical filter.

13. A manufacturing method for an imaging apparatus, the manufacturing method comprising:

a light shielding wall forming procedure of forming a light shielding wall that shields light that passes through a transparent substrate and enters a light receiving region, on an optical filter; and

a substrate equipping procedure of equipping the transparent substrate on an outer edge portion of a sensor chip in which a solid-state imaging element is provided in the light receiving region,

wherein there is no physical contact between the transparent substrate and the optical filter.

14. The manufacturing method according to claim 13 , wherein

the light shielding wall forming procedure includes:

an application procedure of applying an ultraviolet curable resin to the optical filter;

a masking procedure of masking a predetermined part of the optical filter applied with the ultraviolet curable resin; and

an exposure procedure of forming the light shielding wall by exposing the masked optical filter to an ultraviolet ray.

15. The manufacturing method according to claim 13 , wherein

the light shielding wall forming procedure includes:

an application procedure of applying a thermosetting resin to the optical filter applied with a thermosetting resin; and

a procedure of patterning the thermosetting resin into a predetermined shape using a mold in the optical filter applied with the thermosetting resin.

16. The manufacturing method according to claim 13 , wherein there is no physical contact between the transparent substrate and the light shielding wall.

17. The manufacturing method according to claim 13 , wherein there is no physical contact between the light shielding wall and the sensor chip.

18. The manufacturing method according to claim 13 , wherein a gap is provided between the transparent substrate and the light shielding wall.

19. The manufacturing method according to claim 13 , wherein a gap is provided between the light shielding wall and the sensor chip.

20. The manufacturing method according to claim 13 , wherein a gap is provided between the transparent substrate and the optical filter.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 13, 2020
From: NAGAI, NOBUYUKI; YANAGAWA, SHUSAKU
To: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
Reel/Frame 052165/0197 →
Priority Claims (1)
JP JP2017-164240 · Aug 29, 2017 · national
Continuity (1)
Related Publication 20200212096A1 · Jul 2, 2020
Cited By (2)
US 12,313,812 US 12,663,596